| Calibrated Device | (1) Laser Interferometer (Including environmental sensor) (2) Dial Indicator Calibrator |
|---|---|
| Range | (1) Displacement: 0.1 m to 20 m，Temperature: 15 °C to 35 °C, Relative humidity: 40 % to 60 %, Pressure: 85 kPa to 105 kPa (2a) 0 mm to 15 mm (Resolution: 0.2 μm) (2b) 0 mm to 30 mm (Resolution: 0.1 μm) (2c) 0 mm to 30 mm (Resolution: 1.0 μm) (2d) 0 mm to 60 mm (Resolution: 0.1 μm) |
| Uncertainty |
(1) Displacement: 1.98 × [62 + (88L)2]1/2 nm, L in m
Temperature (Air sensor): 0.1 °C, Temperature (Material sensor): 0.1 °C, Relative humidity：1.0 %，Pressure: 16 Pa
(2a) 0.29 μm (2b) 0.50 μm
(2c) 0.76 μm
(2d) 0.92 μm
|
