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【D18】Laser Interferometer Calibration System

Calibrated Device  (1) Laser Interferometer (Including environmental sensor)
(2) Dial Indicator Calibrator
Range (1) Displacement: 0.1 m to 20 m,Temperature: 15 °C to 35 °C, Relative humidity: 40 % to 60 %, Pressure: 85 kPa to 105 kPa
(2a) 0 mm to 15 mm (Resolution: 0.2 μm)
(2b) 0 mm to 30 mm (Resolution: 0.1 μm)
(2c) 0 mm to 30 mm (Resolution: 1.0 μm)
(2d) 0 mm to 60 mm (Resolution: 0.1 μm)
Uncertainty 
(1) Displacement: [622 + (120L)2]1/2 nm, L in m
  Temperature (Air sensor): 0.1 °C, Temperature (Material sensor): 0.1 °C, Relative humidity:1.0 %,Pressure: 16 Pa
(2a) 0.34 μm
(2b) 0.46 μm
(2c) 0.73 μm
(2d) 0.81 μm
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  • Last Updated:2020/08/10
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