| Calibrated Device | Roundness Standards (Sphere, hemisphere, cylinder) |
|---|---|
| Range | Diameter: ≦ φ200 mm；Roundness: 0.01 μm to 2 μm |
| Uncertainty | 20 nm |
Calibration Capability
- 【D26】Nano Particle Size Measurement System
- 【D03】End Dimensional Measurement System
- 【D19】Pitch Standards Calibration System
- 【D30】Step Gauge Calibration System
- 【D29】Coordinate Measuring Machine Calibration System
- 【D22】Thin Film Measurement System
- 【D28】Scanning Electron Microscope Measurement System
- 【D27】Nano Particle Functional Property Measurement System (Partial service will be discontinued from 2023/08/07, with approval from BSMI, MOEA.)
- 【D01】Gauge Block Calibration System - Comparator