Dimension Standards

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Calibrated Device (1) Pitch Standard (by AFM)
(2) Grating Pitch Standard (by Diffractometer)
(3) Line Width Standard (by AFM) 
Range
(1) 50 nm to 25 µm
(2) 280 nm to 10 μm
(3) 50 nm to 1000 nm
Uncertainty
(1) 0.13 nm to 1.67 nm 
(2) 0.009 nm to 6.3 nm
(3) 3.3 nm to 20 nm
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