【D28】Scanning Electron Microscope Measurement System Calibrated Device (1) Standard Particle (2) Pitch Standard Range (1) Particle Size: 10 nm to 60 nm (2) Pitch: 70 nm to 1000 nm Uncertainty (1) 1.5 nm to 5.4 nm (2) 0.29 nm to 2.9 nm Tags: 長度標準