No.

Report

Summary

1

2017-2019 BSMI Gas meter test system performance evaluation report

BSMI 2017-2019 commissioned ITRI, CMS for research on gas meter performance. This is a three-year full-term report.

2

The Customer's Satisfaction Report of NML in 2018

This research report was to evaluate the customer’s satisfaction on the calibration services provided by the National Measurement Laboratory, R.O.C. (NML).   In order to evaluate the customer’s satisfaction, a customer satisfactory survey was done to gather valuable opinions and reactions from customers. Through evaluation, the correspondence between NML’s services and customers’ demands and expectations was examined and identified.   Furthermore, the analysis of the customer satisfactory survey can be used to determine the future directions of calibration service items and to improve the quality of the calibration services. Through analyzing the data, the average rate of satisfactory degree to the NML’s services was 9.5 out of 10 in 2018. However, based on the opinions and expectations from customers, NML still had parts of the service items need to be improved. Therefore, this research report summarizes the opinions and expectations from customers and provides them to the departments of NML for reference.  

In addition to improving the unsatisfied service items, NML will provide better quality of the calibration service for customers continuously.

3

Final Report of 2019 NML Internal Audit

According to section 8.8 of ISO/IEC 17025:2017 and 8.7 of ISO 17034:2016, the laboratory and the reference material producer shall periodically and in accordance with a predetermined schedule and procedure, conduct internal audits of its activities to verify that its operations continue to comply with the requirements of the management system and standards. Therefore, NML implements the internal audit every year to confirm that each department’s operation fits the requirements of NML, ISO/IEC 17025:2017 and ISO 17034:2016. The effectiveness and suitability of NML management system are also ensured in addition. The task items and relevant records of NML internal audit in 2019 are shown as this research report.

4

2019 Retrofit and re-test gas meter long running time performance test

Retrofit and re-test gas meter long running time performance test l Selected retrofit and re-tested gas meter for long running time performance test. l Selected retrofit and re-tested gas meter (2.5 m3/h, 6 m3/h each of 5 set) to conduct research. Running at maximum flow rate for 2000 hours, performance tests were compared before and after long time running test. The result was a maximum of 0.47％ difference in change between before and after the long time running test. All the gas meter were able to meet the test conformity criterion of 3％ after the long time running test. l After the long time running test, all the gas meter’s deviation are smaller than those before the long time running test. In other words, the gas meter has less deviation after long time running test.

5

2019 BSMI Gas meter test system performance evaluation

A total of 5 sets of commercially 6 m3/h gas meters were used for verification.   The results of comparison confirm that the 6 sets gas meter test system currently used by the BSMI are consistent.

6

2019 BSMI Gas meter in use performance test report

The performance test of the gas meter in use l Select current meter in use (more than 3 years to 10 years). l In conjunction with the BSMI sampling activities, a total of 3427 gas meter were selected. The total number of unqualified is 133, with a pass rate of 96.1％.。

7

2019 Symposium on Temperature and Thermal Measurements in Industry and Science (TEMPMEKO 2019) technical report

This report mainly introduces the related results and exchanges of development of temperature measurement technologies in the Symposium on Temperature and Thermal Measurements in Industry and Science (TEMPMEKO 2019).
In view of the World Metrology Day on 20 May 2019, the new definition of the kelvin (K)—the temperature unit of the International System of Units (SI), has been officially implemented worldwide, the symposium also thinks this as the most important issue this year. For this reason, the technical report is focused on the latest developments, research directions, relevant research trends, and impacts of new temperature in the future. Through this symposium, it will helpe to plan the development directions of temperature metrology and the future coping strategies in Taiwan.

8

Instrument Calibration Technique of 500 N Deadweight Force Standard Machine

The document of “Instrument Calibration Technique for 500 N Deadweight standard machine” (system code: N09) is described preparations, calibration procedure, post-calibration, data analysis and calibration report during the measurement process. The measurement scope is under 500 N. The calibrated items are including proving ring, force transducer, dynamometer and force gauge.
The documentation also could be the reference and training guide for the persons to perform the calibration work on this machine.

9

The Procedure for AFM Measurement on Surface and Mechanical Properties

This procedure provides details of utilizing atomic force microscopy system to quantitatively measure the topography and mechanical properties of sample surface such as Young’s modulus, adhesion force, deformation and dissipation in the form of 2D images and lateral force. The mechanical properties of sample surface is calculated according to measured force-displacement curves and torsion of cantilever.

10

Instrument Calibration Technique for GPS Static and Kinematic Positioning Calibration System

This technical document describes the procedures for calibrating the GPS receivers by using the GPS ultra-short baselines calibration network (the distance is less than 100 m), and the precise GPS positioning units. The document is the basis of carrying out the calibration of GPS receivers. The main contents are as follows:
1.Illustrate the location of the network and explain the geocentric coordinates of the calibration points with respect to the IERS Terrestrial Reference Frame (ITRF).
2.Describe how to set up the GPS receivers on the calibration points of the network and carry out the calibration procedures for them.
3.Analyze the positioning results of the GPS receivers on the calibration points with the reference coordinates of the working standard.

11

Measurement System Validation Procedure of GPS Static and Kinematic Positioning Calibration System

This document is an assessment report on the calibration system of the GPS static and kinematic positioning by Center for Measurement Standards in carrying out the National Measurement Laboratory’s Project. The main purposes are to describe the error sources caused by proceeding the calibration of the GPS receivers in the GPS network and to analyze the uncertainties of the calibration system.
The uncertainties of the calibration system are according to the "Guide to the Expression of Uncertainty in Measurement" published by the International Standards Organization (ISO).

12

Interim Report - The Demand Survey of NML Industrial Service

In order to understand the measurement demand of the industry and the secondary laboratories, as the basis for expansion of NML calibration capability, the Taiwan Institute of Economic Research was entrusted to execute this demand survey of NML industrial service. The interim report includes the statistical results of basic information, the demand of industry, the linkage analysis of the government’s ten policy items, and so on.

13

Final Report - The Demand Survey and Analysis of NML Industrial Service

In order to support the promotion and development of the ten policy projects of Executive Yuan in 2019 and understand the needs of the industry and related secondary laboratories for measuring equipment delivery services, as the basis for expansion of National Measurement Laboratory (NML) calibration capability, the Taiwan Institute of Economic Research was entrusted to execute this demand survey of NML industrial service.
Based on the analysis of industry expectations, the results show that NML can be preferentially expanded in six calibration areas such as “temperature”, “photometry”, “length”, “electricity”, “acoustic” and “nano metrology” to meet the urgent needs of the market at this stage.

14

Measurement System Validation Procedure for Two-Dimensional Optical Imaged-Based Standard

This document describes the uncertainty evaluation procedures for two-dimensional optical image-based standards calibration system. The analysis is according to ISO/IEC Guide 98-3:2008. After analyzing uncertainty sources, the capabilities of the calibration system are shown as follows. The expanded uncertainties are evaluated with a coverage factor k, cooresponding to a level of confidence of approximately 95 ％.
     Measurement range 10 mm ≦ X ≦ 400 mm,10 mm ≦ Y ≦ 400 mm
     Expanded uncertainty   0.23 um ~ 0.81um.

15

Instrument Calibration Technique for Two-Dimensional Optical Image-Based Standard

This document describes the method used to calibrate two-dimensional optical image-based standard (material: glass or quartz) at National Measurement Laboratory (NML). The distance of two-dimensional optical imaged based standard is measured by two-dimensional optical image-based calibration system under test will ensure traceability to the definition of meter.

16

Measurement System Validation Procedure for Force Balance Piston Gauge

The evaluation report is presented in an effort to evaluate the force balance piston gauge in the P06 system. It introduced the function of the system, the principle of the piston gauge, the correction factors and the measurement assurance program of the gauge. The expanded uncertainties, calibration and the measurement capabilities of the system are described in detail as well.

The force balance piston gauge in this system is DHI FPG 8601 with non-rotation piston and cylinder, and the serial number is 133.

The pressure measurement range is in gauge mode :

1 Pa from 15 kPa

The expanded uncertainties Ue are:

Ue = 5 mPa + 3.0 ´ 10-5 Pa/Pa (coverage factor k = 1.99, confidence level: 95%)

Calibration and measurement capability expressed as expanded uncertainties UCMC for gas piston gauge, differential pressure gauge or digital pressure gauge are

1 Pa ～ 100 Pa，UCMC = 0.05 Pa (coverage factor k = 3.18, confidence level: 95%)

100 Pa ～ 1000 Pa，UCMC = 0.09 Pa(coverage factor k = 2.45, confidence level: 95%)

1 kPa ～ 6 kPa，UCMC= 0.20 Pa(coverage factor k = 1.96, confidence level: 95%)

6 kPa ～ 10 kPa，UCMC = 0.32 Pa(coverage factor k = 1.96, confidence level: 95%)

10 kPa ～ 15 kPa，UCMC = 0.47 Pa(coverage factor k = 1.96, confidence level: 95%)

17

Instrument Calibration Technique for the Froce Balanced Piston Gauge

This calibration procedure is used for operations of different kinds of digital pressure gauges, pressure transducers and pressure gauges. The reference standard is force balance piston gauge. The calibration is carried out using the comparison method described in this document. The preliminary operation, the calibration steps, the post-calibration and shut-down procedure, the data analysis and the calibration report etc are also included in this calibration procedure. The range of calibration is within 1 Pa to 15 kPa in gauge pressure mode.

18

Instrument Calibration Technique for Three-Phase AC Electrical Power Measurement System

This technical report describes the calibration procedures for the three-phase AC electrical power of the AC Power Measurement System (system code: E18) at National Measurement Laboratory. The system equipment, procedures, data analysis, and report templates of the calibrations for Three-Phase active power, Three-Phase reactive power, voltage harmonics and current harmonics are described in the report.

19

Measurement System Validation Procedure for Three-Phase AC Electrical Power Measurement System

This technical report describes the calibration uncertainty evaluation for the three-phase AC electrical power of the AC Power Measurement System (system code: E18) at National Measurement Laboratory. All uncertainty values stated in this report are calculated according to the "ISO/IEC Guide 98-3:2008, Uncertainty of measurement - Part 3: Guide to the expression of uncertainty in measurement (GUM: 1995)".

20

Instrument Calibration Technique for Three-Phase AC Electrical Energy Measurement System

This technical report describes the calibration procedures for the three-phase AC electrical energy of the AC Power Measurement System (system code: E18) at National Measurement Laboratory. The system equipment, procedures, data analysis, and report templates of the calibrations for three-phase active energy and three-phase reactive energy are described in the report.

21

Measurement System Validation Procedure for Three-Phase AC Electrical Energy Measurement System

This technical report describes the calibration uncertainty evaluation for the Three-Phase AC Electrical Energy Measurement System (system code: E18) at National Measurement Laboratory. All uncertainty values stated in this report are calculated according to the "ISO/IEC Guide 98-3:2008, Uncertainty of measurement - Part 3: Guide to the expression of uncertainty in measurement (GUM: 1995)".

22

Measurement System Validation Procedure for the Calibration of Geodetic Angle Measuring Instruments

This document is applied to the calibration system of geodetic angle measuring instruments (system code: D15) on the National Measurement Laboratory’s Project. The total stations and the electronic and optical theodolites are calibrated by using this system for services. The error of horizontal angle of m as one set is a main index for evaluating the accuracy of theodolites.

The Orthogonal Coordinate Measurement System (OCMS) used for carrying out the calibration task. The 360 index of the ULTRADEX rotary table mounted on the OCMS is taken as a working standard for angle metrology. The checking parameters and their control charts have been designed for monitoring the stability of the system.

The uncertainty of horizontal angle of μ as one set is evaluated in accordance with the ISO/IEC Guide 98-3:2008. Besides, the errors of collimation axis and horizontal axis of telescope of electronic circle are also provided for user’s reference to check and adjustment.

23

Instrument Calibration Technique for Geodetic Angle Measuring Instruments

This document is the calibration procedure on the calibration system of the Geodetic Angle Measuring Instruments (system code: D15) for carrying out the National Measurement Laboratory’s Project. The total Stations and the electronic and optical theodolites are calibrated by using the Orthogonal Coordinate Measurement System (OCMS) for services. The document is as a basis for calibration. The main contents of the procedure are stated below.

1. Analyze the axis errors .

2. Calculate the error of the horizontal angle as one set and its expanded uncertainty.

3. Show the example of how to complete the calibration report (certificate).

The calibration and measurement capability for the error of horizontal angle as one set, with the type A of standard uncertainty of 0.1", is estimated for 0.7".

24

Measurement System Validation Procedure for the Calibration of Geodetic Length-Measuring Instruments

This document is the assessment report on the calibration system of the Geodetic Length Measuring Instruments (system code: D14) for carrying out the National Measurement Laboratory's Project. The Total Stations and the Electronic Distance-Measuring Instruments (EDMIs) are conducted at the National Standard Baseline for calibration services. The error sources in measurements and the uncertainties of the calibration differences of dD are evaluated. The checking parameters and the control charts for monitoring the calibration system have been designed in practices.

The uncertainty of the calibration system is according to the ISO/IEC Guide 98-3:2008 published by the International Standards Organization (ISO). The expanded uncertainty of the calibration differences of dD at the level of confidence 95%, the coverage factor of k = 1.98, is ((0.6 mm)^2 + (1.3 × 10^-6 × L)^2)^0.5, L in distance, 0 m to 432 m.

25

Instrument Calibration Technique for the Geodetic Length Measuring Instruments

This document is the calibration procedure on the calibration system of the Geodetic Length Measuring Instruments (system code：D14) for carrying out the National Measurement Laboratory’s Project. The Total Stations and the Electronic Distance-Measuring Instruments (EDMIs) are conducted at the National Standard Baseline for calibration services. The main contents in this document are below.

1. Describe how to get the standard baseline distances of Dr as a basis of calibration by using the ME5000 unit.

2. Set up the calibrated EDMIs on the pillars of the National Standard Baseline for measuring the distances of 18 baselines under the correct operation and settings.

3. Analyze the calibration results for providing the corrected additive constant and the corrected scale constant, respectively. The example of the calibration report is shown in the text.

26

Instrument Calibration Technique for High-Capacity Mass Weighing System-METTLER AX64004 Mass Comparator

This procedure is a reference for weighing single weight of 20 kg and 50 kg with METTLER AX64004 mass comparator. METTLER AX64004 is an electronic mass comparator with 60 kg maximum weighing range and 0.1 mg resolution. Double substitution method is applied to perform the mass comparisons of 20 kg and 50 kg. During weighing, the readings of the standard and unknown weights can be obtained from the readout of display. After repeating weighing for several times, the differences between the standard and unknown weights, the mean deviations and the standard deviation can be calculated, and then the mass values and uncertainties of the unknown weights can also be calculated from the value of the standard weight.

27

Instrument Calibration Technique for High-capacity Mass Weighing System - METTLER XPE1003KMC Mass Comparator

This procedure is a reference for weighing weight of 1000 kg with METTLER XPE1003KMC mass comparator. METTLER XPE1003KMC is a top-loading electronic mass comparator with 1100 kg maximum weighing range and 0.5 g resolution. Double substitution method is applied to perform the mass comparisons of 1000 kg. During weighing, the readings of the standard and unknown weights can be obtained from the readout of display. After repeating weighing for several times, the differences between the standard and unknown weights, the mean deviations and the standard deviation can be calculated, and then the mass values and uncertainties of the unknown weights can also be calculated from the value of the standard weight.

28

Instrument Calibration Technique for High-capacity Mass Weighing System --Sartorius CCE10000U-L Mass Comparator

This procedure is a reference for weighing single weight or group weights of 1 kg, 2 kg, 5 kg, 10 kg with Sartorius CCE10000U-L mass comparator. Sartorius CCE10000U-L is an electronic mass comparator with 10.05 kg maximum weighing range and 0.01 mg resolution. Double substitution method is used to do the mass comparison of 1 kg, 2 kg, 5 kg, 10 kg. During weighing, the readings of the standard and unknown weights can be obtained from the readout of display. After several weighing, the difference between the standard and unknown weight, the mean deviation and the standard deviation can be calculated out, and then the mass value and uncertainty of the unknown weight can also be calculated out from the values of standard weight.

This system is part of the high mass weighing system (system code: M03).

29

Measurement System Validation Procedure for the High-Capacity Mass Weighing System- METTLER XPE1003KMC Mass Comparator

This procedure provides laboratory colleagues a reference for evaluating the uncertainty when performing mass calibrations of weights of 1000 kg.
In practical weighing, the double substitution method is adopted to perform the mass comparison of 1000 kg weights. During weighing, the readings of the weighting can be obtained and the mean value and standard deviation can be calculated out by computer, the mass value and uncertainty of the unknown weight can be calculated out from the values of standard weight.

30

Measurement System Validation Procedure for Reflectance in the 0°:45°a Geometry of Spectrophotometric System

This document describes how to apply the double beam spectrophotometric system to evaluate the reflectance Y, L* and the chromaticity coordinates x, y, a* and b* of the white standard. The system is based on the CIE (INTERNATIONAL COMMISSION ON ILLUMINATION) recommended 0o:45oa geometry. To do the calibration, place the standard plate and DUT (Device Under Testing) at the sample port and then compare the results. The System is subordinated to the Spectrophotometric System.
The system test and evaluation are based on the establishment of the calibration procedures and the measurement quality assurance. In addition, take the readings of a set of white standard plates at different days to draw the system control chart. From the analytical results, the system capability is as follows.
(1) Range: Radiance factor Y and L*＞1; spectral radiance factor ＞0.01, 0 to 1 [*] for chromaticity coordinates x and y; 0 to ± 500 for chromaticity coordinates a* and 0 to ± 200 for chromaticity coordinates b*.
(2) Uncertainty
l White Plate
Expanded uncertainty of radiance factor Y : 0.34 ,k = 1.98
Expanded uncertainty of L* : 0.15 , k = 1.97
Expanded uncertainty of chromaticity coordinates x and y : 0.0003 and 0.004 , k = 1.96
Expanded uncertainty of chromaticity coordinates a* and b*: 0.20 and 0.18, k = 1.97
Expanded uncertainty of spectral radiance factor 0.0069 , k = 1.98

31

Instrument Calibration Technique for Color Standards in the 0°:45°a geometry of Spectrophotometric System

This document describes how to use a double beam spectrophotometric system to calibrate the chromaticity coordinates and reflectance under the 0°:45°a geometric condition of standard white. The 0°:45°a measure geometric condition is that the optic source projects the white board in the orthogonal direction, and we measure the reflection at 45°. The calibrated standard board can be used as the standard for spectrophotometer under the same geometric condition for vendor, or as the standard for estimating the sample color by naked eyes. However, the calibration procedure is not suitable for the board which contains translucent or fluorescent materials. The system test and evaluation are based on the establishment of the calibration procedures and the measurement quality assurance. This system is attached to Spectrophotometric System (system code: O05). The measurement capability is shown as follows.

Range: Radiance factor Y and L*> 1; spectral radiance factor > 0.01, 0 to 1 [*] for chromaticity coordinates x and y; 0 to ± 500 for chromaticity coordinates a* and 0 to ± 200 for chromaticity coordinates b*.

(1) Uncertainty

l White Plate

Expanded uncertainty of reflectance factor Y: 0.34 %,k = 1.98

Expanded uncertainty of reflectance L*: 0.15, k = 1.97

Expanded uncertainty of chromaticity coordinates x and y: 0.0003 and 0.004, k = 1.96

Expanded uncertainty of chromaticity coordinates a* and b*: 0.20 and 0.18, k = 1.97

Expanded uncertainty of spectral reflectance 0.0069 %, k = 1.98

32

Measurement System Validation Procedure for Reflectance in the 0°:de Geometry of spectrophotometric System

This document describes how to apply the spectrophotometric system to evaluate the reflectance, Y, and the chromaticity coordinates, x and y, of the white standard. The system is based on the CIE (INTERNATIONAL COMMISSION ON ILLUMINATION) recommended 0/d geometry. To do the calibration, place the standard plate and DUT at the reference port and sample port of the integrating sphere and then compare the results. The System is subordinated to the Spectrophotometric System.
The system test and evaluation are based on the establishment of the calibration procedures and the measurement quality assurance. In addition, take the readings of white standard plates at different days to draw the system control chart. From the analytical results, the system capability is as follows.
(1) Range: Luminance factor Y is from 1 ％ to 100 ％; L* is from 1 to 100; chromaticity coordinates x and y are from 0 to 1; a* is from 0 to 500, b* are from 0 to200.
(2) Uncertainty
l Reflectance factor is 0.18; L* is 0.10; coverage factor is 1.97.
l Chromaticity coordinates x and y is 0.0002; coverage factor is 1.97.
l a*, b* are 0.12 and 0.08 respectively; coverage factor is 1.97.
l The uncertainty of spectral reflectance factor:
(380 ~ 780) nm: 0.0030, coverage factor is 1.98.

33

Measurement System Validation Procedure for Reflectance in the de:8° Geometry of Spectrophotometric System

This document describes how to use the Spectrophotometric System to evaluate the chromaticity and the reflectance factor of white standards and color standards under the de:8°geometric condition recommended by CIE (INTERNATIONAL COMMISSION ON ILLUMINATION) where the color plates are illuminated by light source diffused with the integrating sphere and the reflected light which specular reflected light is excluded is detected at an angle of 8° from the normal direction of the specimen by a detector.
The document is also applicable for measurement at di:8° geometry condition, which is similar to de:8° geometry condition except its detection including the specularly reflected light. The color plats in this system is calibrated by substitution method. This system is subordinated to Spectrophotometric System(O05). From the analytical results, the system capability is as follows.
(1) Range: Reflectance factor Y is form 1 to 100, lightness L* is from 1 to 100, chromaticity coordinates x and y are from 0 to 1 [*].
*In fact, it means the value covered by the chromaticity diagram. The value is between 0 and 1 and is impossible to be exactly 0 or 1.
(2) Uncertainty
　　‧ White standard
Luminance factor Y is 0.16; L* is 0.14;
Chromaticity coordinates x and y is 0.0002; 0.0003
Coverage factor is 1.97.
a*, b* is 0.11,
Coverage factor is 2.00.
　　‧ Color plate:
　　　Reflectance factor Y is 0.18;
Chromaticity coordinates x and y is 0.0003 to 0.0015;
Coverage factor is 1.97.
‧ The uncertainty of spectral reflectance is 0.0030
Coverage factor is 1.97.

34

Instrument Calibration Technique for Color Standards in the 0°:de and 8°:de geometry of Spectrophotometric System

This document describes how to use double beam spectrophotometric system to calibrate the chromaticity coordinates and reflectance under the 0°:de geometric condition of standard white. 0°:de measuring geometric condition is that light source projects the white board in the orthogonal direction, and we measure the reflection after diffusing through integrating sphere. The calibrated standard board can work as the standard of spectrophotometer under the same geometric condition for vendor, or the standard of estimating by naked eyes sample color. However, the procedure of the calibration is not suitable for the board which material contains translucent. This measurement system can be installed the diffusely reflected apparatus to measure the diffused reflectance at 8° of the incident angle. The measurement range of the system is that reflectance Y is from 1 % to 100 %, L* is from 1 to 100 and chromaticity coordinates x, y is from 0 to 1.

35

Instrument Calibration Techenique for Color Standard in the de:8° Geometry of Spectrophotometric System

This document describes how to use the spectrophotometric system to calibrate the chromaticity and the reflectance factor of white standards and color standards under the de:8° geometric condition. The specimen is illuminated by a diffuse light provided by an integrating sphere radiator. The reflected light excluding the the specularly reflected light from the specimen is detected at an angle of 8° from the normal direction of the specimen by a detector, The color standard under calibration is a surface uniform plate with a constant thickness. It could be ceramic, opal or compressed by the powder of BaS04, MgO, Halon, etc.. The calibrated color standard can be used as the standard for spectrophotometer under the same geometric condition, or as the standard for visual estimating the sample color. The calibration procedure described in this document is not suitable for the color plate which contains fluorescent materials. The document is also applicable for measurement at di:8° geometry condition, which is similar to de: 8°geometry condition except its detection including the specularly reflected light.

36

Instrument Calibration Technique for Spectral Radiance Standard Light Source of Spectroradiometric System

This document describes the calibration procedures of spectral radiance lamp. The calibration procedure is performed by directly method, use calibrated spectroradiometer to calibrate the spectral radiance source to get spectral radiance, luminance, chromaticity coordinates and color temperature of the working standard lamp and test spectral radiance lamp. This document is subordinated to the Spectroradiometric System (O03).

‧Range:
Item Range
Wavelength 380 nm to 780 nm
Luminance 5 cd/m2 to 50000 cd/m2
Spectral radiance 2 μW/(m2·nm·sr) to 2 W/(m2·nm·sr)
Chromaticity coordinates (x, y) (0,0) to (0.9,0.9)
Chromaticity coordinates (u, v) (0,0) to (0.62,0.39)
Correlated
Color temperature 2500 K to 3200 K

‧Uncertainty: (confidence level:95 ％)
‧Item：Spectral radiance
Wavelength (nm) Relative expanded uncertainty (％) Coverage factor
380 ≦λ＜ 390 3.2 2.08
390 ≦λ＜ 420 2.7 2.03
420 ≦λ＜ 530 1.9 1.96
530 ≦λ＜ 780 1.4 1.96

‧Item：Luminance
Relative expanded uncertainty：1.6 ％
Coverage factor：1.96

‧Item：Chromaticity coordinates
Item x y u v
Expanded uncertainty 0.0011 0.0009 0.0004 0.0004
Coverage factor 1.97 1.97 1.97 1.97

‧Item：Correlated Color temperature
Expanded uncertainty：8 K
Coverage factor：1.97

37

Instrument Calibration Technique for Spectral Irradiance Standard Lamp of Spectroradiometric System

This document describes the calibration procedures of spectral irradiance lamp. The calibration procedure is performed by substitution method. This document is the calibration procedure for spectral irradiance standard lamp of spectroradiometric system. It describes the preparations, calibration procedure and post-calibration procedure. The calibration sample is quartz halogen lamp or tungsten filament lamp. Utilizing substitution method to calibrate the spectral irradiance of calibration lamp by the standard lamp calibrated by NPL National Physical Laboratory). This document is subordinated to the Spectroradiometric System (O03). The measurement capability of spectral irradiance standard lamp calibration is shown as follows:

‧ Wavelength range:

250 nm to 2500 nm

The spectral irradiance range:

0.01 mW/(m2×nm) to 240 mW/(m2×nm)

‧ uncertainty:          

wavelength(nm) Expanded relative uncertainty coverage factor (k )

250 7.6 % 2.31

255 5.5 % 2.18

255 < λ ≦ 295 3.9 % 2.05

295 < λ ≦ 400 2.8 % 1.97

400 < λ ≦ 1100 1.9 % 1.97

1100 < λ ≦ 2400 2.1 % 1.98

2400 < λ ≦ 2500 4.8 % 2.37

confidence level : 95 %

38

Measurement System Validation Procedure for Spectral Irradiance Standard Lamp of Spectroradiometric System

This document states the uncertainty evaluation procedures for the spectral irradiance standard lamp calibration. Using substitution method, spectral irradiance lamps to be calibrated are compared with the spectral irradiance standard lamps in terms of the output optical signals obtained by the calibration system. The effects of the influential factors on this calibration system will be considered to estimate the uncertainty according to the ISO “Guide to the Expression of Uncertainty in Measurement”, hereinafter called ISO GUM.
The capability and uncertainty of current calibration service is stated as follows.
Measurement scope:
Wavelength: 250 nm to 2500 nm
Spectral irradiance: 0.01 mW/(m2×nm) to 240 mW/(m2×nm)
Relative expanded uncertainties:
Wavelength (nm) Relative expanded uncertainty Coverage factor k
250 ＜ λ ≦ 265 2.9 ％ 1.97
265 ＜ λ ≦ 510 2.3 ％ 1.97
510 ＜ λ ≦ 1100 1.2 ％ 1.97
1100 ＜ λ ≦ 1400 1.5 ％ 1.97
1400 ＜ λ ≦ 2310 1.9 ％ 1.97
2310 ＜ λ ≦ 2480 2.5 ％ 2.07
2480 ＜ λ ≦ 2500 4.7 ％ 2.31
*Confidence level 95 ％

The document belongs to the Spectroradiometric System (O03).

39

Instrument Calibration Technique for Spectroradiometer of Spectroradiometric System

This document describes the calibration procedures of spectral radiance lamp. The calibration procedure is performed by substitution method. That is comparing the test lamp with the standard light source to get the spectral radiance, luminance, chromaticity coordinate and color temperature of the test lamp. The standard light source is traced to the combination of absolute radiometer (O06), spectral irradiance (O03) and reflectance (O05).   Besides, the system also provides the standard spectral radiance source for the spectroradiometer. The correction factor of the spectroradiometer is obtained by comparing the readings of the spectroradiometer with the standard spectral radiance source. This document is subordinated to the Spectroradiometric System (O03).
‧ The luminance range:
5 cd/m2 to 50000 cd/m2
‧Expanded relative uncertainty:1.5 ％, coverage factor:1.96, confidence level:95 ％

40

Instrument Calibration Technique for Photodetector Spectral Responsivity of Spectroradiometric System

This document is the calibration procedure for photodetector spectral responsivity of spectroradiometric system(O03). It describes the preparations, calibration procedure and post-calibration procedure. The test sample is Si photodetector, Ge photodetector, InGaAs photodetector or V(λ) photodetector. Utilizing substitution method to calibrate the spectral responsivity of test photodetector by the standard photodetector. The capability and uncertainties of photodetector spectral responsivity calibration is showed as follows:

I. Relative Spectral Responsivity

Type Wavelength (nm) Coverage factor Relative expanded uncertainty (%)

Si detector 200 ≦ λ < 300 1.96 4.5

300 ≦ λ < 400 1.96 1.7

400 ≦ λ < 500 1.96 0.68

500 ≦ λ < 700 1.98 0.56

700 ≦ λ < 800 2.00 0.62

800 ≦ λ < 900 1.96 0.51

900 ≦ λ < 1000 1.96 0.88

1000 ≦ λ ≦ 1100 1.96 0.93



Type Wavelength (nm) Coverage factor Expanded uncertainty

V(λ) detector 380 ≦ λ < 440 1.96 0.0007

440 ≦ λ < 500 1.96 0.0037

500 ≦ λ < 600 1.96 0.013

600 ≦ λ < 660 1.96 0.0081

660 ≦ λ < 710 1.96 0.0037

710 ≦ λ ≦ 780 1.96 0.0006



II. Spectral Responsivity

Type Wavelength (nm) Coverage factor Relative expanded uncertainty (%)

Si detector 300 ≦ λ≦ 370 1.96 1.9

380 ≦ λ≦ 530 1.96 1.0

540 ≦ λ≦ 920 1.96 0.60

930 ≦ λ≦ 1040 1.96 1.0

1050 ≦ λ ≦ 1100 2.10 1.9

Ge detector / InGaAs detector 800 ≦ λ≦ 860 3.18 3.2

870 ≦ λ≦ 1580 1.96 1.2

1590 ≦ λ≦ 1650 1.96 1.7

41

Measurement System Validation Procedure for Photodetector Spectral Responsivity of Spectroradiometric System

This document evaluates the measurement uncertainties of photodetector spectral responsivity calibration of the Spectroradiometric System (System ID number: O03). The devices under test could be Si photodiode, Ge photodiode, InGaAs photodiode, and V(λ) detector. The system can provide calibration services for the wavelength range from 200 nm to 1650 nm. The uncertainties differ upon different quantaties (relative spectral responsivity or absolute spectral responsivity), devices under test, and wavelength ranges.

Chapter 2 describes the system setup and the principles of measurement. Chapter 3 illustrates uncertainty analysis according to ISO/IEC 17025 Guide 98-3: 2008 [7.1]; the calibrated uncertainty results are included. Chapter 4 describes measurement quality assurance. Chapter 5 and Chapter 6 summarise the previously described contents and conclude measurement capability of photodiode spectral responsivity.



I. Relative Spectral Responsivity

Type Wavelength (nm) Coverage factor Relative expanded uncertainty (%)

Si detector 200 ≦ λ < 300 1.96 4.5

300 ≦ λ < 400 1.96 1.7

400 ≦ λ < 500 1.96 0.68

500 ≦ λ < 700 1.98 0.56

700 ≦ λ < 800 2.00 0.62

800 ≦ λ < 900 1.96 0.51

900 ≦ λ < 1000 1.96 0.88

1000 ≦ λ ≦ 1100 1.96 0.93



Type Wavelength (nm) Coverage factor Expanded uncertainty

V(λ) detector 380 ≦ λ < 440 1.96 0.0007

440 ≦ λ < 500 1.96 0.0037

500 ≦ λ < 600 1.96 0.013

600 ≦ λ < 660 1.96 0.0081

660 ≦ λ < 710 1.96 0.0037

710 ≦ λ ≦ 780 1.96 0.0006





II. Spectral Responsivity

Type Wavelength (nm) Coverage factor Relative expanded uncertainty (%)

Si detector 300 ≦ λ≦ 370 1.96 1.9

380 ≦ λ≦ 530 1.96 1.0

540 ≦ λ≦ 920 1.96 0.60

930 ≦ λ≦ 1040 1.96 1.0

1050 ≦ λ ≦ 1100 2.10 1.9

Ge detector / InGaAs detector 800 ≦ λ≦ 860 3.18 3.2

870 ≦ λ≦ 1580 1.96 1.2

1590 ≦ λ≦ 1650 1.96 1.7

42

Instrument Calibration Techenique for Luminance Meter/ Luminance Colorimeter of Spectroradiometric System

This document describes how to use the spectroradiometer or spectral radiance standard lamp to calibrate Luminance Meter/ Luminance Colorimeter for industry.
The present spectral radiance working standard is calibrated by the reference standard lamp which is traced to National Institute Standards and Techonology (NIST). The calibration range is from 5 cd/m2 to 50,000 cd/m2.
This document is subordinated to the Spectroradiometric System (O03).
‧ Range:
Luminance: 5 cd/m2 to 50000 cd/m2
Chromaticity Coordinates: 0.0 ~ 0.9
Correlated Color Temperature: 2500 K至3200 K
‧Expanded relative uncertainty: (confidence level: 95 ％)
Luminance: 1.6 ％, coverage factor: 1.96
‧Expanded uncertainty: (confidence level: 95 ％)
Chromaticity Coordinates: x：0.0011, coverage factor: 1.97
Correlated Color Temperature: 8 K, coverage factor: 1.97

43

Measurement System Validation Procedure for Luminance Colorimeter of Spectroradiometric System

This document describes the uncertainty evaluation of the spectral radiance standard lamp calibration by a specific measurement quality assurance and uncertainty analysis. According to the calibration procedures and principles of measurement, we analyze the data and estimate the capability of the system.
The calibration range and uncertainty are as follows.

‧Range:
Item Range
Wavelength 380 nm to 780 nm
Luminance 5 cd/m2 to 50000 cd/m2
Spectral radiance 2 (μW/m2·nm·sr) 至2 (W/m2·nm·sr)
Chromaticity coordinates (x, y) (0,0) to (0.9,0.9)
Chromaticity coordinates (u, v) (0,0) to (0.62,0.39)
Correlated
Color temperature 2500 K to 3200 K

‧Uncertainty:
‧Item：Spectral radiance
Wavelength (nm) Relative expanded uncertainty (％) Coverage factor
380 ≦λ＜ 385 3.2 2.08
390 ≦λ＜ 415 2.7 2.03
420 ≦λ＜ 780 1.9 1.96

‧Item：Luminance
Relative expanded uncertainty：1.5 ％
Coverage factor：1.96

‧Item：Chromaticity coordinate
Item x y u v
Expanded uncertainty 0.0011 0.0009 0.0004 0.0004
Coverage factor 1.97 1.97 1.97 1.97

‧Item：Relative Correlated Color temperature
Expanded uncertainty：8 K
Coverage factor：1.97

44

Instrument Calibration Technique for Standard Lamp of Total Spectral Radiant Flux System

This document describes the calibration procedures of standard lamp for total spectral radiant flux. The content includes preparation, calibration procedure and final treatment. The calibration method is gonio-spectroradiometer method which obtains total spectral radiant flux by calculated integration of spectral irradiance distribution over 4 steradian and radius. This document belongs to total spectral radiant flux system (010).

45

Measurement System Validation Procedure for Indexing Table

This document states the uncertainty evaluation procedures for the indexing table calibration system. The indexing table to be calibrated are compared with the master polygons by using one autocollimators. The effects of the influential factors on this calibration system will be considered to estimate the uncertainty according to the ISO "Guide to the Expression of Uncertainty in Measurement", hereinafter called the ISO GUM. The confidence level of this system is 95% . Control charts are developed, in accordance with the NBS SP-676-II, to monitor the stability of this system. According to the control charts developed , it shows that this system is stable. Since there are three master polygons with 24-sided, 18-sided, and 12-sided, the angular intervals to be calibrated are 15°, 20°, and 30°, respectively. This calibration system is attached to the Large Angle Calibration System (System code: D07) .

46

Instrument Calibration Technique for Indexing Table

This document describes the calibration procedures for indexing table. The required equipment for indexing table calibration is also stated. The calibration method is based on the principle of “circle closure”, i.e. the sum of all the interior angles of a complete circle equals to 360°. The mathematical model of polygon calibration is described. An example of the calibration report is also given. This calibration system is attached to the Large Angle Calibration System (System code: D07).

47

Analysis of surface layer composition of the silicon sphere by x-ray photoelectron spectroscopy technique

The elemental compositions on the surface layer of the silicon sphere are measured and analyzed by x-ray photoelectron spectroscopy. The qualitative analysis which gives the ratio between silicon, oxygen and carbon is combined with the mass deposition of oxygen measured by x-ray fluorescence to determine the mass on the surface layer. This paper illustrates the procedures of qualitative analysis from the XPS measurement data using the software “UNIFIT 2017” to provide the laboratory colleague as reference.

48

Measurement System Validation Procedure for AC Magnetic Field(50 Hz to 1000 Hz)Calibration System

This document is an assessment report on the calibration system of the low magnetic flux density (B03) of the National Measurement Laboratory. This calibration system provides traceability and calibration service of ac gaussmeter for the magnetic flux density from 0.5 μT to 50 μT, frequency range from 50 Hz to 1000 Hz. Magnetic flux density is a derivative unit in metrology. The multi-layers Helmholtz coils provide the method to realize the standard of low magnetic flux density, and it can trace to the current and length standard.

The error sources and uncertainties analysis are according to the “ISO/IEC Guide 98-3:2008 Uncertainty of measurement –Part 3: Guide to the expression of uncertainty in measurement (GUM:1995)” published by the International Standards Organization (ISO). The calibration capability of this calibration system is as follow.



Measurement range: 0.5 μT to 50 μT

Frequency range: 50 Hz to 1000 Hz

Expanded uncertainty: 3.1×10-3 μT to 2.2×10-1 μT

Level of confidence (Coverage factor): 95 % (k =2.57)

49

Instrument Calibration Technique for AC Magnetic Field(50 Hz to 1000 Hz)Calibration System

This document belongs to the low magnetic field measurement system (B03), and describes how to calibrate gaussmeter using the AC Magnetic Field(50 Hz to 1000 Hz) Calibration System. Recommendations for equipment and supplies needed to implement such a system are presented along with the description of the required calibration procedure. The calibration system provides the calibration service of gaussmeter with the RMS value of magnetic flux density ranging between 0.5 μT to 50 μ T, relative expanded uncertainty: 至 , level of confidence (coverage factor): 95 % (2.57).

50

Instrument Calibration Technique for Spectral Scattering Measurment System

This document describes the calibration procedure for reflectance at specified geometry condition and wavelength. According to the definition, reflectance can be calculated by the light source luminance and reflectance luminance.

The calibrated standard plate can be the highest standard in secondary calibration laboratory.

The incident angle is (-85 ~ 85)° and the wavelength range is (380 ~ 800) nm. At a confidence level of 95 %, the expanderd uncertainty is 0.59% and its coverage factor is 2.00.

The geometric condition for color measurement in O09 system is based on the CIE recommended 0o:45o geometry. The color uncertainty of Y, x, y is listed as follows.

Reflectance Y: 0.16 %; x:0.0003; y:0.0004;coverage factor:2.01

51

Measurement System Validation Procedure for Spectral Scattering

This calibration system is subordinated to Scattering Measurement System. The measured wavelength is (380-800) nmand the incident angle is (-60 ~ 60)°.   Under 95 ％ confidence level, coverage factor is 2.00, the expanded uncertainty is 0.59 ％.
The geometric condition for color measurement in O09 system is based on the CIE recommending 0o:45o geometry. The color uncertainty is as follows.
Expanded uncertainty of reflectance factor Y : 0.16 ％ , k = 2.01
Expanded uncertainty of chromaticity coordinates x : 0.0003 , k = 2.01
Expanded uncertain nty of chromaticity coordinates y : 0.0004 , k = 2.01

52

Instrument Calibration Technique for Gloss Standard Plate of Luminous Flux System

This document describes the calibration procedure for gloss standard plate at 20°, 60°and 85° geometry condition defined by ASTM D523 and related standards. The geometry condition at 20°, 60° and 85° is that the axis of the incident beam is at 20°, 60°and 85°angles from the perpendicular to the gloss standard surface. The axis of receptor shall be at the mirror reflection of the axis of the incident beam. The DUT (Device Under Test) may consist of black glass, quartz, ceramics or metal painted surface with certain thickness. After calibration, the DUT can serve as the calibration standard in secondary laboratory or for the commercial gloss meter. This system is subordinated to the Total Luminous Flux System (O02). According to the evaluation result of Measurement System Validation Procedure, the capability and the uncertainty is following: (1) Measurement range: From 10 GU to 100 GU. The geometry condition is 20°, 60° and 85°. (2) Expanded Uncertainty: See below table. The confidence level is 95%. Condition Expanded Uncertainty ( GU) Coverage factor 20° High-gloss 0.7 1.97 60° High-gloss 0.6 1.98 85° High-gloss 0.5 1.98 20° Semi-gloss 1.2 1.97 60° Semi-gloss 0.9 1.98 85° Semi-gloss 1.9 1.97

53

Measurement System Validation Procedure for Gloss Standard Plate of Luminous Flux System

The document describes how to evaluate the precision and the accuracy of the gloss measurement system by statistic method. The geometry condition of the system is guided by ASTM D523. It defines the geometry condition of measurement at 20°, 60° and 85°.(The axis of the incident beam is at 20°, 60° and 85° angles from the perpendicular to the gloss standard surface. The axis of receptor shall be at the mirror reflection of the axis of the incident beam.) The gloss standard and the DUT (Device Under Test) is tested in the same geometry condition to obtain the gloss unit of the DUT. Establish the calibration procedure and measurement quality control by testing and evaluating the system. At the same time, execute the short-term experiments and analysis the testing data to draw the control chart of the gloss measurement system. According to the evaluation result, the capability and the uncertainty is following: (1) Measurement range: From 10 GU to 100 GU. The geometry condition is 20°, 60° and 85°. (2) Expanded Uncertainty: See below table. The confidence level is 95%. Condition Expanded Uncertainty ( GU) Coverage factor 20° High-gloss 0.7 1.97 60° High-gloss 0.6 1.98 85° High-gloss 0.5 1.98 20° Semi-gloss 1.2 1.97 60° Semi-gloss 0.9 1.98 85° Semi-gloss 1.9 1.97 This system is subordinated to the Total Luminous Flux System (O02).

54

Grazing incident angle X-ray fluorescence technique optical path design

This study shows the grazing incident angle X-ray fluorescence spectroscopy (GIXRF) technology. This technique provides semiconductor industry thin film inspection with a range of 0.9 to 200 nm, and also analyzes the depth distribution of semiconductor thin films. It can also measure the elemental composition in different wafer material layers, and provide an effective distinction of interface layers between the high k materials, which helps building up the modeling of the film thickness analysis to obtain more accurate film thickness value.
This research objective is measuring the three important semiconductor high k materials, which are TiN, TaN and HfO2. According to the expert advice of the German Physikalisch-Technische Bundesanstalt (PTB), we establish the GIXRF experimental optical design and the experimental device. It is expected that the GIXRF spectrum and the depth profile of the TiN, TaN and HfO2 single-layer and multi-layer will be measured in the future.

55

Method for converting film thickness grazing incident angle x-ray fluorescence spectroscopy

This study shows the grazing incident angle X-ray fluorescence spectroscopy (GIXRF) technology. This technique provides semiconductor industry thin film inspection with a range of 0.9 to 200 nm, and also analyzes the depth distribution of semiconductor thin films. It can also measure the elemental composition in different wafer material layers, and provide an effective distinction of interface layers between the high k materials, which helps building up the modeling of the film thickness analysis to obtain more accurate film thickness value.
This research objective is measuring the three important semiconductor high k materials, which are TiN, TaN and HfO2. This report refers to the reference-free quantification developed by the PTB. The TiN film thickness is converted by means of instrumental and fundamental parameters such as incident light intensity, detector efficiency and attenuation cross-sectional area. The Al x-ray target is used in the experiment. The angle of incidence was 3 degrees, and the detector was perpendicular to the surface of the sample.

56

Measurement System Validation Procedure for Absolute Cryogenic Radiometer System

This document describes the system validation method and validation results of the absolute cryogenic radiometer. This system belongs to the O07 absolute cryogenic radiometer system.
This absolute cryogenic radiometer is the primary standard for optical radiant power measurement. The system capability is as follows. Wavelength range: 200 nm to 5000 nm; radiant power: 10 nW to 1.0 mW.
Without considering the uncertainty from the test source, the relative combined standard uncertainty of the system is 0.013 ％ and 0.023 ％ while measuring laser and monochromator sources, respectively.
While including the uncertainty from the test source, the relative expanded uncertainty is 0.028 ％ for laser source and 0.16 ％ for monochromator source. The coverage factor is 1.97 and 1.98 respectively, for the 95 ％ confidence level. Please refer to chapter 3 for the details.

57

Low concentration lead isotope dilution method measurement technology report

Isotope dilution mass spectrometry (IDMS) o?ers the advantages of determining major (％) to ultra-trace concentrations (＜ ng/kg) of elements, species and compounds in various matrices without matrix effect, producing analytical results of highest accuracy and precision, metrologically referred to as smallest uncertainties, no recovery required for pretreatment, which makes it most suitable as a reference method for reference materials characterization. In this study, IDMS was applied for concentration certification of lead solution with concentration range from 1 μg/kg to 1000 μg/kg. The cleanliness of container was firstly evaluated, and followed by preparing various lead concentration through gravimetric method. The isotope ratio of lead mixtures was then determined by ICP-MS. The results obtained in this study demonstrated that expanded uncertainty was in the range of 0.74 ％ to 1.97 ％ for lead concentration from 1 μg/kg to 1000 μg/kg, which was comparable with CCQM-K2 results. The IDMS not only can be used for concentration certification of various element solution and but also can combine with monodroplet generator for particle size and number concentration determination.

58

Final Report of APMP.AUV.V-K3.1:Key comparison in the field of Acceleration on the complex voltage sensitivity

Since recent improvements at the APMP NMIs have extended the low-frequency vibration limit of calibration capabilities down to 0.1 Hz, the decision was taken to make a preparation of comparison during the meeting of APMP TCAUV in 2017. The task of the comparison is to compare measurements of linear vibration calibration within the frequency range from 0.1 Hz to 40 Hz. The results of this APMP comparison will, after approval by CCAUV, serve as evidence at low vibration frequency for the registration of ‘Calibration and Measurement Capabilities’ (CMC) for NMIs in the framework of the CIPM MRA.

59

Instrument Calibration Techniques for Low Pressure Gas Flow Calibration System -Bell 1093 Calibrating Meter

This instrument calibration technique is the operational guide for the calibration of gas meters by Volume—time method. The meter to be calibrated is installed in series with the standard device. With a preset flowrate, the Bell Prover then collects gas that passes through the meter. During calibration, the temperature, pressure, volume or flowrate for the meter under test, and the temperature, pressure, volume, and time for the calibration system are measured. Based on the above-measured results, the relative deviation, the deviation or the discharge coefficient can be estimated.

Based on ISO/IEC Guide 98-3:2008, calibration uncertainty of the meter can be evaluated with Type A and Type B evaluations for various uncertainty sources. The standard uncertainties (or relative uncertainties), and degrees of freedom of various sources were evaluated individually, and then combined together to give a combined standard uncertainty (or relative combined standard uncertainty) and effective degree of freedom. Finally, an expanded uncertainty (or relative expanded uncertainty), obtained by multiplying the combined standard uncertainty (or relative combined standard uncertainty) with a coverage factor of 1.97 at 95 ％ confidence level, gives the uncertainty or relative uncertainty of the measurement process.


The applicability of this calibration system is as follows:
Gas                         : Dry Air
Volume flowrate :10 L/min to 1000 L/min
Pressure upstream of the meter : (100 to 700) kPa
Environmental temperature : (21.5 to 24.5) °C
Relative expanded uncertainty of standard mass flowrate: 0.09 ％ at 95 ％ confidence level, coverage factor is 1.97.
Relative expanded uncertainty of performance indicator: 0.10 ％ at 95 ％ confidence level, coverage factor is 1.99.

60

Instrument Calibration Technique for Gas Meter by Low Pressure Gas Flow Calibration System–Master Meter Method

This calibration procedure is the operational guide for the air flow calibration system by master-meter method. The system is comprised of high pressure air source, pressure regulator, standard sonic nozzle set, temperature and pressure transducer, digital pressure gauge, vacuum pump and computer. During calibration the desired flow rate was adjusted via pressure regulator and ON/OFF valves downstream of the standard nozzles. After the pressure, temperature and flow rate reach steady, parameters such as the pressure, temperature, and flow rate were measured simultaneously for both the standard system and the device under test (DUT). The measured results were used to obtain the standard flow rate at the meter or standard conditions, and then compared to the flow rate of DUT to obtain deviation, relative deviation or discharge coefficient. The calibration can be conducted at the flow calibration laboratory or at customer’s site with proper temperature control.
The uncertainty of the system was analyzed based on the principle of propagation of uncertainty, including the influence sources of the measurements, ambient conditions, and employed facilities. The combined standard uncertainty was derived by the method of root-sum-squares. Eventually, the relative expanded uncertainty and expanded uncertainty was obtained by multiplying the relative combined standard uncertainty by a coverage factor. The calibration flow ranges and relative expanded uncertainty and expanded uncertainty are as follows:


Flow Rate: 24 L/min to 1000 L/min
Relative expanded uncertainty of mass flowrate: 0.10 ％ at 95 ％ confidence level, coverage factor is 1.98.
Expanded uncertainty of performance indicator: 0.11 ％ at 95 ％ confidence level, coverage factor is 1.99.
Relative expanded uncertainty of volume flowrate: 0.11 ％ at 95 ％ confidence level, coverage factor is 1.97.
Expanded uncertainty of performance indicator: 0.12 ％ at 95 ％ confidence level, coverage factor is 1.99.
Relative expanded uncertainty of volume: 0.11 ％ at 95 ％ confidence level, coverage factor is 1.98.
Expanded uncertainty of performance indicator: 0.12 ％ at 95 ％ confidence level, coverage factor is 1.99.
Relative standard uncertainty of best existing device: 0.02 ％, degrees of freedom is 2.

Flow Rate: 10 L/min to 24 L/min
Relative expanded uncertainty of mass flowrate: 0.11 ％ at 95 ％ confidence level, coverage factor is 1.97.
Expanded uncertainty of performance indicator: 0.12 ％ at 95 ％ confidence level, coverage factor is 1.98.
Relative expanded uncertainty of volume flowrate: 0.12 ％ at 95 ％ confidence level, coverage factor is 1.97.
Expanded uncertainty of performance indicator: 0.13 ％ at 95 ％ confidence level, coverage factor is 1.99.
Relative expanded uncertainty of volume: 0.12 ％ at 95 ％ confidence level, coverage factor is 1.97.
Expanded uncertainty of performance indicator: 0.13 ％ at 95 ％ confidence level, coverage factor is 1.99.
Relative standard uncertainty of best existing device: 0.02 ％, degrees of freedom is 2.

61

Measurement System Validation Procedure for Low Pressure Gas Flow Calibration System-Bell Prover

This document showed an uncertainty analysis of the Low Pressure Gas Flow Calibration System—Bell Prover at the National Measurement Laboratory-Fluid Flow Group. This system provided calibration services for gas meter at flows between 10 L/min—1000 L/min ( for Dry Air) using the Volume—Time method.
Uncertainty analysis based on the propagation of uncertainty approach had been performed for this system. The propagation of uncertainty approach identified significant sources of measurement uncertainty; those sources could be qualified by experiments, instrumentation specifications, educated estimation, and handbook values of uncertainty. These uncertainty components are combined by the root-sum-square (RSS) and multiplied by a coverage factor to obtain the expanded uncertainty at 95 ％ confidence level.
The capability of the calibration system and its relative expanded uncertainty at 95％ confidence level were expressed as follows:

62

Measurement System Validation Procedure for Angle Blocks

This document states the uncertainty evaluation procedures for the angle blocks calibration system. The angle blocks to be calibrated are compared with the reference angle blocks by using two autocollimators. The effects of the influential factors on this calibration system will be considered to estimate the uncertainty according to the ISO "Guide to the Expression of Uncertainty in Measurement^, hereinafter called ISO GUM. The confidence level of this system is 95﹪. Control charts are developed, in accordance with the NBS SP-676-II, to monitor the stability of this system. This calibration system is attached to the Angle Blocks Calibration System (System code: D06).

63

Instrument Calibration Technique for Angle Blocks

This document describes the calibration procedures for angle blocks with nominal angles from 1"~ 45°. The angle blocks to be calibrated are compared with the reference angle blocks by using two autocollimators. The required equipment for this calibration is also stated. An example of calibration report is given. This calibration system is attached to the Angle Blocks Calibration System (System code: D06).

64

Measurement System Validation Procedure for Nanoparticle Size – Dynamic Light Scattering

This document describes the uncertainty evaluation of nanoparticles size calibration system characterized by Laser Dynamic Light Scattering. This measurement system is belong to Nanoparticle Size Measurement System (D26). Zetasizer Nano ZS analyzer (Malvern Instruments) is used for particle hydrodynamic diameter calibration service with a diameter range from 20 nm to 1000 nm. The measurement system calibrates size of colloidal nanoparticles is based on the Stoke-Einstein equation and Brownian motion.
Uncertainties analysis of measurement results are according to ISO/IEC Guide 98-3:2008. The uncertainty sources caused by measuring the nanoparticles diameter specimens are considered and evaluated. After a practical evaluation of uncertainty, this measurement system currently provides the following capability.
‧ Calibration item: Particle Size Standards -Polystyrene Sphere (also called Poly-Styrene Latex, PSL).
‧ Measurement range of Particles Diameter : 20 nm to 1000 nm
‧ Expanded uncertainty :
Ux=20 nm = 0.8 nm, cover factor k = 2.00.
U20 nm＜x≦50 nm = 1.8 nm, cover factor k = 2.00.
U50 nm＜x≦100 nm = 3.3 nm, cover factor k = 2.00.
U100 nm＜x≦200 nm = 6.4 nm, cover factor k = 2.00.
U200 nm＜x≦300 nm = 9.8 nm, cover factor k = 2.01.
U300 nm＜x≦500 nm = 17 nm, cover factor k = 2.00.
U500 nm＜x≦800 nm = 26 nm, cover factor k = 2.01.
U800 nm＜x≦1000 nm = 34 nm, cover factor k = 2.01.
where x is the hydrodynamic diameter.
‧ Confidence level : 95 ％.

65

Instrument Calibration Technique for Nanoparticle Size Calibration -Dynamic Light Scattering

This document describes the calibration procedures for nanoparticle size characterization by dynamic light scattering (DLS) technique at the National Measurement Laboratory (NML).
The measurement system is based on Zetasizer Nano ZS analyzer and belongs to Nanoparticle Size Measurement System (D26). Measurement instrument was manufactured by Malvern Instruments, UK and can currently provide the particles size calibration service from 20 nm to 1000 nm. The measurement system utilizes the Stoke-Einstein equation for particulate materials in Brownian motion to calibrate particles hydrodynamic diameter.
‧Calibration item : Particle Size Standards – Polystyrene Sphere (also called Poly-Styrene Latex, PSL)
‧Measurement range of particles diameter : 20 nm to 1000 nm
‧Expanded uncertainty :
Ux=20 nm = 0.8 nm, cover factor k = 2.00.
U20 nm＜x≦50 nm = 1.8 nm, cover factor k = 2.00.
U50 nm＜x≦100 nm = 3.3 nm, cover factor k = 2.00.
U100 nm＜x≦200 nm = 6.4 nm, cover factor k = 2.00.
U200 nm＜x≦300 nm = 9.8 nm, cover factor k = 2.01.
U300 nm＜x≦500 nm = 17 nm, cover factor k = 2.00.
U500 nm＜x≦800 nm = 26 nm, cover factor k = 2.01.
U800 nm＜x≦1000 nm = 34 nm, cover factor k = 2.01.
where x is the particle diameter.
‧Confidence level : 95 ％.

66

Instrument Calibration Technique for Nanoindentaion System

This instrument calibration technique provides the detail procedures to measure the indentation hardness and reduced modulus of materials using Hysitron nanoindentation measurement system. The indentation hardness and reduced modulus can be obtained by Hysitron nanoindentaion system through recording the relation of loading vs. depth. The load is in the range from 0.2 mN to 10 mN. The displacement is in the range from 50 nm to 300 nm.

67

Measurement System Validation Procedure for Oil Piston Gauge(J179)

The evaluation report is presented in an effort to evaluate the oil piston gauge in the P03 system. It introduced the function of the system, the principle of the piston gauge, the corrcetion factors and the measurement assurance program of the gauge. The expanded uncertainties, calibration and the measurement capabilities of the system are described as well.

The oil piston gauge in this system is RUSKA 2485 with simple piston and cylinder, the piston of J179.

The pressure measurement range is:

1 MPa to 28 MPa

The relative expanded uncertainties are:

2.8 ´ 10-5 Pa/Pa (coverage factor k = 1.99, confidence level: 95%)

Calibration and measurement capability expressed as relative expanded uncertainty for piston gauge is 3.3 ´10-5 m2/m2 (coverage factor k = 1.99, confidence level: 95%)

68

Measurement System Validation Procedure for Oil Piston Gage(J181)

he evaluation report is presented in an effort to evaluate the oil piston gauge in the P03 system. It introduced the function of the system, the principle of the piston gauge, the corrcetion factors and the measurement assurance program of the gauge. The expanded uncertainties, calibration and the measurement capabilities of the system are described as well.

he oil piston gauge in this system is RUSKA 2485 with simple piston and cylinder, the piston of J181.

The pressure measurement range is:

6 MPa to 280 MPa

The relative expanded uncertainties is:

8.2E-5 Pa/Pa (coverage factor k = 1.99, confidence level: 95%).

Calibration and measurement capability expressed as relative expanded uncertainty for piston gauge is 8.4E-5 m2/m2 (coverage factor k = 2.00, confidence level: 95%).

69

Instrument Calibration Technique for Oil Piston Gauge（Comparison Method）

This calibration procedure P03 system is used for operations of many kinds of digital pressure gauges and pressure transducers. The reference standard is oil lubricated piston gauge. The calibration is carried out using the comparison method described in this document. The preliminary operation, the calibration steps, the post-calibration and shut-down procedure, the data analysis and the calibration report etc are also included in this calibration procedure. The range of calibration is within 1 MPa   to 280 MPa.

70

Instrument Calibration Technique for the Oil Lubricated Piston Gauge（Cross-Float Method）

This calibration procedure P03 system can be used for operation to calibrate oil lubricated piston gauge. The reference standard is oil lubricated piston gauge and the calibration is carried out using the cross-float method described in this document. It described the preliminary operation, the calibration steps, the post-calibration and shut-down procedure, the data analysis and the calibration report etc. in this calibration procedure. The range of application is within 1 MPa to 280 MPa.

71

Measurement System Validation Procedure for Squares（Absolute Method）

This document states the uncertainty evaluation procedures for the Squares Calibration System (Absolute method) in accordance with the ISO "Guide to the Expression of Uncertainty in Measurement". In order to ensure the quality of the measurement results, a control chart was built to monitor and check the stability of the calibration system. This quality assurance program is refered to the NBS SP-676-II. After Validated than got the best measurement capability (BMC) is 0.32〞(0.93 um/600 mm).The system are attached to the Calibration System of Squares (D09).

72

Instrument Calibration Technique for Squares (Absolute Method)

This document describes the calibration procedures for squares（Absolute method）with height less than/equal 600 mm. The required equipment for square calibration is also stated.The calibration method is based on the reversal techquie which can separate the squareness of the squares and that of the measuring instrument,and the flatness of the surface plate. Thus no squareness reference is need.We just only need to calibrate the measuring probe,the Linear Variable Differetial Transformer,LVDT.The mathematical model of squares calibration by reversal technique is described. An example of the calibration report is also given.

After Validated than got the best measurement capability(BMC)is 0.32"(0.93 um/600 mm).The system are attached to the Calibration System of Squares(D09).

73

Instrument Calibration Technique for DC High Resistance System

A calibration procedure of Direct Current High Resistance Measurement System (system code: E14) in the National Measurement Laboratory is presented. The system provides a calibration service for a high resistance resistor, a megohm box, and a megohmmeter, etc., which of nominal decade values 1 MOhm, 10 M, 100 MOhm, 1 GOhm, 10 GOhm, 100 GOhm and 1 TOhm. The measurement is carried out by using an automated dual source high resistance bridge to measure the difference of the resistance (or so-called ratio) between the calibration item and the standard resistor.
The relative expanded uncertainty of the system, which under a 95 ％ level of confidence, is listed as follows:
Nominal Value of Resistance 1 MOhm, 10 MOhm, 100 MOhm, 1 GOhm, 10 GOhm, 100 GOhm,1 TOhm Coverage Factor 2, 2, 2, 2, 2, 2, 2.
Relative Expanded Uncertainty (uOhm/Ohm) 9, 11, 15, 17, 31, 33, 73.

74

Measurement System Validation Procedure for DC High Resistance Measurement System

The assessment report of Direct Current High Resistance Measurement System (system code: E14) in the National Measurement Laboratory is presented. The system provides a calibration service for a high resistance resistor, a megohm box, and a megohmmeter, etc., which of nominal decade values 1 MOhm, 10 MOhm, 100 MOhm, 1 GOhm, 10 GOhm, 100 GOhm and 1 TOhm. With the principle of differential resistance by automated dual source high resistance bridge, the ratio between calibration items (for example, a high resistance resistor, a megohm box) and standard resistor can be accurately measured, which can result in calibration value. The calibration of a megohmmeter is using the direct measurement method, which directly measured the standard high resistance of the standard resistor.
The relative expanded uncertainty for the high resistance resistors calibration of the system, which under a 95 ％ level of confidence, is listed as follows:
Nominal Value of Resistance 1 MOhm, 10 MOhm, 100 MOhm, 1 GOhm, 10 GOhm, 100 GOhm, 1 TOhm Coverage Factor 2, 2, 2, 2, 2, 2, 2 Relative Expanded Uncertainty (uOhm/Ohm) 9, 11, 15, 17, 31, 33, 73.

75

Measurement System Validation Procedure for Surface Roughness Standard Specimen

The document describes the uncertainty evaluation of measuring roughness specimens and belongs to surface roughness measurement system for the service of roughness calibration. The uncertainty and analysis of measurement results are based on "ISO/IEC Guide 98-3:2008, Uncertainty of measurement - Part 3: Guide to the expression of uncertainty in measurement (GUM:1995)". The error sources caused by measuring the roughness specimens are considered and evaluated; therefore we can determine the uncertainty of this measuring system in roughness.

76

Instrument Calibration Technique for Surface Roughness Standard Specimen

This document describes the National Measurement Laboratory regular or nonregular roughness calibration procedures. This calibration procedures is suitable for samples with flat surfaces, with lengths less than 200 mm, and roughness parameter Ra between 0.01 μm and 20 μm.

77

Measurement System Validation Procedure for Scale Tapes

This document is an assessment report on the calibration system of the standard tape and the invar bar code staff for the Center for Measurement Standards in carrying out the National Measurement Laboratory’s project. The calibration system provides the traceability and the calibration service of invar tape and invar bar code staff for lengths no longer than 10 meters.
The calibration system consists of a laser interferometer, a precise rail, a carriage, wireless transmission modules and a positioned microscope with a CCD. It is necessary to adjust the calibrated piece to be parallel with the precise rail and the laser interferometer, the DC stepmotor driving carriage and the microscope to the graduation to be calibrated. When the graduation is in view of the CCD, the deviation between the graduation edge and the center of CCD can be calculated through image processing techniques. The error signal is sent back to drive the carriage to make small movements until the graduation edge overlaps with the CCD center. In the meantime, the displacement of carriage on the graduation to be calibrated will be detected by the laser interferometer.
The error source analysis and uncertainties are according to the “Guide to the Expression of Uncertainty in Measurement” published by the International Organization for Standardization (ISO).

78

Instrument Calibration Technique for Scale Tapes

This document describes the calibration system of the standard tape and the invar bar code staff by the Center for Measurement Standards in carrying out the National Measurement Laboratory’s plan. The calibration system provides the calibration service of for the invar tape and invar bar code staff with lengths less than 10 meters.

The calibration system consists of a laser interferometer, a precise rail, a carriage, wireless transmission modules and a positioned microscope with a CCD.. It is necessary to adjust the calibrated piece to be parallel with the precise rail and the laser interferometer.

79

Instrument Calibration Technique for Long Gauge Block Standard-using Precision Long Gauge Block Calibration System)

This document describes the long gauge block calibration procedures by using laser interferometer at the National Measurement Laboratory (NML). The calibration range is from 100 mm to 1000 mm.
The calibration capability is shown as follows.
l Calibration item: long gauge block (Grade 0 or above, steel)
l Measurement range: 100 mm ~ 1000 mm
l Expanded uncertainty: [(67)2 ＋ (365 L)2]1/2 nm,
L denotes the nominal size of long gauge block in m.
l Coverage factor: 2.00
l Confidence level: 95 ％

This document belongs to Precision Long Gauge Block calibration system(D23).

80

Measurement System Validation Procedure for Long Gauge Block -Using Universal Measuring Machine

This document describes the uncertainty evaluation of long gauge block calibration system by comparison at the National Measurement Laboratory (NML). It is applied to gauge blocks with the following length of long gauge blocks – 125 mm, 150 mm, 175 mm, 200 mm, 250 mm, 300 mm, 400 mm, 500 mm and 600 mm. The shape of the end surface of the long gauge blocks shall be rectangular. The evaluation method bases on the ISO/TEC Guide 98-3:2008. The factors of the error sources are considered to estimate the measurement uncertainty of this calibration system.

81

Measurement System Validation Procedure for Long Gauge Block-using Precision Long Gauge Block Measurement Machine

This technique report is the uncertainty evaluation of precision long gauge block calibration system at National Measurement Laboratory (NML). It is applied to long gauge blocks of sizes of length range from 100 to 1000 mm. The shape at the end of the gauge blocks shall be rectangular. The analysis is in accordance with ISO/IEC Guide 98-3:2008. All influential factors of the uncertainty sources were considered to estimate the uncertainty of this calibration system.
The calibration capability is shown as follows.
l Calibration item: Long gauge block (Grade 0 or above, steel)
l Measurement range: 100 mm ~ 1000 mm
l Expanded uncertainty: [(67)2 ＋ (365×L) 2]1/2 nm,
L denotes the nominal size of long gauge block in m.
l Coverage factor: 2.00
l Confidence level: 95 ％

82

Instrument Calibration Technique for Long Gauge Block - Using Universal Measuring Machine

The document describes the methods used to calibrate long gauge blocks by the universal measurement machine at National Measurement Laboratory. It is applied to grade 0(and above) with the following length of gauge blocks – 125 mm, 150 mm, 175 mm, 200 mm, 250 mm, 300 mm, 400 mm, 500 mm and 600 mm, respectively. The shape of the end surface of the gauge blocks must be rectangular. The method applies to the calibration of long gauge blocks by   comparison.

83

Instrument Calibration Technique for Standard Capacitance-Traced to Resistance Standard

This document is the calibration procedure for capacitance traceability measurement system (system ID no. E29).
In the measurement chain of impedance standards, the capacitance standard is traceable to the dc quantum Hall resistance (dc QHR) standard. Firstly, the 1 kW ac/dc resistor is measured in terms of the dc QHR using direct current comparator bridge. Then, using a 10:1 ac resistance bridge, the ac resistance value of a 10 kW ac resistor is determined. Next the ac resistance values of two 100 kW ac resistors are determined by the same 10:1 ac resistance bridge. Finally a quadrature bridge is used to compare two 1000 pF standard capacitors to these two 100 kW ac resistors.
Then, the capacitance standard is disseminated from 1000 pF to 1 pF by using a 10:1 capacitance bridge.
The document specifically describes the preparation, procedures of measurement, and data analysis of the measurement chain described above.

84

Measurement System Validation Procedure for Standard Capacitance-Traced to Resistance Standard

This document is an assessment report on the capacitance traceability measurement system (system code: E29). It describes the calibration theory and uncertainty estimation for the derivation of capacitance standard based on the resistance standard.
In the measurement chain of impedance standards, the capacitance standard is traceable to the dc quantum Hall resistance (dc QHR) standard. Firstly, the 1 kΩ ac/dc resistor is measuring in terms of the dc QHR using direct current comparator bridge. Then, using a 10:1 ac resistance bridge, the ac resistance value of a 10 kΩ ac resistor is determined. Next the ac resistance values of two 100 kΩ ac resistors are determined by the same 10:1 ac resistance bridge. Finally a quadrature bridge is used to compare two 1000 pF standard capacitors to these two 100 kΩ ac resistors. The measurement chain of the 1000 pF capacitance standard is then complete. Then, the capacitance standard is disseminating from 1000 pF to 1 pF by using a 10:1 capacitance bridge.

85

Calibration and Measurement Uncertainty Evaluation Procedure for the Weighing Scales of Flow Measurement Systems

This document describes the procedure of calibration and measurement uncertainty evaluation for the weighing scales of flow measurement facility at National Measurement Laboratory (NML). The calibration is conducted by applying test loads to the weighing scale under specified conditions and recording the indication. The test loads consist of standard weights of known conventional value of mass and have traceable calibration to the national mass standard. The object of the calibration is the indication provided by the weighing scale in response to an applied load. The value of the load indicated by the weighing scale will be corrected considering the effect of air buoyancy. The indication of each test load from the weighing scale is compared with the corresponding standard weights, and then expressed in terms of the correction coefficient which is the ratio of standard weight to the indication. Finally, the correction coefficients corresponding to specified test loads on the weighing scale are given as the calibration results.
The measurement uncertainty is evaluated according to ISO/IEC Guide 98-3:2008(GUM)[8.1]. The considered uncertainty categories that affect the calibration results are estimated through either Type A or Type B evaluation. The relative combined standard uncertainty of the measurement result is then obtained by taking the root-mean square of each uncertainty component multiplied by its sensitivity coefficient. The relative expanded uncertainty of the measurements providing an interval with a 95 ％ level of confidence is used to indicate the calibration and measurement capability. It is calculated by multiplying the coverage factor, k, which is obtained based on the effective degrees of freedom calculated by Welch-Satterthwaite equation, with the relative combined standard uncertainty.

86

Precision Flow Measurement Technology

In order to meet the flowmeter calibration requirements of LORRIC Company, we designed a (1/2 to 2) in calibration machine of rotameter and a (3 to 12) in calibration system of ultrasonic flow meter. This document includes the PFD diagram, 3D diagram, specifications of electromagnetic flow meter, pump, valve, thermometer and pressure gauge. The calibration machine of rotameter and calibration system of ultrasonic flow meter are calibrated through the master meter method with the electromagnetic flow meter. The flow rate ranges are (0.2 to 850) L/min and (820 to 13200) L/min respectively. The estimated planning schedule starts from 1 January 2019 to 31 March 2020. Due to the request of LORRIC Company on mid-June 2019 that the schedule of construction of calibration system of ultrasonic flow meter and TAF certification postpone to 1 January 2020, the other schedules are also deferred.

87

Measurement System Validation Procedure for Transmittance Haze Measurement System

This document describes the system validation procedures for the transmittance haze measurement system. The system which in compliance with ASTM D 1003, JIS K 7361 (ISO 13468) and JIS K 7136 (ISO14782) standards is applicable to the measurement of the diffused materials with its transmittance haze below 40 %. This document belongs to the transmittance haze measurement system (system code: O08).

The wavelength measurement range is (380 ~ 780) nm. The uncertainties corresponding to approximately 95 % confidence level are as follows.



Standard: ASTM D 1003

Range Expanded Uncertainty Coverage Factor

35 % ≦ H < 40 % 0.64 % 1.98

25 % ≦ H < 35 % 0.53 % 1.98

15 % ≦ H < 25 % 0.39 % 2.00

7 % ≦ H < 15 % 0.19 % 2.00

2 % ≦ H < 7 % 0.13 % 2.00

0 % ≦ H < 2 % 0.05 % 2.22



Standard: JIS K 7361 (ISO 13468)

Range Expanded Uncertainty Coverage Factor

35 % ≦ H < 40 % 0.64 % 1.98

25 % ≦ H < 35 % 0.58 % 1.98

15 % ≦ H < 25 % 0.41 % 1.99

7 % ≦ H < 15 % 0.27 % 1.98

2 % ≦ H < 7 % 0.23 % 1.98

0 % ≦ H < 2 % 0.16 % 2.00





Standard: ISO 14782

Range Expanded Uncertainty Coverage Factor

35 % ≦ H < 40 % 0.59 % 1.98

25 % ≦ H < 35 % 0.52 % 1.98

15 % ≦ H < 25 % 0.36 % 1.98

7 % ≦ H < 15 % 0.19 % 2.00

2 % ≦ H < 7 % 0.13 % 2.00

0 % ≦ H < 2 % 0.04 % 2.02

88

Instrument Calibration Technique for Transmittance Haze Standard

This document describes the calibration procedure for total transmittance, diffuse transmittance and haze. This measurement system can be practiced in the haze measurement standards, ASTM D 1003, JIS K 7361 (ISO 13468) and JIS K 7136 (ISO 14782). According to the definition, haze can be calculated by the total transmittance and diffuse transmittance.

Light gets into and passes through samples vertically and the diffuse material is suitable for the calibration method. The calibrated standard plate can be the highest standard in secondary calibration laboratory.

This calibration system is subordinated to Haze Measurement System (O08). The measured wavelength is (380 ~ 780) nm, and under 95 % confidence level, the uncertainty is as follows.

Standard: ASTM D 1003

Range Expanded Uncertainty Coverage Factor

35 % ≦ H < 40 % 0.64 % 1.98

25 % ≦ H < 35 % 0.53 % 1.98

15 % ≦ H < 25 % 0.39 % 2.00

7 % ≦ H < 15 % 0.19 % 2.00

2 % ≦ H < 7 % 0.13 % 2.00

0 % ≦ H < 2 % 0.05 % 2.22





Standard: JIS K 7361 (ISO 13468)

Range Expanded Uncertainty Coverage Factor

35 % ≦ H < 40 % 0.64 % 1.98

25 % ≦ H < 35 % 0.58 % 1.98

15 % ≦ H < 25 % 0.41 % 1.99

7 % ≦ H < 15 % 0.27 % 1.98

2 % ≦ H < 7 % 0.23 % 1.98

0 % ≦ H < 2 % 0.16 % 2.00



Standard: ISO 14782

Range Expanded Uncertainty Coverage Factor

35 % ≦ H < 40 % 0.59 % 1.98

25 % ≦ H < 35 % 0.52 % 1.98

15 % ≦ H < 25 % 0.36 % 1.98

7 % ≦ H < 15 % 0.19 % 2.00

2 % ≦ H < 7 % 0.13 % 2.00

0 % ≦ H < 2 % 0.04 % 2.02

89

On-line metallic elements calibration for air

On-line calibration metallic elements for gas sample from gas exchange device

90

Evaluation Report of Concentration Verification and Stability of Primary Reference Gas Mixtures （C2H5OH in N2 and VOCs in N2）

GC-FID or GC-MS are applied for concentration verification of Primary Standard Gas Mixtures (PSM). The accuracy of PSM concentration (Cw) was confirmed, and checked by comparing the gravimetric concentration value (Cw) with the analysis data obtained from verification, Canal. The difference between Cw and Canal shall fit to criterion of , based on ISO 6142-1:2015 and ISO 6143:2001. The concentration stability evaluation process is conducted by comparing concentration analysis results between the original PSM prepared by C08 system and the Primary Reference Gas Mixtures (PRM) purchased from foreign national metrology institute (NMI), or between the PSMs prepared regularly by C08 system. Long-term concentration stability of the original prepared PSMs is evaluated by regular repeated analysis every 3 to 6 months to evaluate the shelf time of PSM. The analysis system belongs to Gravimetric High-Pressure Cylinder Gas Mixture Supply and Certification System (C08), which provide service of Primary Reference Gas Mixtures (PRM) to calibration laboratory and testing laboratory. Gas components and concentration service range of PRM is showed in the following table.

91

Evaluation Report for Stability of Primary Reference Gas Mixtures

This report shows procedure applied to evaluate the concentration stability of CO in N2,
CO2 in N2, CH4 in N2, C3H8 in N2, CF4 in N2, SF6 in N2, NO in N2, SO2 in N2, O2 in N2, and CH4 in air Primary Standard Gas Mixtures（PSM）. And, how to use GC-TCD/FID（Gas Chromatography equipped with Thermal Conductivity Detector and Flame Ionization Detector）, FTIR（Fourier Transform Infrared Spectroscopy） or Trace Oxygen Analyzer to verify the concentration of the PSM in order to evaluate its expiration date. This report belongs to the scope of Gravimetric High-Pressure Cylinder Gas Mixture Supply and Certification System （C08）. By the concentration ratio analysis between original PSM and Primary Reference Gas Mixtures (PRM) purchased from foreign national metrology institute（NMI） or PSM prepared again regularly by C08, estimating the verification concentration value and its measurement uncertainty of the original PSM. Thereafter, with repeated analysis and testing for the PSM every 3 to 6 months once to have a long-term monitoring and checking of its concentration stability.

92

Measurement System Validation Procedure for Filling Mass Cylinder Gases and Concentration of Gas Mixtures —Syringe Injection Method

This procedure provides the laboratory colleague as reference for evaluating the Accuracy of weighing syringes and 5 L ~ 10 L aluminum cylinder and the gravimetric preparation concentration of gas mixtures and its expanded uncertainty. Data obtained for calculation is the result of cylinder weighing using Mettler-Toledo XP26003L, Mettler-Toledo XP10003S mass comparator or Mettler-Toledo MS205DU semi-micro balances. The weighing capabilities of MS205DU, XP26003L and XP10003S can achieve 82 g, 26100 g and 10100 g respectively, and they have a readability of 0.01 mg, 1 mg and 1 mg, respectively. In practical weighing, the substitution method is adopted to do mass comparison between sample syringe or cylinder (S) and syringe or reference cylinder (R). After several times of repeated weighing, the mass difference between the sample and the reference syringe or cylinder, (S–R), can be calculated, as well as its standard deviation of mean value. By substitution weighing of S and R, we can accurately calculate the mass difference of filled liquid or gas before filling (S0–R) and after filling (S1–R). Preliminary evaluation of sources contributed to measurement uncertainty has been done herein. For gas mixtures preparation, three main factors contribute to the system expanded uncertainty: (1) the uncertainties of the filling mass, (2) the purity uncertainties of the raw materials, and (3) the molecular weights of the gas mixture components. The system belongs to the Gravimetric High-Pressure Cylinder Gas Mixture Supply and Certification System (C08), and the primary system provides metrological traceability for gas concentration measurement. The gas Mixtures and their concentration service range are showed in the following table.

93

Measurement System Validation Procedure for Filling Mass Cylinder Gases and Concentration of Gas Mixture – Gravimetric Method

This procedure provides the system members as reference for evaluating the accuracy of weighing 5 L ~ 10 L aluminum cylinder and the gravimetric preparation concentration of gas mixtures and its expanded uncertainty. Data obtained for calculation is the result of cylinder weighing using Mettler-Toledo XP26003L or Mettler-Toledo XP10003S mass comparator. The weighing capabilities of XP26003L and XP10003S can achieve 26100 g and 10100 g respectively, and they have a readability of 1 mg. In practical weighing, the substitution method is adopted to do mass comparison between sample cylinder (S) and reference cylinder (R). After several times of repeated weighing, the mass difference between the sample cylinder and the reference cylinder, (S–R), can be calculated, as well as its standard deviation of mean value. Filling sample cylinder with target gas followed by substitution weighing of S and R, we can accurately calculate the mass difference of filled gas before filling (S0–R) and after filling (S1–R). Preliminary evaluation of sources contributed to measurement uncertainty has been done herein. For gas mixtures from gas filling, three main factors contribute to the system expanded uncertainty: (1) the uncertainties of the gas filling mass, (2) the purity uncertainties of the parent gases, and (3) the molecular weights of the gas components. The system belongs to the Gravimetric High-Pressure Cylinder Gas Mixture Supply and Certification System (C08), and the primary system provides metrological traceability for gas concentration measurement.

94

Instrument Certification Technique for Filling Mass Cylinder Gases and Concentration of Gas Mixture – Gravimetric Method

This document provides the operation procedure and matters of notice for filling mass of cylinder gases and concentration verification of cylinder gas mixtures by using Mettler Toledo-XP26003L/XP10003S mass comparator.
During weighing, the mass of cylinder can be obtained from the balance system using ABA substitution method. Same procedures are applied to measure the weights of cylinder before and after gas filling. Then the mass of filling target gas can be calculated out. This document is part of Gravimetric High-Pressure Cylinder Gas Mixture Supply and Certification System (C08), and the primary system provides metrological traceability for gas concentration measurement.

95

Measurement System Validation Procedure for Gas Lubicated Piston Gauge（C-233）

Evaluation of the RUSKA/2465/C-233 gas lubricated piston gauge, which is part of the P04 system for pneumatic standard, is presented in this report. It includes a brief overview, measurement principles, calibration uncertainty analysis and a measurement assurance procedure of the gauge. The calibration range provided by this gauge is from 40 kPa to 700 kPa, and the uncertainties are listed as follows:



(1)Relative expanded uncertainty in gauge pressure mode: 3.0E-05 Pa/Pa

(coverage factor k = 2, a level of confidence of approximately 95%)

(2) Relative expanded uncertainty in absoulte pressure mode: 3.3E-05 Pa/Pa

(coverage factor k = 2, a level of confidence of approximately 95%)

(3) Calibration and measurement capability (CMC) expressed as relative expanded uncertainty for piston gauge calibration : 3.3E-05 m2/ m2 (coverage factor k = 2, a level of confidence of approximately 95%)

(4) Calibration and measurement capability (CMC) expressed as expanded uncertainty for digital and analog manometer calibration : 0.022 kPa (coverage factor k = 2, a level of confidence of approximately 95%)

96

Measurement System Validation Procedure for Gas Lubricated Piston Gauge (DHI PG7607)

Uncertainty evaluation was performed for the DHI PG7607 gas lubricated piston gauge, which is part of the P01 system for mercury manometer measurement. The evaluation includes a brief overview, measurement principles, calibration uncertainty analysis and a measurement assurance procedure of the gauge. The calibration range provided by this gauge is from 5 kPa to 175 kPa, and the uncertainties are listed as follows:



˙Relative expanded uncertainty in gauge pressure mode: 1.7E-05 Pa/Pa (coverage factor k = 2, a level of confidence of approximately 95 %)

˙Expanded uncertainty in absoulte pressure mode:2×(5.545E-11×P^2+6.25E-02)^0.5 Pa ( where P is pressure in Pa ). It indicates that the range of the expanded uncertainty is from 0.51 Pa to 2.7 Pa ( coverage factor k = 2 , confidence level: 95%)

˙ Calibration and measurement capability (CMC) expressed as relative expanded uncertainty for piston gauge calibration : 2.0E-05 m2/ m2 (coverage factor k = 2, a level of confidence of approximately 95 %)

˙Calibration and measurement capability expressed as expanded uncertainty for digital manometer calibration : 0.003 kPa (coverage factor k = 2, a level of confidence of approximately 95 %)

97

Measurement System Validation Procedure for Gas Lubicated Piston Gage（PG-7601/1974）

Uncertainty evaluation was performed for the DHI/PG-7601/1974 gas lubricated piston gauge, which is part of the P04 system for pneumatic standard. The evaluation includes a brief overview, measurement principles, calibration uncertainty analysis and a measurement assurance procedure of the gauge. The calibration range provided by this gauge is from 40 kPa to 700 kPa, and the uncertainties are listed as follows:



˙Relative expanded uncertainty in gauge pressure mode: 2.0E-05 Pa/Pa (coverage factor k = 2, a level of confidence of approximately 95%)

˙ Relative expanded uncertainty in absoulte pressure mode: 2.3E-05 Pa/Pa(coverage factor k = 2, a level of confidence of approximately 95%)

˙ Calibration and measurement capability (CMC) expressed as relative expanded uncertainty for piston gauge calibration : 2.5 E-05 m2/ m2 (coverage factor k = 2, a level of confidence of approximately 95%)

˙Calibration and measurement capability expressed as expanded uncertainty for digital manometer calibration : 0.018 kPa (coverage factor k = 2, a level of confidence of approximately 95%)

98

Measurement System Validation Procedure for Gas Lubicated Piston Gage(PG-7601/1998)

Uncertainty evaluation was performed for the DHI/PG-7601/1998 gas lubricated piston gauge, which is part of the P04 system for pneumatic standard. The evaluation includes a brief overview, measurement principles, calibration uncertainty analysis and a measurement assurance procedure of the gauge. The calibration range provided by this gauge is from 300 kPa to 7000 kPa, and the uncertainties are listed as follows:

˙Relative expanded uncertainty in gauge pressure mode: 2.1E-5 Pa/Pa(coverage factor k = 2, a level of confidence of approximately 95%)

˙ Relative expanded uncertainty in absoulte pressure mode: 2.1E-5 Pa/Pa(coverage factor k = 2, a level of confidence of approximately 95%)

˙ Calibration and measurement capability (CMC) expressed as relative expanded uncertainty for piston gauge calibration : 3.5E-5 m2/ m2 (coverage factor k = 2, a level of confidence of approximately 95%)

˙Calibration and measurement capability expressed as expanded uncertainty for digital manometer calibration : 0.25 kPa (coverage factor k = 2, a level of confidence of approximately 95%)

99

Measurement System Validaton Procedure for Gas Lubicated Piston Gauge (TL-931）

Evaluation of the RUSKA/2465/ TL-931 gas lubricated piston gauge, which is part of the P04 system for pneumatic standard, is presented in this report. It includes a brief overview, measurement principles, calibration uncertainty analysis and a measurement assurance procedure of the gauge. The calibration range of this gauge is from 16 kPa to 175 kPa, and the uncertainties are listed as follows:



(1)Relative expanded uncertainty in gauge pressure mode: 2.8 E-05 Pa/Pa ( coverage factor k = 2 , confidence level: 95%)

(2) Expanded uncertainty in absoulte pressure mode: 2×(1.77E-10×P^2 +0.111)^0.5 Pa ( where P is pressure in Pa ), It indicates that the range of the expanded uncertainty is from 0.80 Pa to 4.7 Pa ( coverage factor k = 2 , confidence level: 95%)

(3) Calibration and measurement capability ( CMC ) expressed as relative expanded uncertainty for piston gauge calibration : 3.4E-05 m2/ m2 ( coverage factor k = 2 , confidence level: 95%)

(4) Calibration and measurement capability (CMC) expressed as expanded uncertainty for digital and analog manometer calibration : 0.0030 kPa ( coverage factor k = 2 , confidence level: 95%)

100

Measurement System Validation Procedure for Gas Lubicated Piston Gauge（V-924）

Evaluation of the RUSKA/2465/ V-924 gas lubricated piston gauge which is part of the P04 system for pneumatic standard is presented in this report. It includes a brief overview, measurement principles, calibration uncertainty analysis and a measurement assurance of the gauge. The calibration range of this gauge is from 300 kPa to 7000 kPa, and the uncertainties are listed as follows:



(1)Relative expanded uncertainty in gauge pressure mode: 3.7E-05 kPa/kPa ( coverage factor k = 2 , confidence level: 95%)

(2) Relative expanded uncertainty in absoulte pressure mode: 3.6E-05 kPa/kPa ( coverage factor k = 2 , confidence level: 95%)

(3) Calibration and measurement capability ( CMC ) expressed as relative expanded uncertainty for piston gauge calibration : 4.1E-05 m2/ m2 ( coverage factor k = 2 , confidence level: 95%)

(4) Calibration and measurement capability (CMC) expressed as expanded uncertainty for digital and analog manometer calibration : 0.27 kPa ( coverage factor k = 2 , confidence level: 95%)

101

Measurement System Validation Procedure for Roundness Measurement System

This document is the evaluation report of roundness measuring system of National Measurement Laboratory. The roundness measuring instrument is FEDERAL FORMSCAN 3000 type which consists of a high precision turntable and a mechanical electronic gage probe to grab the radial deviation of workpiece. The least squares analysis and separating spindle error methods have been used to calculate the roundness of the workpiece and the spindle error (the roundness of spindle).

In the Quality Assurance Model of the instrument the spindle error (the roundness of spindle) is process parameters to check the stability of calibration procedure. After long-term stacking the data of process parameter, we have evaluated the capacity of roundness calibration and the measuring uncertainty as follows：

Measuring range：

Roundness standard：(0～2 ) μm (out-of-roundness)

For 95 % confidence level, coverage factor k ＝ 1.97

Expanded uncertainty = 0.015 μm

This document belongs to roundness calibration system (D12).

102

Measurement System Validation Procedure for Roundness Standard -Rotating Pick-up Type

The document describes the uncertainty evaluation of the roundness measuring system for the National Measurement Laboratory. In this document, a Taylor Hobson TALYROND 73 HPR rotating pick-up type roundness measuring instrument is used.
This calibration system is attached to the Roundness Calibration System (System code: D12), Measuring range：Roundness standard：(0.001～2 ) μm (out-of-roundness)
For 95 ％ confidence level, coverage factor k ＝ 1.97 ~ 2.14, Expanded uncertainty(U) = Q[4.79,67R,2.14σ]nm, where R means the measurement of roundness with μm unit. σ means the value of standard deviation for multi-step measurements with nm unit.

103

Instrument Calibration Technique for Roundness Standard

The document describes the calibration procedure of the roundness measuring system for the National Measurement Laboratory. In this document, a FEDERAL FORMSCAN 3000 rotary table type roundness measuring instrument is used. Profile of the customer artifact that rotate along a spindle is measured by an electro-mechanical probe. Out-of roundness can be obtained by the least square circle method to separate the spindle error.

This calibration system is attached to the Roundness Calibration System (System code: D12), Measuring range：

Roundness standard : (0~2)μm (out-of-roundness)

For 95﹪confidence level, coverage factor k =1.97, Expanded uncertainty(U) =0.015 μm.

104

Instrument Calibration Technique for Roundness Standard - Rotating Pick-up Type

The document describes the calibration procedure of the roundness measuring system for the National Measurement Laboratory. In this document, a Taylor Hobson TALYROND 73 HPR rotating pick-up type roundness measuring instrument is used. Profile of the customer artifact that rotate along a spindle is measured by an electro-mechanical probe. Out-of roundness can be obtained by the least square circle method to separate the spindle error.

This calibration system is attached to the Roundness Calibration System (System code: D12), Measuring range：Roundness standard：(0.001～2 ) μm (out-of-roundness). For 95 % confidence level, coverage factor k ＝ 1.97 ~ 2.14, Expanded uncertainty(U) = Q[4.79,67R,2.14σ]nm, where R means the measurement of roundness with μm unit. σ means the value of standard deviation for multi-step measurements with nm unit.

106

The Training Report of Attending the FCMN 2017

I attended to the 2019 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN2019) organized by NIST, USA, and published the paper. The title is "The Development of X-ray Metrology for Thin Film Thickness in Semiconductor Inspection". This conference is one of the important conferences of international nano-electronic metrology. In this conference, it was introduced the future development and measurement of components and materials, and the introduction and development of related inspection technologies. It provide the latest international dynamics and technology exchange platform for the development of frontier semiconductor inspection technology.

107

Report of Participate in the TEMPMEKO 2019 Symposium

Participate in the Symposium on Temperature and Thermal Measurements in Industry and Science (TEMPMEKO 2019) publication paper and exchange of thermometry technology experiences and knowledge. The title of published articles are: STUDY AN ABSOLUTELY CALIBRATED RADIATION THERMOMETER FOR Ag /Cu FIXED POINT MEASUREMENTS and A TRANSFER BLACKBODY FOR CLINICAL INFRARED EAR THERMOMETERS。

108

Instrument Calibration Technique for Scanning Electron Microscope System - Standard Particle Size

This document describes the uncertainty evaluation of standard pitch calibration by Scanning Electron Microscope (SEM). The calibration system is belonging to Scanning Electron Microscope Calibration System (D28). The system will provide pitch calibration from 10 nm to 60 nm.The uncertainty analysis of measurement results is based on “Guide to the expression of uncertainty in measurement”, ISO/IEC 98-3:2008. The measurement system currently provides the following capability.

109

Instrument Calibration Technique for Scanning Electron Microscope Measurement System-Pitch Standard

This document describes the uncertainty evaluation of standard pitch calibration by Scanning Electron Microscope (SEM). The calibration system is belonging to Scanning Electron Microscope Calibration System (D28). The system will provide pitch calibration from 70 nm to 1000 nm.The uncertainty analysis of measurement results is based on “Guide to the expression of uncertainty in measurement”, ISO/IEC 98-3:2008. The measurement system currently provides the following capability.

110

Measurement System Validation Procedure for Scanning Eletron Microscopy System -Standard Particle Size

This document describes the uncertainty evaluation of standard particle calibration by Scanning Electron Microscopy (SEM). The calibration system is belonging to Scanning Electron Microscopy Calibration System (D28). The system will provide particle size calibration from 10 nm to 60 nm.

111

Measurement System Validation Procedure for Scanning Electron Microscope System-Pitch Standard

This document describes the uncertainty evaluation of standard pitch and particle calibration by Scanning Electrica Microscopy (SEM). The calibration system is belonging to Scanning Electrica Microscopy Calibration System (D28). the system will provide pitch calibration from 70 nm to 1000 nm.

112

Calibration and Measurement Uncertainty Evaluation Procedure for Weights Used in Flow Measurement Systems

This document describes the procedure of calibration and measurement uncertainty evaluation for the weighing scales of flow measurement facility at National Measurement Laboratory (NML). The calibration is conducted by applying test loads to the weighing scale under specified conditions and recording the indication. The test loads consist of standard weights of known conventional value of mass and have traceable calibration to the national mass standard. The object of the calibration is the indication provided by the weighing scale in response to an applied load. The value of the load indicated by the weighing scale will be corrected considering the effect of air buoyancy. The weighing scale is calibrated by the corresponding standard weights, and then expressed in terms of the correction coefficient which is the ratio of standard weight to the indication. Finally, the correction coefficients corresponding to specified test loads on the weighing scale are given as the calibration results.

The uncertainty evaluation in this document refers to ISO GUM. All considered uncertainty sources in the flow measurement are quantified by and expressed with either Type A or Type B evaluations of uncertainty. The combined uncertainty are evaluated according to the standard uncertainty of each uncertainty components and its sensitive coefficient. The expanded uncertainty used to express the result of calibration is the product of the combined uncertainty and a coverage factor at the level of confidence of 95％.

The calibration capability of the system is expressed as follows:
Accumulated mass : 5 kg to 600 kg

113

Production Guidelines for Certified Reference Gas Mixtures

This production guideline for certified reference gas mixture provides the operation procedure of gas mixture preparation, and according to ISO 17034:2016, makes a description of the related quality documents and notice in the production procedure for the laboratory colleague.

114

Instrument Calibration Technique for LED Spectroradiometric Spectrum

This report is for the light emitting diodes (LEDs) spectral Spectrum measurement system. The document contains the system description and the measurement principle and measurement method. The spectral range of this system is from 380 nm to 780 nm.

115

Measurement System Validation Procedure for LED Spectroradiometric Spectrum

This is evaluation report for the light emitting diodes (LEDs) Spectroradiometric measurement system. The document contains the system description the measurement principle and measurement method. The spectral wavelength range of this system is from 380 nm to 780nm.

116

Instrument Calibration Technique for Averaged LED Luminous Intensity

This document describes the calibration procedures for the averaged luminous intensity of light emitting diodes (LEDs) measurement system (O02). The LED averaged luminous intensity is measured by detector-based method. Under fixed distances, the averaged luminous intensity of LEDs can be acquired from the inverse-squared law.
The dynamic range of the LEDs averaged luminous intensity measurement system is from 10 mcd to 10000 mcd.

117

Measurement System Validation Procedure for LED Averaged Luminous Intensity

This is the uncertainty evaluation report for the averaged light emitting diodes (LEDs) luminous intensity measurement system (O02). This document contains the system description and the measurement principle and measurement method by detector-based method.
The dynamic range of the averaged LEDs luminous intensity measurement system is from 10 mcd to 10000 mcd with relative expanded uncertainty ranging from 1.7 ％ at a confidence level 95 ％.

118

Instrument Calibration Technique for LED Total Luminous Flux

This document is the luminous flux measurement of light emitting diodes by using the integrating sphere photometer. By substitute and self-absorption method, the total luminous flux of the LED was compared to that of the calibrated standard lamp. The dynamic range of the LEDs luminous flux measurement system is from 40 mlm to 800 lm .

119

Measurement System Validation Procedure for LED Total Luminous Flux

This is the uncertainty evaluation report for the light emitting diodes (LEDs) total luminous flux measurement system (O02). This document contains the system description and the measurement principle and measurement method by using the integrating sphere photometer.
The dynamic range of the LEDs total luminous flux measurement system is from
40 mlm to 800 lm with relative expanded uncertainty 3.4 ％ (depending on the LED characteristics) at a confidence level of 95 ％.

120

Instrument Calibration Technique for Radiant Power of Absolute Radiometer System

This document describes the procedures for radiant power calibration. The working standard of this system is a pyroelectric radiometer. It can be applied to calibrate the radiometers, laser power meters, and the radiant power and radiance of the light sources. If the DUT (device under test) is a radiometer or power meter, the calibration method is substitution method. That is to measure a light source (with certain wavelength) by the DUT and the working standard respectively, then comparing their readings to find out the correction factor of the DUT. If the DUT is a light source, measure its radiant power by the working standard directly. The working standard can be traced to the CMS primary standard, the room temperature absolute radiometer.

The measurement capability of the system is from 50 uW to 150 mW for radiant power and from 50 uW/cm2 to 150 mW/cm2 for irradiance. Under confidence level of 95 %, relative expanded uncertainty is 2.9% ~ 6.2 % with coverage factor of 1.97

The uncertainty depends on the characteristics of the light source and the DUT. Please refer to its evaluation report for the details of uncertainty analysis.

121

Measurement System Validation Procedure for Radiant Power of Absolute Radiometer System

This document describes the procedures for realization of optical radiance through the usage of the room temperature absolute radiometer.

The work standard is the pyroelectric radiometer which is calibrated by the room temperature absolute radiometer. The check standard is an UVA detector which is applied for system controlling.

This system is subordinated to the absolute radiometer system. The system code is O06. The main functions of this system are the radiant power and irradiance measurements for light source, and the calibrations of power meters and irradiance meters. The measurement capability of the system is from 50 mW to 150 mW for radiant power and from 50 uW/cm2 to 150 mW/cm2 for irradiance. Under confidence level of 95 %, relative expanded uncertainty is 2.9% ~ 6.2 % with coverage factor of 95 %.

This report presents the sources and the estimation method of uncertainty. The uncertainties are estimated according to the measurement data. Please refer to Chapter 3 and Appendix 1 for the details.

122

Instrument Calibration Technique for Optical Fiber Power Meter of Absolute Radiometer System

This is Calibration Procedure for Optical Fiber Power Meter of Absolute Radiometer System. Contents illustrate preliminary operation of calibration, calibration steps, and post-calibration procedure…etc. The test sample is fiber power meter. The power range is from 1 uW to 1 mW. The wavelengths are 1310 nm and 1550 nm.   The relative expanded uncertainty is 1.2 %, and .the coverage factor of the above uncertainty is 1.97 with confidence level of 95 %. The capability of this system could be renewed when measurement technology improved or equipment retrofitted.

123

Measurement System Validation Procedure for Optical Fiber Power Meter of Absolute Radiometer System

This is Evaluation Report for Fiber Power Meter of Absolute Radiometer System, the sample under test is optical fiber power meter. According to the calibration principle and calibration procedure, the capability for fiber power meter calibration is as following:

‧ Wavelength：1310 nm & 1550 nm

‧ Power range：1 uW ~ 1 mW

‧ Relative expanded uncertainty:1.2%

Coverage factor:1.97

124

Instrument Calibration Technique for llluminance Meter of Absolute Radiometer System

This document states the calibration procedure for Illuminance Meter and lumi-nous intensity of Absolute Radiometer System O06. Contents illustrate preliminary op-eration of calibration, calibration steps, and post-calibration procedure…etc. The cali-bration items are illuminance meter (lux meter) and chroma meter, which are calibrated by illuiminant A. The system can also be applied to calibrate the luminous intensity of the lamp. The capability for calibration of illuminance meter is as follows :
‧ Illuminance range: 25 lx to 1500 lx
‧ Luminous intensity: 25 cd to 90000 cd
‧ Chromaticity coordinate: 0.0 to 0.9
‧ Correlated color temperture：2500 K to 3200 K
The capability of this system could be renewed when measurement technology improved or equipment retrofitted.

125

Instrument Calibration Technique for Quantum Hall Resistance System

This instrument calibration technique describes the calibration procedures for the calibration of 1 kΩ standard resistor with the quantum Hall resistance measurement system (system code: E24). This system maintains the primary standard of the DC resistance. The measurement method is based on the quantized resistance produced by the quantum Hall device under low temperature and high magnetic field. The resistance of the DC standard resistors under test with their measurement uncertainties can be obtained through a direct current comparator (DCC) with statistic processing from such a quantized resistance.

This system provides the measurement on the DC standard resistors of 1 kΩ. The uncertainty analysis is according to the ISO/IEC Guide 98-3:2008, Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995). The following table shows the relative expanded uncertainty, level of confidence, and coverage factor of this system:

Resistor value：1 kΩ ; Relative expanded uncertainty (μΩ/Ω)：0.06 ;

Level of confidence：95 % ; Coverage factor (k)：2

126

Measurement System Validation Procedure for Quantum Hall Resistance Standard System

This document describes the uncertainty analysis method for the calibration of a DC standard resistor with the quantum Hall resistance measurement system (system code: E24). This system maintains the primary standard of DC resistance. The measurement method is based on the quantized resistance produced by the quantum Hall device under low temperature and high magnetic field. The values of the DC standard resistors under test with their measurement uncertainties can be obtained through a direct current comparator (DCC) with statistic processing from such a quantized resistance.

This system provides the measurement on the DC standard resistors of 1 kΩ. The uncertainty analysis is according to the ISO/IEC Guide 98-3:2008, Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995). The following table shows the relative expanded uncertainty, level of confidence, and coverage factor of this system:

Resistor value：1 kΩ；Relative expanded uncertainty：0.06 μΩ/Ω；Confidence level：95 % ; Coverage factor (k)：2

127

Measurement System Review Summary Report - New SI Current Standard Established System (E13, E14, E24)

This summary report describes the measurement system review process and related records after the new SI current standards establishment of the “DC Resistance Measurement System (E13), DC High (II) Resistance Measurement System (E14), Quantized Hall Resistance Measurement System E24)”. A measurement system review meeting was held on October 1, 2019 (Tue) and all of the review committee agreed to approve this calibration system to be provided calibration service for external. Center for Measurement Standards (CMS) submitted the “Measurement System Review Report” of this new established “DC Resistance Measurement System (E13), DC High (II) Resistance Measurement System (E14), Quantized Hall Resistance Measurement System E24)” to the Bureau of Standards, Metrology and Inspection (BSMI) for approval to provide calibration service for external on November 8, 2019 (Fri). And BSMI replied to agree the “DC Resistance Measurement System (E13), DC High (II) Resistance Measurement System (E14), Quantized Hall Resistance Measurement System E24)” to be a national metrological standard system on November 18, 2019 (Mon) and these systems can provide calibration services for external.

128

Measurement System Validation Procedure for Step Height Standard-Optical Method

This document describes the uncertainty evaluation of measuring step height or depth-setting specimens, and belongs to the step height calibration system for the service of step height calibration. The uncertainty analysis of measurement results is based on "ISO/IEC Guide 98-3:2008, Uncertainty of measurement - Part 3: Guide to the expression of uncertainty in measurement (GUM:1995)". The error sources caused by measuring the step height specimens are considered and evaluated.

Our measuring system can currently provide the calibration service of the step height specimen whose lateral length is less than 120 mm, the measurement region larger than 700 μm and height (or depth) is between 0.01 μm and 100 μm.

129

Measurement System Validation Procedure for Step Height Measurement-Stylus Method

This document describes the uncertainty evaluation of measuring step hight or depth-setting specimens, and belongs to the step height measurement system for the service of step height calibration. The uncertainty and analysis of measurement results are based on "ISO/IEC Guide 98-3:2008, Uncertainty of measurement - Part 3: Guide to the expression of uncertainty in measurement (GUM:1995)". The error sources caused by measuring the step height specimens are considered and evaluated; therefore we can determine the uncertainty of this measuring system in step height specimens whose lateral length is less than 200 mm and height (or depth) is between 0.01 μm and 50 μm.

130

Instrument Calibration Technique for Step Height Standard-Optical Method

This document describes the regular or nonregular step height calibration procedure in Dimensional Measurement Laboratory. The calibration procedure is suitable for the standard specimens with flat surface, the measurement region larger than 700 μm and the nominal step or depth size from 0.01 μm to 100 μm. Optical interferemetry is used in this procedure.

131

Instrument Calibration Technique for Step Height Standard-Stylus Method

This document describes the CMS Laboratory regular or nonregular step height calibration procedures. The type of instrument for measurement is contact stylus and this calibration procedure is suitable for samples with flat surfaces with lengths less than 200 mm, and the nominal step or depth size between 0.01 μm and 50 μm.

132

Instrument Calibration Technique for Step Gauge

This document describes the calibration procedure for the step gauge calibration system in Center for Measurement Standards (CMS). The step gauge calibration system is to integrate the laser interferometer as the standard for traceability of length measurement, with the high-accuracy coordinate measuring machine (CMM), consisting of a moving table and probing system, to implement the calibration procedure for step gauge by semi-automatic operation.

The ISO/IEC Guide 98-3:2008 is followed to evaluate the measurement uncertainty of the step gauge calibration system, in which the error and its standard uncertainty are utilized to analyze and calculate the expanded uncertainty. The calibration system currently provides the following measurement capabilities.

Ÿ Calibration item: step gauge (including caliper checker)

Ÿ Measurement range: 10 mm to 1010 mm

Ÿ Expanded uncertainty:1.97 x [(0.29^2 μm)]+(4.03x10^-7 x L )^2]^0.5



where L: measurement range, unit: mm

Ÿ Confidence level: 95 %

Ÿ Coverage factor(k): 1.97

Ÿ This document belongs to step gauge calibration system (D30)

133

Measurement System Validation Procedure for Gauge Blocks - Federal Gauge Block Comparator

This document describes the uncertainty evaluation of gauge block calibration by Federal 130B-24 gauge block comparator at Dimensional Measurement Laboratory of NML. The evaluation method was based on the official publication of the ISO/IEC Guide 98-3:2008, Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM: 1995).The influence of each error source was analyzed in the calibration procedure. The measurement scope and the results of evaluated uncertainty are shown as below

Measurement scope：Metric gauge blocks of rectangular cross sections, with the length of 0.5 mm to100 mm in grade 00, k, 0.

Expanded uncertainty：

( based on 95% confidence level and coverage factor k = 1.98)

Steel gage block：[(39)2+(0.5 )2]1/2 nm

Ceramic gauge block：[(39)2+(0.6 )2]1/2 nm

Chromium carbide gauge block：[(40)2+(0.8 )2]1/2 nm

Tungsten carbide gauge block：[(40)2+(1.9 )2]1/2 nm

indicates length of gauge block and     in mm.

This document belongs to Gauge Block Calibration System-Comparator(D01).

134

Measurement System Validation Procedure for Gauge Blocks-Gauge Block Interferometer

The Measurement System Validation Procedure describes the method used to evaluate the uncertainty of gauge blocks measured by interferometry at Dimensional Measurement Laboratory of NML. The evaluation method is based on the ISO official publication of the Guide to the Expression of Uncertainty in Measurement. The influence of each error source is analyzed in the calibration procedure. The measurement scope and the results of evaluated uncertainties are shown as below.



Measurement scope：

Metric steel gauge blocks of rectangular cross sections

Central lengths: 0.5 mm ~ 100 mm

Grade：Better than Grade: K(include)



Expanded uncertainty (95 % confidence level and coverage factor k = 2.06):

[(17)2+(0.29L)2]1/2 nm

L is the nominal length of the gauge block (unit: mm).

135

Instrument Calibration Technique for Gauge Blocks - Federal Gauge Block Comparator

This document describes the method used to calibrate gauge blocks by the gauge block comparator at Dimensional Measurement Laboratory of NML. This documentation is attached to gauge block comparator system (system code: D01). The Federal 130B-24 gauge block comparator is used to calibrate gauge blocks. To the definition of metre, central length of gauge blocks measured by the comparator will ensure traceability of gauge block hierarchy. The measurement scope and the results of evaluated uncertainties are shown as below.

Measurement scope: Metric gauge blocks of rectangular cross sections

Central lengths: 0.5 mm ~ 100 mm

Grade: 0, K and 00

Expanded uncertainty (95 % confidence level and coverage factor k = 1.98):

Steel gage block：[(39)2+(0.5 )2]1/2 nm

Ceramic gauge block：[(39)2+(0.6 )2]1/2 nm

Tungsten carbide gauge block：[(40)2+(0.8 )2]1/2 nm

Chromium carbide gauge block：[(40)2+(1.9 )2]1/2 nm

indicates nominal length of gauge block and   in mm.

136

Instrument Calibration Technique for Gauge Blocks-Gauge Block Interferometer

The Instrument Calibration Technique describes the method used to calibrate gauge blocks by the gauge block interferometer at Dimensional Measurement Laboratory of NML. This documentation is attached to gauge block interferometer system (system code: D02). To the definition of meter, central length of gauge blocks measured by interferometry will ensure traceability of gauge block hierarchy. The measurement scope and the results of evaluated uncertainties are shown as below.



Measurement scope:

Metric steel gauge blocks of rectangular cross sections

Central lengths：0.5 mm ~ 100 mm,

Grade：Better than Grade: K(include)

Expanded uncertainty (95 % confidence level and coverage factor k = 2.06):

[(17)2+(0.29L)2]1/2 nm

L is the nominal length of the gauge block (unit: mm).

137

Measurement System Validation Procedure for Plug Gauge-Use of Labmaster Universal Measuring System

This report states about the uncertainty evaluation for the calibration of end standard of plug gauges that are labeled X-class level and mainly dimensional length include the ranges of 20 mm to 100 mm. The calibration way is utilizing Labmaster universal measuring system, to calibrate the length of external diameter. First, the laser interferometer measured the standard gauge block, whose length was 20 mm, for initial condition to reset. Then it measured client plug gauge directly. The measurement uncertainty evaluation in this report followed the ISO/IEC Guide 98-3;2008 to provide the expanded uncertainty.

This report belongs to the End Dimensional Measurement System(D03).

138

Instrument Calibration Technique for Plug Gauge Use of Labmaster Universal Measuring System

This report states about the calibration procedures of end standard of Plug gauges with the ranges of 20 mm to 100 mm external diameter. The calibration way is utilizing Labmaster universal measuring system to calibrate the length of external diameter. First, the laser interferometer system measured the standard gauge block, whose nominal size was 20 mm, for initial condition to reset, and then measured client Plug gauge directly. In this document, there were five subjects about the preparations, procedures, processing after calibration finishing, data analysis, and calibration reports.

This document belongs to the End Dimensional Measurement System(D03).

139

Low optical power measurement of micro light sources

micro-LED technology is considered a new generation of technology in the display field, in which LEDs serve as luminary instead of backlight. In other words, every single pixel in a display is made of chips of micro-LEDs. Therefore, optical radiation characteristics of a single micro-LED are important specifications and are keen to be known by micro-LED manufacturers and display manufacturers. As fabrication technology of micro-LED becomes more and more advanced, related measurement demands and problems also start to show. However, current measurement technology is not sufficient to support micro-LED measurements. In this article, problems of micro-LED single chip measurements will be addressed. And possible solutions will be proposed and discussed.

140

Instrument Calibration Technique for Micro/Nano Mechanical Properties Measurement System

This calibration procedure provides the laboratory colleague as reference to utilize Micro/Nano Mechanical Properties Measurement System to measure the Young’s modulus of materials. The Young’s modulus would be obtained by Nano UTM system through recording the relation of loading vs. displacement. The maximum loading and displacement of system for calibration   are 200 mN and 50 mm, respectively.

141

Instrument Calibration Technique for Power Meter

This document describes the calibration procedures (U01) for microwave power meter calibration. Calibrated item includes two parts, which are power range and reference power source.   The contents include: preparation before calibration, calibration steps, and an example of the calibration report. This document can also be used as a tutorial material for training.

The calibration capability of the calibration system is as follows.

Reference Power Source:

Reference Frequency: 50 MHz.

Reference Power: 1 mW.

Relative expanded uncertainty：0.51 %.

Power Range :

Power: -25 dBm, -20 dBm, -15 dBm, -10 dBm, -5 dBm, 0 dBm, 5 dBm, 10 dBm,

15 dBm, 20 dBm.

Relative expanded uncertainty：0.28 %.

142

Measurement System Validation Procedure for the Microwave S-Parameters and Impedance System

This document is an assessment report for the microwave S-parameter measurement system (U02), which provides calibration service for microwave devices.



The report describes the evaluation of the measurement uncertainties with the Network Analyzer. The system must be calibrated with appropriate calibration kits before performing any measurement. The post-calibration errors contribute to most of the measurement uncertainty.



The calibration capabilities of this system are as follows.

‧ Measurement Parameters: S11, S22, S21, S12.

‧ Connector Type: 2.92 mm, APC 3.5, Type N

‧ Measurement Range: 0 to 1 for S11 & S22 (Linear), -60 dB to 0 dB for S21 & S12.(Devices with higher attenuation can be measured with the system, but it is not recommended since the uncertainties are higher )

‧ Measurement Frequency Range: 0.010 GHz to 18 GHz for Type N, 0.010 GHz to 26.5 GHz for APC 3.5, 0.045 GHz to 40 GHz for 2.92 mm.

‧ Expanded Uncertainty: refers to the above tables.

‧ Level of Confidence (Coverage Factor): 95 % (2).

143

Instrument Calibration Technique for Network Devices with Microwave S-parameters and Impedance System

This report describes procedures for measuring s-parameters of devices with the microwave s-parameters measurement system (U02). The report describes the measurement procedures with the network analyzer. The system must be calibrated with appropriate calibration kits before performing any measurement. The Full 2-port calibration technique are applied to calibrate the system for achieving better measuring uncertainties.



The calibration capabilities of this system are as follows.

Measurement Parameters: S11, S22, S21, S12.

Connector Type: 2.92 mm, APC 3.5, Type N

Measurement Range: 0 to 1 for S11 & S22 (Linear), -60 dB to 0 dB for S21 & S12.(Devices with higher attenuation can be measured with the system, but it is not recommended since the uncertainties are higher )

Measurement Frequency Range: 0.010 GHz to 18 GHz for Type N, 0.010 GHz to 26.5 GHz for APC 3.5, 0.045 GHz to 40 GHz for 2.92 mm.

Expanded Uncertainty: refers to the above tables.

Level of Confidence (Coverage Factor): 95 % (2).

144

Measurement System Validation Procedure for Laser Interferometric Mercury Micro-manometer

This evaluation report is presented in an effort to evaluate the Laser Interferometer Mercury Manometer for Low Pressure Standard（LIML）in the mechanical laboratory of the National Measurement Laboratory (NML). It introduces the functions of the components and system of the LIML, the principles of measurement and the analysis of errors. Finally, It described the calculation of conventional true pressure and the estimation of the uncertainty of conventional true pressure. This LIML for the model ITRI-CMS LIML1-10-2005 is attached to the low pressure measurement system, and its range is as follows, 1Pa～ 10 kPa and its expanded uncertainty is as follows. U(PHR) =0.08 Pa Calibration and measurement capability is stated as the combined standard uncertainty multiplied by the coverage factor k=2, which for a t-distribution with veff=∞ effective degrees of freedom corresponds to a level of confidence of 95%.

145

Instrument Calibration Technique of Laser Interferometric Mercury Micro-manameter

This calibration procedure provides the information for the Low Pressure Laser Interferometer Mercury Manometer to calibrate many types of pressure instruments. It describes the preliminary operation, the calibration steps and the post-calibration procedure, the data analysis and the calibration report. This system is applicable to the calibration for pressure transducers, digital gages or low pressure manometers within the range of 1 Pa to 10 kPa.

146

Measurement System Validation Procedure for Laser Interferometer Calibration system

This document describes a system for calibrating laser interferometers system and the uncertainty analysis of measurement results. The analysis follows the rules of the ISO/TEC Guide 98-3:2008. After analyzing error sources, the capability of the calibration system and the uncertainty evaluation results are as follows.
Instrument to be calibrated : laser interferometer system
Displacement Range : (0 ~ 10) m
Expanded uncertainty (test with air sensors )：
0.12 um~1.2 um。
the coverage factor k=2,which provides a confidence level of 95﹪
This document belongs to D18.

147

Instrument Calibration Technique for Laser Interferometer system

This document describes the technique for calibrating laser interferometers(LIs). A standard LI and a test LI simultaneously measure the displacement of a moving stage. The displacement range is from 0 to 10 m. Comparing the results measured by these two systems the error of the test LI is obtained.

148

Meaurement System Validation Procedure for Electronic Level

This document is a validation report for the calibration system which shall carry out electronic level measurements by a small angle generator. The effects of the influential factors on this calibration system will be considered to estimate the uncertainty according to the ISO “Guide to the Expression of Uncertainty in Measurement”. The calibration system provides the traceability and the calibration service of electronic level. This calibration system is attached to the Small Angle Calibration System (System code: D08).

149

Instrument Calibration Technique for Electronic Level

This document describes the calibration procedures for electronic level. Deviations of the angle of electronic levels are measured by small angle generator. These calibrations provided mainly focus on the range of ± 1°. This calibration system is attached to the Small Angle Calibration System (System code: D08).

150

Measurement System Validation Procedure for Anechoic Chamber Electromagnetic Field Strength Measurement System

This document introduces the uncertainty analysis method and procedure for the calibration of an electric field probe by the Anechoic Chamber Electromagnetic Field Strength Measurement System (system code: U06). The contents of this report consist of introduction of the system, principle of measurement, and the uncertainty analysis of this system.

The evaluation method of this system follows “ISO/IEC Guide 98-3:2008, Uncertainty of measurement —Part 3: Guide to the expression of uncertainty in measurement (GUM: 1995)” [7.1], which is issued by ISO. According to the evaluation method, Type A and Type B uncertainties evaluation are included. This document states the detail information about the source of system errors and the evaluation method. According to the series analysis of measurement data, the capability and expanded uncertainty of this system was stated as follows with a coverage factor (k = 2) corresponding to a level of confidence of approximately 95 %.



(1) Frequency range：0.5 GHz to 4 GHz

Maximum electric field：100 V/m

Relative expanded uncertainty：0.85 dB（0.5 GHz to 0.55 GHz）、0.76 dB（0.55 GHz to 1 GHz）、0.7 dB（1 GHz to 4 GHz）

(2) Frequency range：4 GHz to 8 GHz

Maximum electric field：200 V/m

Relative expanded uncertainty：0.7 dB

151

Measurement System Validation Procedure for Standard Capacitance - Three-Terminal Capacitor

This document is an evaluation report of standard capacitance measurement system (E15) on three-terminal capacitor with nominal value 1 pF, 10 pF, 100 pF and 1000 pF. The three-terminal capacitor is the capacitor which has two coaxial connectors. The calibration method is using a precision automated capacitance bridge to compare standard capacitors with the capacitors under calibration.

152

Measurement System Validation Procedure for Standard Capacitance - Four-Terminal-Pair and Two-Terminal Capacitors

This document is an assessment report on the four-terminal-pair and two-terminal capacitors of capacitance calibration system (E15). The calibration method is using precision automated capacitance bridge to compare standard capacitors and capacitor under calibration.

153

Analysis report on Measurement Standard Specification for Electric Vehicle Charging Station and Related Measurement Technology Development Information

This technical report proposes the development of electric vehicles in various countries, the requirements for the setting of charging stations, and related measurement standards and norms. It analyzes the technical standards of electric vehicle charging stations in China and Europe, the United States, China, South Korea, Japan and other countries (or regions), including power supply systems, Non-vehicle charger, electrical performance and safety requirements and other relevant standards and technical implications.

154

Online nanoparticle generate technology

Recently, many studies have shown that the purity of reagents used in the process directly affects the performance of device. As the demand for high-accuracy processes evolves, the quality of process reagents must be improved year by year. Once the semiconductor is contaminated by trace metal or nanoparticle during the manufacturing process, defects such as short circuit, leakage current, and pore formation will occurred and results in yield loss. Therefore, developing an accurate measurement method for nanoparticle in the test agent is highly demanded for semiconductor industry. In this study, a microdroplet generator (MDG) hyphenated with a single particle inductively coupled plasma mass spectrometry (spICP-MS) was developed. MDG was used as multielement particle standards generator, and spICP-MS is used for particle measurement. The signal intensity of a particle is proportional to its mass, and the diameter can be derived from mass and density.   Our current results demonstrate that the signal of droplet containing 29.14 mg/kg Au ions produced by MDG were comparable with the NIST SRM 8013 gold particle standard. In addition, the MDG was used for calibrate the mass of NIST SRM 8013. The diameter of NIST SRM 8013 measured by MDG-spICP-MS is 56.02 ± 2.67 nm, which is consistent with NIST certification report. Our results show that the MDG-spICP-MS not onlycan be used to verify the size of the metal nanoparticle in the solution, but   also can provide a way for multi-element particle standards preparation.

155

Instrument Calibration Technique for Pitch Standard Calibration System by Metrological AFM

This document describes the uncertainty evaluation for measuring pitch reference standard in Center for Measurement Standards. The system can currently provide the pitch calibration service from 50 nm to 25 μm.
The pitch measurement system consists of X- and Y-axis laser interferometers, precision stage and atomic force microscope (AFM). The pitch reference standard is put on the plate of precision stage and scanned by the tip of AFM. During calibration, the tip of AFM does not move laterally. The precision stage is moved by the LabVIEW program, and the pitch reference standard is then scanned by the tip. The laser interferometer would record the displacements of stage in X and Y direction, and the capacitive sensor inside the AFM would record the vertical displacement of tip.
The analysis of measurement uncertainty is based on ISO/IEC Guide 98-3:2008. The error sources are considered and evaluated. The measurement system currently provides the following capability.
Ÿ Calibration item: Line pitch standards.
Ÿ Measurement range of pitch: 50 nm to 25 μm.
Ÿ Expanded uncertainty :
nm
The expanded uncertainty of this system is :

where
P: pitch (nm)

Ÿ Confidence level: 95 ％.
Ÿ Degree of freedom : 580 (50 nm)、180 (500 nm)、29 (3000 nm)
Ÿ Coverage factor（k）: 1.97 (50 nm)、1.98 (500 nm)、2.05 (3000 nm)
Ÿ This document belongs to pitch standard calibration system (D19).

156

Measurement System Validation Procedure for Pitch Standard
Calibration system by Metrological AFM

This document describes the uncertainty evaluation for measuring pitch reference standard in National Measurement Laboratory, Taiwan. The system can currently provide the pitch calibration service from 50 nm to 25 μm. The pitch measurement system consists of X- and Y-axis laser interferometers, precision stage and atomic force microscope (AFM). The pitch reference standard is put on the plate of precision stage and scanned by the tip of AFM. During calibration, the tip of AFM does not move laterally. The precision stage is moved by the LabVIEW program, and the pitch reference standard is then scanned by the tip. The laser interferometer would record the displacements of stage in X- and Y- direction, and the capacitive sensor inside the AFM would record the vertical displacement of tip.
The analysis of measurement uncertainty is based on ISO/IEC Guide 98-3:2008. The error sources are considered and evaluated. The measurement system currently provides the following capability.

157

Measurement System Validation Procedure for Pitch Standard by Laser Diffractometer

This document describes the uncertainty evaluation for measurement of grating pitch specimens by laser diffractometer in Center for Measurement Standards. The system can currently provide the pitch calibration service from 280 nm to 10 μm. The diffractometer is composed of a He-Ne laser at 543 nm, a four- quadrant detector, a vibration isolation system, a precision rotating index table and optical lenses. The calibration is based on the diffraction principle by using Littrow configuration. The average grating is calculated by the laser wavelength and the Littrow’s angles. The analysis of measurement uncertainty is based on the ISO “Guide to the expression of uncertainty in measurement”. The error sources are considered and evaluated. The measurement system currently provides the following capability

158

Instrument Calibration Technique for Pitch Standards by Laser Diffractometer

This document describes the calibration procedures for grating pitch by laser diffractometer. The system can currently provide the pitch calibration service from 280 nm to 10 μm. The diffractometer is composed of a He-Ne laser at 543 nm, a four- quadrant detector, a vibration isolation system, a precision rotating index table and optical lenses. The calibration is based on the diffraction principle by using Littrow configuration. The average of grating pitch is calculated by the laser wavelength and the Littrow’s angles.

159

Laboratory environmental temperature impact assessment of high pressure mixed gas supply system

Gravimetric High-Pressure Cylinder Gas Mixture Supply and Certification System (C08)   newly purchased weighing equipment in 2018, and the location is Room 110 of Building 8, Kuang fu campus, and the original old weighing equipment is located in Room 218, Building 17, Kuang fu campus. There is a slight difference in the environmental temperature range between the two laboratories. The former is (20 ~ 26 °C) and the latter is (20 ~ 23 °C). The repeated weighting tests are carried out to assess effect of the environmental temperature difference between the two laboratories on the weighting results.

160

Instrument Calibration Technique for Electromagnetic Field Strength Meter by Using TEM Cell Field Strength Measurement System

This document describes the procedure to calibrate an electromagnetic field strength meter by the Electromagnetic Field Strength Measurement System (U06). A uniform electromagnetic field is generated in a TEM Cell to calibrate the electromagnetic field strength meter.

The capability and measurement uncertainty of this system are stated as follows with a coverage factor (k = 2) corresponding to a level of confidence of approximately 95 %.



Frequency Range：100 kHz to 500 MHz

Maximum Electric Field：200 V/m

Relative Expanded Uncertainty：8.4 % (0.77 dB)

161

Measurement System Validation Procedure for TEM Cell Electromagnetic Field Strength System

This document introduces the uncertainty analysis method and procedure for the calibration of an electric field probe by the Transverse Electromagnetic Transmission Cell Field Strength Measurement System (system code: U06).   The contents of this report consist of introduction of the system, principle of measurement, and the uncertainty analysis of this system.

The evaluation method of this system follows “ISO/IEC Guide 98-3:2008, Uncertainty of measurement —Part 3: Guide to the expression of uncertainty in measurement (GUM: 1995)” [7.1], which is issued by ISO. According to the evaluation method, Type A and Type B uncertainties evaluation are included. This document states the detail information about the source of system errors and the evaluation method. According to the series analysis of measurement data, the capability and expanded uncertainty of this system was stated as follows with a coverage factor (k = 2) corresponding to a level of confidence of approximately 95 %.



Frequency Range：100 kHz to 500 MHz

Maximum Electric Field：200 V/m

Relative Expanded Uncertainty：8.4 % (0.77 dB)

162

Measurement System Validation Procedure for Pressure Controller/Calibrator(DHI PPC4)

This evaluation report is to evaluate the Pressure Controller/Calibrator (PCC) in the pressure measurement laboratory of the National Measurement Laboratory (NML). It introduces the functions of the components and system of the PCC, the principles of measurement and the analysis of measurement variations. Additionally, it describes the calculation and uncertainty analysis of the calibration. This DHI PPC4 pressure controller/calibrator is attached to the mercury manometer measurement system (system code: P01). The calibration range is from 0 kPa to 700 kPa. After practical evaluation, our measurement system currently provides the following calibration and measurement capability.

(1)Absolute pressure measurement

Expanded uncertainty: 0.033 kPa

The level of confidence:95 %

Coverage factor: k = 2

(2)Gauge pressure measurement

Expanded uncertainty: 0.032 kPa

The level of confidence: 95 %

Coverage factor: k = 2

(3)CMC for sensing-only pressure instrument calibration

Expanded uncertainty: 0.034 kPa

The level of confidence: 95 %

Coverage factor: k = 2

163

Measurement System Validation Procedure for the Pressure Controller/Calibrator (FLUKE/PPC4E 7M)

This evaluation report is to evaluate the Pressure Controller/Calibrator (PCC) in the pressure measurement laboratory of the National Measurement Laboratory (NML). It introduces the functions of the components and system of the PCC, the principles of measurement and the analysis of measurement variations. Additionally, it describes the calculation and uncertainty analysis of the calibration. This FLUKE/PPC4E 7M pressure controller/calibrator is attached to the pneumatic pressure measurement system (system code: P04). The calibration range is from 0 kPa to 7000 kPa. After practical evaluation, our measurement system currently provides the following calibration and measurement capability.

(1)Absolute pressure measurement

Expanded uncertainty: 0.37 kPa

The level of confidence:95 %

Coverage factor: k = 2

(2)Gauge pressure measurement

Expanded uncertainty: 0.37 kPa

The level of confidence: 95 %

Coverage factor: k = 2

(3)CMC for digital pressure gauge calibration

Expanded uncertainty:0.39 kPa

The level of confidence: 95 %

Coverage factor: k = 2

164

Measurement System Validation Procedure for Setting Ring Gauge-Use of Labmaster Universal Measuring System

This report states about the uncertainty evaluation for the calibration of the end standard of Ring gauges with the ranges of 4 mm to 200 mm internal diameter. The calibration way is utilizing Labmaster universal measuring system to calibrate the internal diameter. First, the laser interferometer measured the 50 mm standard Ring gauge for initial condition to reset, and then measured Ring gauge to be calibrated. The measurement uncertainty evaluation in this report followed theISO/IEC Guide 98-3;2008 to provide the expanded uncertainty.

165

Instrument Calibration Technique for Setting Ring Gauge-Use of Labmaster Universal Measuring System

This report states about the calibration procedures of end standard of Ring gauges with 4 mm to 200 mm internal diameter. The calibration way is utilizing Labmaster universal measuring system to calibrate the length of internal diameter. First, the laser interferometer measured the standard Ring gauge for initial condition to reset, and then measured client's Ring gauge directly. In this document, there were five subjects about the preparations, procedures, processing after calibration finishing, data analysis, and calibration reports.

This document belongs to the D03 calibration system.

166

Instrument Calibration Technique for Thin Film Calibration by X-Ray Reflector

The Calibration Measurement Procedure describes the methods used to calibrate the thickness standard of thin films by the PANalytical X’PERT PRO MRD (system code D22) at the Nano & Mechanical Measurement Laboratory of NML (National Measurement Laboratory). The method is applied to the calibrations of thickness of SiO2, HfO2 and Al2O3 thin films.

The measurement system currently provides the following capability:

ŸSubject of calibration : thin film thickness

ŸRange of SiO2, HfO2 and Al2O3 thin film thickness calibration : 1.5 nm to 200 nm

ŸExpanded uncertainty : 0.02 nm

ŸConfidence level : 95 %

ŸCoverage factor : 2.07

ŸEffective degrees of freedom : 22

167

Instrument Calibration Technique for Thin Film Measurement System by Spectroscopic Ellipsometer

This document was designed for calibration procedure of calibrating standard thin film thickness by Spectroscopic Ellipsometer (SE). The system provided the calibration service of SiO2 thin film thickness from 1.5 nm to 1000 nm.

A Spectroscopic Ellipsometer (SE) with scanning ranges of wavelength for the spectroscopic study is from 250 nm to 850 nm is used to characterize the physical and optical properties of the thermally grown silicon dioxide thin films. The film thickness and the refractive index of a thermally grown silicon dioxide layer are extracted from the least square fit of the experimentally measured ellipsometric functions.

The uncertainty analysis of measurement results is based on ISO/IEC Guide 98-3:2008. The error sources caused by measuring the thin film specimens are considered and evaluated. After practical evaluation of thickness uncertainty, our measurement system currently provides the following capability.



ŸCalibration item：thin film thickness

ŸRange of SiO2 thin film thickness calibration：1.5 nm to 1000 nm

Expanded uncertainty：0.10 nm

ŸConfidence level：95 %

ŸCoverage factor：2

168

Measurement System Validation Procedure for Thin Film Calibration by X-Ray Reflector

The uncertainty evaluation of thin film thickness calibrations was described in this document for D22 system. The system can currently provide the calibration service of SiO2, HfO2 and Al2O3 thin film thickness from 1.5 nm to 200 nm.

A Gazing Incident X-Ray Reflector (GIXRR) was used to characterize thickness of the thin film in this system. The measurement system includes an x-ray tube, a goniometer, collimators, and a detector. An x-ray beam is incident on the surface of the thin films at grazing angle to obtain the total external reflection. Above the grazing angle, the intensity received by the detector will drop sharply. For a thin film structure, the“Kiessig Fringe,” an interference pattern generated by the layer structure, will be observed from the intensity recorded by the detector. According the fringes, the film thickness can be calculated and determined.

The uncertainty analysis of measurement results is based on ISO/IEC Guide 98-3:2008. The error sources caused by measuring the thin film specimens are considered and evaluated. The measurement system currently provides the following capability:



ŸSubject of calibration : thin film thickness

ŸRange of SiO2, HfO2 and Al2O3 thin film thickness calibration : 1.5 nm to 200 nm



ŸExpanded uncertainty : 0.02 nm

ŸConfidence level : 95 %

ŸCoverage factor : 2.07

ŸEffective degrees of freedom : 22



This document is part of thin film measurement system (D22).

169

Measurement System Validation Procedure for Thin Film Measurement System by Spectroscopic Ellipsometer

The uncertainty evaluation of thin film thickness calibration was described in this document for D22 system. The system provided the calibration service of SiO2 thin film thickness from 1.5 nm to 1000 nm.

A Spectroscopic Ellipsometer (SE) with scanning ranges of wavelength for the spectroscopic study is from 250 nm to 850 nm is used to characterize the physical and optical properties of the thermally grown silicon dioxide thin films. The film thickness and the refractive index of a thermally grown silicon dioxide layer are extracted from the least square fit of the experimentally measured ellipsometric functions.

The uncertainty analysis of measurement results is based on “ISO/IEC Guide 98-3:2008, Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995)”. The error sources caused by measuring the thin film specimens are considered and evaluated. After practical evaluation of thickness uncertainty, our measurement system currently provides the following capability.



ŸCalibration item：thin film thickness

ŸRange of SiO2 thin film thickness calibration：1.5 nm to 1000 nm

ŸExpanded uncertainty：0.10 nm

ŸConfidence level：95 %

ŸCoverage factor：2