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【D26】Nano Particle Size Measurement System

Calibrated Device 

Standard Particles (Polystyrene)

(1) Dynamic Light Scattering (DLS)

(2) Electro-gravitational Aerosol Balance (EAB)

(3) Differential Mobility Analysis (DMA)

(4) Contamination Reference Standard
Range

(1) 20 nm to 1000 nm

(2) 100 nm to 500 nm

(3) 20 nm to 500 nm

(4) 100 nm to 300 nm
Uncertainty

(1) 0.8 nm to 34 nm

(2) 3.0 nm

(3) 0.54 nm to 13 nm

(4) 100 nm to < 200 nm:8.3 nm

   200 nm to 300 nm:19 nm
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  • Last Updated:2019/10/14
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