Dimension Standards

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Calibrated Device    Image Standards
Range  (1) 2D:10 μm≦X<1.4 mm & 10 μm≦Y<1.0 mm
(2) 1D:10 μm≦X<400 mm or 10 μm≦Y<400 mm
(3) 2D:10 μm × 10 μm ~ 400 mm × 400 mm 
Uncertainty  (1) 1.98 × [(0.18)2+(8.39 × 10-4 × L)2]1/2 μm,L: Size of calibrated items in mm
(2) 1.97 × [(0.32)2+(8.39 × 10-4 × L)2]1/2 μm,L: Size of calibrated items in mm
(3) 1.97 × [(0.39)2+(8.39 × 10-4 × L)2]1/2 μm,L: Size of calibrated items in mm 
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