跳到主要內容

日本東京大學精密工程系Takamasu教授受邀來台演講 歡迎踴躍報名

日本東京大學精密工程系Takamasu教授受邀來台,特別安排11/27日舉辦專題演講,簡介如下,歡迎踴躍報名

時  間:

2019年11月27日 (星期三) 10:00 - 11:05

地  點:

工研院光復院區16館223會議室; 新竹市光復路二段321號16館

講  者:

東京大學精密工程系 Prof. Kiyoshi Takamasu

講  題:

Research Projects for Nanometer Profile Measurement and Uncertainty Estimation

摘  要:     

The problem of profile measurement for a wide range of objects can be understood from the concept of scale factor. The scale factor is the ratio of the effective scale of measurement range to the measurement accuracy. In manufacturing, the scale factor deteriorates because the profile accuracy of the measurement object is poor, two- and three-dimensional profile measurement is required, and complex profiles are the object. In order to improve these problems, intelligent precision measurement methods such as measurement standards, data processing such as self-calibration, and estimation of measurement uncertainty are required. As an example of intelligent precision measurement, the following profile measurement and dimension measurement are explained.

1. Nanometer Measurement for Semiconductor Industry

2. Profile and Coordinate Measurement with Uncertainty Estimation

3. Absolute Length Measurement using Optical-Comb

聯絡地址:30011 新竹市光復路二段321號16館 Tel:03-573-2243、03-573-2244 

收/取件時間:週一至週五 上午 09:00 ~ 12:00 下午01:00 ~ 04:00 (國定及例假日除外)

主管單位:經濟部標準檢驗局  執行單位:工業技術研究院 量測技術發展中心   ©2020 NML 國家度量衡標準實驗室 All Rights Reserved.   隱私權保護政策

  • 網站最新更新日期 : 2020/03/30
文章瀏覽點擊數
9,889,509

網站無障礙規範2.0版標章圖示

Please publish modules in offcanvas position.