| Calibrated Device | (1) Standard Particle (2) Pitch Standard |
|---|---|
| Range | (1) Particle Size: 10 nm to 60 nm (2) Pitch: 70 nm to 1000 nm |
| Uncertainty | (1) 1.5 nm to 5.4 nm (2) 0.29 nm to 2.9 nm |
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