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Reports in Year 2017

No.ReportsSummary
1 Technical Report of Fabry-Perot Interferometer Finesse Measurement(No.073A60194) This report describes the method used to measure the finesse of a Fabry-Perot interferometer. The measurement result is also presented.
2 Development of low wind speed micro-scale anemometer(No.073A60191) This study designed a paddle-type micro-cantilever beam structure and its upper layer has a platinum resistors. When any force is applied to the cantilever structure, it will be deformed, and the resistance of the platinum resistors on the structure changes. Using this principle, we designed a low wind speed   micro-scale anemometer with a target wind speed range of 0 m/s to 1 m/s and a resolution of 0.01 m/s. The paper is divided into two parts. The first part, the mathematic model of the resistance changes due to the deformation of the cantilever beam is established, then we designed the cantilever structure is suitable for measuring the target wind speed range of 0 m/s to 1 m/s and a resolution of 0.01 m/s. The second part, using numerical simulation analysis to explore the air flow through the  structure, whether the flow field affect the wind speed measurement characteristics in the parts between the outside the cantilever beam and the inner edge of the protective frame
3 Research on the Revision of the Standards and Traceability for Metrology Industry(No.073A60158) This technical report is completed the draft revision of "Weights and Measures Standards and Traceability Inspection Institutions to be Weighed in Weights and Measures", which refer to the "Enforcement Rules of Weights and Measures Act".
4 Chatter measurement in machining processes of machine tool(No.073A60156) Chatter generation may be caused by the cutting depth , feed rate, spindle rotation speed, and material properties; hence, it is difficult to predict in machining processes by means of a uni-model or spectral analysis. This study proposes a method that uses the displacement to build multiple samples, and then multivariate analysis is performed using the machine learning method (gradient boosting). The experimental set-up was divided into three parts: the hardware set-up, data processing, and model learning. Experimental results show that the model can obtain a satisfy predication  when only few data are input. Moreover, the ultrasonic sensor can be applied to monitor the chatter generation . This proposed technique will assist engineers in finding the relationship between the frequency response and chatter. This technique also can assist Center for   Measurement Standards (CMS)to complete the model learning through more    measurement results.
5 Gas meter test system performance evaluation(No.073A60143) Gas   meter test system performance evaluation Verify the performance of the gas meter test system. A total of 5 sets of commercially 4 m3/h gas meters were used for verification. A total of 5 sets of systems including Tainan Branch, Keelung   Branch, Taichung Branch and 7th division of BSMI (2 sets). Most of the system differences are less than 0.2%, the maximum is not more than 0.28%, with the measurement uncertainty of 0.25 % En are less than 0.8. The results of comparison confirm that the 5 sets gas meter test system   currently used by the BSMI are consistent.
6 Retrofit and re-test gas meter long running time performance test(No.073A60142) Retrofit   and re-test gas meter long running time performance test Selected retrofit and re-tested gas meter for long running time performance test. Selected retrofit and re-tested gas meter (2.5 m3/h, 6 m3/h each of 5 set) to conduct research. Running at maximum flow rate for 2000 hours, performance tests were compared before and after long time running test. The result was a maximum of 1.33% difference in change between before and after the long time   running test. All the gas meter were able to meet the test conformity criterion of 3% after the long time running test. After the long time running test, all the gas meter’s deviation are smaller than those before the long time running test. In other words, the gas meter has less deviation after long time running test.
7 Gas meter in use performance test report(No.073A60141) The performance test of the gas meter in use Select current meter in use (more than 3 years to 10 years). In conjunction with the BSMI sampling activities, a total of 1900 gas meter were selected. The total number of unqualified is 43, with a pass rate   of 97.7 %.。 There are 4 gas meter malfunction and a gas meter’s silver line is out of order. For non-conforming gas meter or meter’s deviation is greater than 2.5 % will  sent to the CMS (Center of Measurement Standard) for re-testing, this year a total of 45 gas meters were   re-tested。
8 All-PM fiber laser mode-locked with nonlinear polarization rotation(No.073A60128) This technical report introduces all-polarization maintaining (PM) fiber laser mode-locked by non-linear polarization rotation (NPR). NPR was used in non-PM fiber in traditional mode-locked fiber laser. An elliptical polarized light is injected into the non-PM fiber. The elliptically polarized light is the superposioton of left-handed and right-handed circularly polarized light with different intensity. The left-handed and right-handed circularly polarized   light obtain different phase after round trip propagation due to the   nonlinear effect of the fiber. This results the rotation of the long or short axis of the polarization ellips. In PM fiber, the different refraction index of the slow and fast axis may make the input light propagate along the fiber with periodic linearly, elliptically, circularly , elliptically and linearly polarized light. Therefore, it was recognized that all-PM fiber laser can not be mode-locked   by NPR. This technical report introduces mode-locking technique by injecting linearly polarized light into the PM fiber with the polarization tilted by an   angle with the slow (or fast ) axis. At the output end of the PM fiber, a quarter waveplate is used to transform the two linearly polarized lights in   the slow and the fast axis into right handed and left handed circularly polarized lights.  The superposition of the two circularly polarized lights is an elliptically polarized light. The phase of the two linearly polarized lights obtained from the slow and the fast axes are encoded in the two circularly polarized lights. Therefore, the   NPR effect is realized as in conventional non-PM NPR mode-locked fiber laser.
9 Fitting software format code conversion manual(No.073A60126) The analysis of GIXRR data needs to use the recursive method to to find the best solution. The film thickness and density are non-independent parameters. The data fitting process often gets multiple thickness-density solutions. Therefore, using different fitting theory, we can get a number of fitting results in order to get more accurate parameters and film thickness.
10 Utilization of total consumption sample introduction system for Pt nanoparticle measurement in spICP-MS(No.073A60119) Single   particle inductively coupled plasma mass spectrometry (spICP-MS) is an emerging technique for nanoparticle measurement, which not only can provide the information of particle size and number concentration, but also can give   composition analysis. These advantages make it suitable for various applications including biomedical, environmental, and cosmetic fields. Although the related publication is few, spICP-MS is still a powerful tool for nanoparticle analysis due to its simple requirement for instrument and lower detection limit. However, it needs to correct the transport efficiency before calculating the particle size and number concentration, which is a laborious process and a troublesome one due to the generation of biased   estimates of the PNC and particle size. Therefore, a high transport efficiency sample introduction system is needed.  In this study, a total-consumption sample introduction system consisting of a high performance concentric nebulizer and a small volume on-axis cylinder chamber was utilized for Pt nanoparticle measurement in spICP-MS. The system permits a transport efficiency of ~ 100 %, which is 10 times higher than   conventional sample introduction system. In addition, the size and number LOD of Pt nanoparticles were 9.5 nm and 83 particle/mL, respectively. The performance of total-consumption sample introduction system is better than commercial available sample introduction system, which make it an ideal candidate for spICP-MS application in various industries.
11 Software operation procedure and program construction of ATLI (Auto Tracking Laser   Interferometer) system(No.073A60111) This   report is the research results of the developed measurement software for ATLI (Auto Tracking Laser Interferometer) in CMS. The contents includes the graphical user interface (GUI) of the developed software, procedures for   performing ISO 230-2 and ISO 230-6 tests, measurement results analysis and compensation table generation, together with the program flowcharts corresponding to each procedure in the appendixes. Once we combine this developed software and the ATLI hardware, it is capable to measure the uniaxial displacements, face diagonals and body diagonals of the machine, and furthermore, the measurement reports which are in accordance with the definition of ISO 230 standard could be provided. The developed method is applicable to the three-axis machines, moreover, it could be used to evaluate   and improve the performance of machines.
12 Design and assembly process of ATLI Dual-axis rotational fixture with angle components(No.073A60110) This report presents the research results on the design and assembly process of an ATLI (Auto Tracking Laser Interferometer) dual-axis rotational fixture with   angle components, and the contents of this report include descriptions on the ATLI structure, mechanism and design where we strengthen the mechanism of the upper rotational fixture, is also presented, with a coordinate measuring machine (CMM) used as the measurement instrument for checking the centering errors of dual-axis rotation. The measurement result shows that centering   errors less than 5 μm were obtained.
13 Measurement System Review Summary Report - Torque Calibration System (N12)(No.073A60108) This summary report describes the measurement system review process and related records after the establishment of the “Torque Calibration System (N12)”. A measurement system review meeting was held on February 23, 2017 (Thu) and all of the review committee agreed to approve this calibration system to be   provided calibration service for external. Center for Measurement Standards (CMS) submitted the “Measurement System Review Report” of this new established “Torque Calibration System (N12)” to the Bureau of Standards,   Metrology and Inspection (BSMI) for approval to be providing calibration service for external on April 18, 2017 (Tue). And BSMI replied to agree the “Torque Calibration System (N12)” to be a national metrological standard system on April 27, 2017 (Thu) and this system can provide calibration   service for external. The calibration capability of “Torque Calibration System (N12)” is shown in the following table.
Calibration Range: (50 ~ 5000) N·m
Expanded Uncertainty: 1 × 10E-4 (Relative)
Calibration Item: Torque Transducer
14 Research Report for Compatibility Checking of Modules and Families on Type Approval of Domestic Non-automatic Weighing Instruments(No.073A60100) This project is research the compatibility check of the modules and the family for type approval of domestic non-automatic weighing instruments in conformity with the 2006 edition OIML R76.
15 Two-Pressure Humidity Generator(2500) Installation(No.073A60098) The technical report is based on the installed capacity of the two- pressure humidity generator. It is sutable for the Thunder 2500 ST and Thunder 2500 LT two models.
16 The design and verication of high pressure air temperature control   system(No.073A60092) The system is designed to improve the NML high-pressure gas flow calibration system, the flow rate of 15 m3 / h to 12000 m3 / h (absolute pressure 1 bar   state) within the range. The temperature drop per minute will less than than 1 ℃.
17 Un-common Micro-comb Behaviors(No.073A60091) Experimental observations regarding fused-quartz-based micro-combs are reported, including a simultaneous comb-line initiation behavior and phase-locked properties. Simultaneous comb-line initiation refers to a phenomenon that all the comb lines were shown at the same time in the beginning of the micro-comb   formation. This non-typical and reproducible phenomenon was identified in our experiments for the first time. Maximum of 27 comb lines can be obtained with 94.158 GHz comb line spacing (i.e. ~0.76 nm around 1554.2 nm). On the other hand, single RF   beat-note signal (FWHM 15 kHz, 1 kHz resolution) was identified in a reported micro-comb, indicating its phase-locked state. Autocorrelation signals were also measured to verify the phase-locked property. The above mentioned results could be related to the phrase “avoided mode crossings”--phenomena typically undesired in anomalous-dispersion resonators but found useful very recently. From application point of view, a user-friendly, turnkey phase-locked micro-comb source is highly in demand and yet to realize. The presented results may provide some clues for achieving this goal.
18 Measurement System Review Summary Report - Step Gauge Calibration System (D30)(No.073A60087) This summary report describes the measurement system review process and related records after the establishment of the “Step Gauge Calibration System (D30)”. A measurement system review meeting was held on February 9, 2017 (Thu) and all of the review committee agreed to approve this calibration system to be   provided calibration service for external. Center for Measurement Standards (CMS) submitted the “Measurement System Review Report” of this new established “Step Gauge Calibration System (D30)” to the Bureau of Standards, Metrology and Inspection (BSMI) for approval to be providing calibration service for external on April 11, 2017 (Tue). And BSMI replied to agree the   “Step Gauge Calibration System (D30)” to be a national metrological standard system on April 26, 2017 (Wed) and this system can provide calibration service for external. The calibration capability of “Step Gauge Calibration System (D30)” is   shown as follows.Calibration Range: 10 mm to 1010 mm
Expanded Uncertainty: 1.97 × [(0.29 μm)^2 + (4.03E-07 L)^2]^0.5 , L:   Measurement Length
Calibration Item: Step Gauge, Caliper Checker
19 Long wavelength X-ray reflectivity technique hardware specifications(No.073A60079) In this study, the long-wavelength X-ray reflectometry technology of aluminum target was developed, and the thickness of the semiconductor thin film was measured. The X-ray reflectometer was designed, including the instrument structure, optical path design, data analysis and automatic control   technology. The HfO2 50 nm film was measured , and the average fitting thickness is 48 nm, the spot size ≦ 200 μm, luminous flux ≧ 109   photons.S-1.mm-2.
20 GIXRR system control and integration Operation Manual(No.073A60078) Semiconductor output value in Taiwan ranks first in the world. The international competition is increasingly fierce, and the global semiconductor industry are moving to enhance the processing speed of components, such as reducing the size of components from 16 nm to 10 nm. At present, the semiconductor factory uses ellipsometry (ellipsometry) for film thickness measurement, its hundreds of nanometer measurement wavelength has been unable to provide sufficient thin film measurement resolution.   Because optical measurement must rely on accurate thin film material (Eg, material refractive index or extinction coefficient), and the nature of the film material in the process often changes due to the post-process environment. So the accuracy of the optical measurement film thickness still has doubts. In addition, since the thickness value is obtained by fitting the software, it must be corrected by a transmission electron microscope (TEM),   but when the film thickness is reduced to only a few nanometers or less than 1 nm. The TEM measurement range limited to nano-level, and the representative of the film thickness measurement is too low. In addition, the TEM detection method is a destructive measurement, so the development of non-destructive and accurate detection structure, film thickness and composition of the measurement method is currently urgently needed. In the future, the semiconductor meets the advanced process of 10 nm, and facing the continued narrow film size and cutting the road (test area) to remove the process changes. This study establish the ultra-thin nano-film thickness measurement technology, GIXRR development and integration technology. The instrument architecture, optical design, data analysis and automation control technology development are set up in lab.
21 Chatter measurement in machining processes of machine tool(No.073A60063) Chatter generation may be caused by the cutting depth, feed rate, spindle rotation speed, and material properties; hence, it is difficult to predict in machining processes by means of uni-model or spectral analysis. This study proposes a method that uses the displacement to build multiple samples, and then multivariate analysis is performed using the gradient boosting method. The proposed technique will assist CMS to complete the task of chatter measurement and it can also be applied to the chatter prediction in machining processes in industry.
22 Measurement Procedure of Thermal Conductivity for Thermal Needle Probe Method(No.073A60036) This test procedure is the basis for implementation of thermal conductivity measurements of materials with the thermal needle probe method for laboratory. This thermal needle probe can perform in temperatures ranging from 5 °C to 90 °C. The measurement range of thermal conductivity is 0.03 W.m-1.K-1 to 4.00 W.m-1.K-1.
23 Bilateral comparison report for microphone free-field sensitivity(No.073A60004) This article aimed to describe the process and results in the bilateral comparison between CMS/ITRI and NIM for microphone free-field sensitivity within frequency range from 1 kHz to 20 kHz. The results showed that the measurement capabilities of the two laboratories are quite satisfaction. Through this bilateral comparison results, the measurement capabilities of the newly   established microphone free-field sensitivity calibration system are demonstrated.

 

  • Last Updated:2019/11/11
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