【C08】Gravimetric High-Pressure Cylinder Gas Mixture Supply and Certification System

(1) Binary gas mixture

(2) Multi-component gas mixture (CO + CO₂ + C₃H₈) in N₂

(3) Binary gas mixture (C₂H₅OH in N₂, H₂S in N₂)

(4) VOCs in N₂ (Benzene, Toluene, Ethylbenzene, Xylenes)

(1) CO in N₂：(0.001 to 100) mmol/mol
　  CO₂ in N₂：(0.1 to 160) mmol/mol
　  CH₄ in N₂：(0.1 to 100) mmol/mol
　  C₃H₈ in N₂：(0.1 to 50) mmol/mol
　  SF₆ in N₂：(10 to 1000) μmol/mol
　  CF₄ in N₂：(100 to 3000) μmol/mol
　  NO in N₂：(50 to 2000) μmol/mol
　  SO₂ in N₂：(50 to 2000) μmol/mol
　  O₂ in N₂：(1 to 10) μmol/mol、(1 to 14) mmol/mol
　  CH₄ in Air：(1 to 20) mmol/mol

　  N₂O in N₂：(100 to 1000) µmol/mol

(2) (CO + CO₂ + C₃H₈) in N₂

　  CO：(5 to 40) mmol/mol

　  CO₂：(50 to 160) mmol/mol

　  C₃H₈：(100 to 1600) μmol/mol

(3) C₂H₅OH in N₂：(80 to 140) µmol/mol

　   H₂S in N₂：(10 to 100) µmol/mol

(4) VOC (Benzene, Toluene, Ethylbenzene, Xylenes)   

(1) CO in N₂：0.1 % to 2.0 %
　  CO₂ in N₂：0.1 % to 1.5 %
　  CH₄ in N₂：0.1 % to 1.0 %
　  C₃H₈ in N₂：0.2 % to 1.0 %
　  SF₆ in N₂：0.2 % to 1.5 %

      CF₄ in N₂：0.1 % to 1.0 %

　  NO in N₂：0.5 % to 2.0 %
　  SO₂ in N₂：0.5 % to 1.5 %
　  O₂ in N₂：(1 to 10) μmol/mol：1.5 % to 3.0 %, (1

　  N₂O in N₂：0.5 % to 1.5 %

(2) (CO + CO₂ + C₃H₈) in N₂

　  CO：0.2 % to 0.8 %

　  CO₂：0.1 % to 0.5 %

　  C₃H₈：0.5 % to 1.0 %

(3) C₂H₅OH in N₂：2 % to 5 %

　   H₂S in N₂：1.5 % to 5.0 %

(4) VOC in N₂ (Benzene, Toluene, Ethylbenzene,