| Calibrated Device | Bulk Material, Thin Film Specimen |
|---|---|
| Range |
Displacement: 50 nm to 300 mm
Applied Force: 0.5 mN to 10 mN
|
| Uncertainty |
Indentation Hardness: 2.7 % (Relative)
Reduced Modulus: 3.1 % (Relative)
|
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