Dimension Standards

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Calibrated Device Step Height Standards
Range (1) Optical type:10 nm~3 μm
(2) Probe type:10 nm~50 μm 
Uncertainty  (1) Optical:[32+(1.2D)2]1/2 nm
(2) Probe type:[52+(3.2D)2]1/2 nm
D:Step height measurement value,Unit: μm (Best measurement capability) 
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