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| Calibrated Device |
(1) PVTt Method : Sonic nozzle, Laminar flowmeter, Differential pressure flowmeter (2) Master meter method: Sonic nozzle, Thermal mass flowmeter, Laminar flowmeter, Differential pressure flowmeter, Variable area flowmeter, Positive displacement flowmeter |
|---|---|
| Range | 10 cm3/min to 300 L/min |
| Uncertainty |
(1) 0.10 %
(2) 0.11 % to 0.12 %(mass flow rate)、0.11 % to 0.13 % (volume flow rate) |