【D28】Scanning Electron Microscope Calibration System

Calibrated Device	(1) Standard Particle (2) Pitch Standard
Range	(1) Particle Size: 10 nm to 60 nm (2) Pitch: 70 nm to 1000 nm
Uncertainty	(1) 1.5 nm to 5.4 nm (2) 0.29 nm to 2.8 nm