| Calibrated Device |
(1) Pitch Standard (by AFM)
(2) Pitch Standard (by Diffractometer)
(3) Line Width Standard (by AFM)(Service will be discontinued from 2025/01/15, with approval from BSMI, MOEA.)
|
|---|---|
| Range |
(1) 50 nm to 5 µm
(2) 280 nm to 10 μm
(3) 50 nm to 1000 nm
|
| Uncertainty |
(1) 0.17 nm
(2) 0.008 nm to 6.4 nm (3) 3.6 nm to 20 nm
|