【D23】Precision Long Gauge Block Calibration System
Calibrated Device |
Long Gauge Block |
Range |
(1) 100 mm to 600 mm (Comparison method) (2) 100 mm to 1000 mm (Interferometry method)
|
Uncertainty |
(1) [842 + (735L)2]1/2 nm (2) [672 + (365L)2]1/2 nm
L: length of long gauge block in m |