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Reports in Year 2016

1 Technical resport of   measurement system validation procedure for total spectral radiant flux standard lamp(No.073A50293) This document is the evaluation report for the total spectral radiant flux standard lamps total luminous flux measurement system (O02). This document contains the system description, the measurement principle and measurement method by using the integrating sphere photometer. This report consists of the design of quality assurance, the analysis of error source, the system capability and uncertainty.
2 Flow computer software verification procedure(No.073A50216) The natural gas measurement in line is not necessary to correct in low pressure use. And should be correction temperature and pressure in medium or high pressure.The flow correction is use flow computer.The flow computer according to AGA8 to calculate compressibility factor and convert the flow to standard condition. The flow computer software is correct or not is necessary to be check.
3 Revised Recommendation of Technical Specification for Type Approval of Non-automatic Weighing Instruments(No.073A50207) This document is revised Recommendation of "Technical Specification for Type Approval of Non-automatic Weighing Instruments" for the revision of CNPA 76 to meet the international recommendation from OIML R76-1:2006.
4 The draft of technical specifications ,Verification and inspection of measuring instrument ,Rotary displacement gas meters(No.073A50206) This technical specifications refers from international recommendations document R137-1&2:2012 Gas meters which is released by International Organization of Legal Metrology, OIML and European Standards, EN14280:2015 Gas meters - Rotary displacement gas meters. Considering the status of the domestic   ultrasonic domestic gas meters development to set this technical   specifications.
5 In-situ Chatter Monitoring Technical Report(No.073A50202) National Measurement Laboratory (NML) utilized the self-developed ultrasonic sensor to monitoring the vibration between the working piece and the tooling continuously. The chatter, which is unwanted during tooling, was able to be discovered by analyzing the amplitude and the frequency of the vibration.Consequently. Consequently, the alert was issued by self-developed software and the loss of human resource and material was reduced. In-situ chatter monitoring technique is able to detect the amplitude up to 4 μm within 2 Hz to 7 kHz. This study can provide the machinery industries a low-cost and easy operating chatter monitoring system.
6 The Outline of Small Optical Particle Counter Design(No.073A50200) In order to be widely used in medical, electronic manufacturing, precision machinery, air pollution monitoring, microbiology and biomedical manufacturing industries, the Department of the Department of the realization of the various dust-free level of the table, clean room production monitoring , Thus ensuring the quality of the product.This year we designed a smaller volume of optical particle counter.The chamber volume is reduced to 50% of the original volume. This report is based on the basic principles of optical design to high power first diode as a light source and reduce the volume of the particle counter.
7 Non-invasive flow   measurement technology(No.073A50199) A contact-free flow measurement research is proposed using TOIRT (Temperature Oscillation Infrared Thermography) technique, including a pulsed laser source, an IR scanner, and the associated data control/acquisition system. Due to the heat energy generated by a pulsed laser, the amplitude and phase shift of the   temperature oscillations of surface are functional related to the radial distance from the heated spot and the convection coefficient. The benchmark between convection coefficient and mass flow rate is well established. The goal of this project is to establish a non-invasive measurement technology for the fluids of water and air, and investigate the feasibility of this method for gas nitrogen and liquid methanol solution, which are commonly used in semiconductor industry and fuel cell products, respectively.
8 All Polarization Maintaining Erbium-doped and Mode-locked Figure-Eight Fiber Lasers with Different Configurations(No.073A50198) We demonstrate several ways of achievement of mode-locking in a figure-eight (F8) fiber laser which is comprised of an all polarization-maintaining (PM) fiber structure utilizing a nonlinear amplifying loop mirror to get passive mode-locking. In order to achieve stable mode-locking with low phase noise, different elements and configurations were tested and the influence of cavity   dispersion and nonlinearity to the performance of laser were elucidated. For each configuration, output characteristics including output power, optical spectrum, and autocorrelation trace were measured and compared with precedent results. We observed a particular switching behavior and the single and bound solitonic characteristics. In addition, the mode-locking of non-PM fiber laser based on nonlinear polarization rotation (NPR) has been examined to compare with that of F8 laser based on nonlinear amplifying loop mirror. Finally, a stable mode-locked figure-eight laser with nonreciprocal elements is realized, which is immune to environmental fluctuations and delivers subpicosecond pulses separated by 20 ns with timing jitter of about several picosecond integrated from 1 kHz to 1 MHz. This high stability and environment-free performance of our laser is suitable to be further developed as a source of fiber optical frequency combs.
9 Report of domestic   proficiency testing in binary gas mixtures preparation and analysis(No.073A50194) We report herein the method and results in “Report of domestic proficiency testing in binary gas mixtures preparation and analysis”. The proficiency testing was from 2012 to 2016. During the activity, NML (National Measurement Laboratory, Taiwan)evaluated concentrations of cylinder standard gases (include SO2 in N2, NO in   N2, HCl in N2, O2 in N2, and CO in N2) that are applicable to CEMS (continuous emission monitoring systems) calibrate, with FTIR (Fourier transform infrared spectroscopy), QMS (quadrupole mass analyzer), GC-TCD (gas chromatograph-thermal conductivity detector), and GC-FID (gas chromatograph-flame ionization detector) with methanizer. To demonstrate the result, nominal concentration of cylinder standard gases was compared with its certified concentration, and |En| value was applied to evaluate the   concentration analysis ability of laboratories or gas preparation ability of domestic gas companies.
10 High aspect ratio Through Silicon Via depth white light spectrum reflectometry measurement system(No.073A50191) 3DIC (Three dimensional integrated circuit) technology is used to solve the RC delays in the past by following Moore's Law. Using three-dimensional stack package, electrical conductive transport through vertical directive shorter path, it shortens the length of the wire to reduce the RC delay and other issues. It also can reduce the noise and energy transmission loss. Metal wires through holes of silicon wafer directly to contact with the adjacent layer and make   them conduct.The geometric characteristics of silicon via etch process affect the process yield, such as the depth of and the critical dimension of Through Silicon Via.In this article, we applied the spectral reflectometer and developed a corresponding optical system for TSV measurement. In our analysis, this method can achieve the high aspect ratio which was 15: 1 depth and width of TSV. Measurement speed is less than 200 ms. Hole width measurement in the range of 5 μm to 50 μm.
11 Evaluation of multi-magnification white light interferometric topography measurement system(No.073A50190) In recent years, IC manufacturing industry has changed from 2D planar IC manufacturing technology to 3D stereoscopic stacked IC manufacturing technology, it also needs to establish the process of measuring the measurement technology and measurement   standards.Using the White Light Interferometers technology to replace the destruction of detection methods, to further enhance the measurement accuracy.This method can be used to measure μ-Bump topography, so you can analyze μ-Bump height.
12 The draft of technical specifications for verification and inspection of measuring   instrument for ultrasonic domestic gas meters(Large meter)(No.073A50187) This technical specifications refers from international recommendations document R137-1&2:2012 Gas meters which is released by International Organization   of Legal Metrology, OIML and European Standards, EN14236:2007 Ultrasonic domestic gas meters. Considering the status of the domestic ultrasonic   domestic gas meters development to set this technical specifications.
13 Analysis of frequency   stability of optical comb and development of its mode-locking for fiber-optic   communications(No.073A50184) The frequency fluctuation of optical comb that generated by a continuous wave laser coupled into a 100 GHz micro-resonator via a single tapered fiber was analyzed from this report. The short-term (<1 s) and long-term (~ 1 hr) stability are <10 MHz and <3 GHz, with respectively. In order to produce more stable   fiber-optic communications used optical comb, and without tuning the pumping   wavelength to produce a thermal triangle, we set up a double coupling configuration, and produce multi-wavelength laser by an external cavity gain. More than 10 optical combs with mode-locked pulse width of less than 2 ps was generated.
14 Infrared Ear Thermometer Accuracy Test Procedure- For laboratory use(No.073A50180) This technical report for the laboratory infrared ear thermometer accuracy of the test method basis. The applicable measurement range is 34.0 ℃ ~ 43.0 ℃.
15 Development of portable multi-wavelength light source for fiber-optic   communication(No.073A50179) One optical micro-resonator for producing DWDM fiber-optic communication light sources has a benefit of replacing multiple lasers. However, there is still a lack of the real portable application. In this paper, homemade tapered fiber and fused silica based micro-resonator with high quality factor was employed to generate multi-wavelength laser sources for fiber-optic communications. With   indirect adhesive and anti-vibration packaging, optical comb reliability and the quality of fiber-optic communication was tested via moving it away up to 7 km by taxi. The results showed that the comb is still sustainable and stable. As the pump wavelength, power and polarization was adjusted to generate four times the free spectral range (4 FSR) of the optical comb, the best fiber-optic communication transmission quality with error vector magnitude (EVM) value of 3.8 % was performed. It is close to the general   communication threshold of 3 %.
16 Introducton to microwave S-parameter measurement(No.073A50178) 5G mobile communication technology has become an inevitable trend in Taiwan telecom industry. 5G communication technology is mainly involved in the development of the issues, including key   technologies such as large-scale input and output (massive MIMO),   millimeter-wave waveform design, Co-frequency co-time full duplex, and   dynamic spectrum sharing technology. The research and development are all   related to S (scattering parameters) parameter measurement. Basically, the microwave S-parameter is measured by using a network analyzer, a precision calibration kit, and a standard calibration procedure. Verification procedures are performed through a Verification Kit to ensure accuracy. The standard parts are based on a complete traceability system, can be traced back to SI unit. This report mainly discusses how to establish the standard of 3.5 mm microwave S-parameter, its traceability system, and discuss the key traceability parameters to ensure the reliability of the network analyzer.
17 Research report of  certification practicability in   non-automatic weighing instruments in OIML R76:2006(No.073A50176) This report is for the feasibility study of international standard OIML R76-2006, to the execution of indirect laboratory certification practicability in non-automatic weighing instruments.
18 Study of the measurement efficiency on the number concentration of colloidal nanoparticles by using a self-made two-fluidic atomizer(No.073A50175) This technical report   is to discuss the application of a self-made two-fluidic atomizing module, which is developed in the 105-year BSMI Industrial Metrology Program, in the aerosol source generation for the scanning mobility particle sizer (SMPS) and the efficiency study of the number concentration. This report also discuss   the effects of the different inner diameters of sampling tube, which is 0.25, 0.5 and 0.75 respectively, on the efficiency of number concentration measurement with the nanoparticles in a diameter range from 50 to 300 nm.
19 Dual-axis rotational fixture design and adjusting process of LASTER(No.073A50171) The research results were presented in this technical report for developing the dual-axis rotational fixture design and adjusting process of LASTER (Larger Scale Auto-Tracking Interferometer) in which the contents of this study consist of LASTER mechanism design and the associated measurement process, through which the coordinate measuring machine (CMM) is used for checking the centering errors of dual-axis rotation, and finally the measurement results show the centering errors can be improved to be smaller than 5 μm in the new design.
20 The draft of technical specifications for verification and inspection of measuring   instrument for ultrasonic domestic gas meters(No.073A50160) This technical specifications refers from international recommendations document R137-1&2:2012 Gas meters which is released by International Organization of Legal Metrology, OIML and European Standards, EN14236:2007 Ultrasonic domestic gas meters. Considering the status of the domestic ultrasonic domestic gas meters development to set this technical specifications.
21 Production Guidelines for Certified Reference Material - di(2-ethylhexyl)phthalate in methanol(No.073A50157) This production guideline for certified reference material, di(2-ethylhexyl)phthalate in methanol, provides the operation procedure of solution preparation, and according to ISO Guide 34:2009, makes a description of the related quality documents and notice in the production procedure for the laboratory colleague.
22 UNCERTAINTY STUDY FOR   DETERMINING THE COUNTING EFFICIENCY OF LIQUID-BORNE PARTICLE   COUNTERS(No.073A50150) This Document is to provide a evaluation sequence for determining the counting efficiency uncertainty of liquid-borne particle counters for which the minimum detectable particle size is between 30 nm and 100 nm.
23 AC Electrical Power   Testing Process(No.073A50145) This report describes the testing procedures for the Single-Phase and Three-Phase AC Electrical Power. The maximum voltage is up to 500 V and the maximum current is up to 120 A. The system equipment, procedures, data analysis and report templates   of the testing are described in the report.
24 Test Procedures for Optical Spectrum Analyzer(No.073A50143) This document describes the testing procedures for optical spectrum analyzer. The working standards of this system are wavemeter and fiber optical power meter. It can be applied to test the wavelength and optical power measurement accuracy of the optical spectrum analyzer.  Substitution method is adopted for both the wavelength and optical power measurement. For wavelength measurement, a laser with specified wavelength is measured by the wavemeter and optical spectrum analyzer, respectively. And for optical power measurement, a laser with specified optical power is measured by the fiber optical power meter and optical spectrum analyzer, respectively. From the above procedures, the abilities of wavelength and optical power measurement of the   optical spectrum analyzer are obtained.
25 AC Electrical Energy   Testing Process(No.073A50124) This report describes the testing procedures for the Single-Phase and Three-Phase AC Electrical Energy. The maximum voltage is up to 500 V and the maximum current is up to 120 A. The system equipment, procedures, data analysis and report templates of the testing are described in the report.
26 Research of Non-automatic weighing instruments(OIML R76-1 (2006):Metrological and   technical requirements - Tests)(No.073A50115) Chinese Translation of the OIML R76-1 (2006) internation Recommendation - Non-automatic weighing instruments.
27 Study of X-Ray Reflectivity for Multilayer Thin Films Using IMD Simulation(No.073A50105) X-ray metrology draws a lot of attention in semiconductor manufacturing due to the non-destructive properties. X-ray methods include high-resolution diffraction, topography, interferometry, and etc.. Among these technologies, specular X-ray   reflectivity (XRR) is one of the most important methods. XRR is able to measure the ultra-thin thickness down to nanometer scale and is not sensitive to structure parameters, such as single crystalline, poly-crystalline, and   amorphous. With scaling down the semiconductor device, the process control ability is more and more critical, especially thin film thickness. XRR is a promising tool to measure and monitor thin film thickness. Therefore, a software to simulate and fit XRR is necessary to achieve measuring film thickness. And IMD can reach the two purposes. In the viewpoint of film stacks, there are multi-layer structures in semiconductor manufacturing. And the XRR is able to measure multi-layer thin-film stacks. Thus, to satisfy the multi-layer thin-film stack   requirements, the XRR of the four structures,   SiO2/Si、HfO2/SiO2/Si、TiN/HfO2/SiO2/Si、TaN/TiN/HfO2/SiO2/Si, were investigated and the thin-film thickness effects were also studied. On the other hand, fitting the XRR data is necessary for further applications in semiconductor manufacturing. The XRR data generated by IMD from the previous section was fed back to IMD to implement the fitting procedure for the sake of studying the initial condition effects on the fitting results. Consequently, the article studied the feasibility of IMD in simulating and fitting XRR to enhance the feasibility of XRR in the future advanced applications.
28 TEST METHOD FOR   DETERMINING THE COUNTING EFFICIENCY OF LIQUID-BORNE PARTICLE   COUNTERS(No.073A50103) This Document is to provide a test sequence for determining the counting efficiency of liquid-borne particle counters for which the minimum detectable particle size   is between 30 nm and 100 nm.
29 Physical Processes of   Aerosol Condensation(No.073A50044) This article describes some physical processes and government equations of nanoparticle condensation.


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