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Calibrated Device |
(1) PVTt Method : Sonic Nozzle, Laminar Flowmeter, Differential Pressure Flowmeter (2) Master Method: Sonic Nozzle, Thermal Mass Flowmeter, Laminar Flowmeter, Differential Pressure Flowmeter, Variable Area Flowmeter, Positive Displacement Flowmeter |
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Range | 10 cm3/min ~ 300 L/min |
Uncertainty |
(1) 0.10% (2) Volumetric Flow Rate: 0.12 % to 0.13 % |