Dimension Standards

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Calibrated Device  (1) SiO2 Silicon Dioxide Standard Reference Materials (by Spectroscopic Ellipsometer)
(2) Thin Film Thickness Standards ( by X-ray Reflectivity)
(3) SiOCH Porous Thin Film Standards (by X-ray Reflectivity Porosimetry)
Range (1) 1.5 nm to 1000 nm
(2) 1.5 nm to 200 nm(3) Nominal pore diameter: 2.0 nm
Uncertainty 

(1) 0.10 nm
(2) 0.02 nm
(3) 0.3 nm

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