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【D21】Step-Height Calibration System

Calibrated Device Step Height Standards
Range (1) Optical method: 0.01 µm to 100 µm
(2) Stylus method: 0.01 µm to 50 µm
Uncertainty 
(1) Optical method (h ≤ 3 µm): [32 + (1.2h)2]1/2 nm
   Optical method (h > 3 µm): [9.52 + (3.6h)2]1/2 nm
(2) Stylus method: [52 + (3.2h)2]1/2 nm
h: step height measurement value in μm
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  • Last Updated:2020/03/30
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