Purity Analysis of Gases

Technical Introduction

1. Trace-moisture measurement

The optical cavity ring-down spectrometer (CRDS) traceable to Trace-moisture Primary Standard of National Metrology Institute of Japan, is used to trace-moisture analysis (ppb level).

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2. FTIR analysis

Most gas molecules absorb the energy of a specific infrared light wavelength, which can be used for unknown impurity identification. FTIR can measure process gas on-site to monitor the process gas composition and concentration real-time changes.

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3. Mass spectrum analysis

Unknown impurities can be identified because different gas samples generate specific mass-to-charge ratio (m/z) ions through electron impact. With chromatography and pre-concentration systems, the impurity concentration down to sub ppb level can be analyzed.

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Application Field

With spectroscopy and mass spectrometry systems, the impurity concentration down to sub ppb level can be analyzed. The application fields include: food inspection, inspection of harmful substance residues in food raw materials, inspection of breathing gas in the cabin, etc.

Contacts

Hsin-Wang Liu, Tel:+886-3-5732938; E-mail: HWLiu@itri.org.tw

 Date posted: Aug 2022