| Calibrated Device | Step Height Standards |
|---|---|
| Range | (1) Optical method: 0.01 µm to 100 µm (2) Stylus method: 0.01 µm to 50 µm |
| Uncertainty |
(1) Optical method (h ≤ 3 µm): [32 + (1.2h)2]1/2 nm
Optical method (h > 3 µm): [9.62 + (3.6h)2]1/2 nm (2) Stylus method: [5.02 + (3.2h)2]1/2 nm
h: step height measurement value in μm
|