Calibrated Device |
(1) Pitch Standard (by AFM)
(2) Pitch Standard (by Diffractometer)
(3) Line Width Standard (by AFM)
|
---|---|
Range |
(1) 50 nm to 25 µm
(2) 280 nm to 10 μm
(3) 50 nm to 1000 nm
|
Uncertainty |
(1) 0.14 nm to 2.9 nm
(2) 0.008 nm to 6.4 nm (3) 3.6 nm to 20 nm
|