| Calibrated Device | (1) Standard Particle (2) Pitch Standard |
|---|---|
| Range | (1) Particle Size: 10 nm to 60 nm (2) Pitch: 70 nm to 1000 nm |
| Uncertainty | (1) 1.5 nm to 5.4 nm (2) 0.29 nm to 2.9 nm |
Skip to main content
321 Sec. 2, Kuang Fu Rd., Hsinchu 30011, Taiwan, R.O.C. TEL: +886-3-573-2243、+886-3-573-2244 FAX: 886-3-5732357
Authorized by BSMI,MOEA Operated by CMS/ITRI ©2021 The National Measurement Laboratory (NML) All Rights Reserved.
- Last Updated:2021/02/23
- Articles View Hits
- 10,385,451
