| No. | Paper Title | Abstract | Accepted By | Issued Date |
| 1 | Uncertainty Evaluation of the Predicted Value in a Linear Calibration Curve Fitted by Repeated Observations | Regression analysis is a practical statistical technique. It is mainly used to estimate the relationship among variables and then for prediction. In metrology, the calibration curve is an application of regression analysis. The basic uncertainty evaluation of the predicted value in a linear calibration curve is described in ISO/IEC Guide 98-3:2008 Annex H.3. Focus on a linear calibration curve fitted by repeated observations, this paper will further describe how to use the analysis of variance (ANOVA) technique to select the appropriate method of uncertainty evaluation without underestimation. | NCSLI measure- The Journal of Measurement Science | 20240716 |
| 2 | Practical application of control chart update in calibration laboratory | Control chart is the most frequently used method when we monitor the stability of measurement system in laboratory, so update the control chart appropriate is importment. For this reason, this paper takes the measurement system of the power calibration laboratory as an example to demonstrate the calibration process of control chart update, that is, using F test and t test to determine whether there is a significant difference between the old and new data, and using the test results as a basis for updating the control chart. | Measurement Information (CMS/ITRI) | 20241129 |
| 3 | Practical common problems in evaluating the measurement uncertainty – the basic concepts | The measurement uncertainty is a quantitative indication of the quality to assess the validity and reliability of measurement results. It is also an important performance indicator to show the technical capability of a laboratory. This article discusses the measurement uncertainty evaluation according to ISO/IEC Guide 98-3:2008(GUM) from a practical point of view. By summarizing the basic concepts of the measurement, measurand, measurement result and measurement uncertainty, it highlights some of the mistakes that may contribute to the incomplete evaluation or inaccurate estimate in evaluating the uncertainty. It aims to help people working in calibration or testing laboratories get better acquainted with the basic concepts of measurement uncertainty evaluation and understand the evaluation procedures along with the estimation approaches. It is also intended to aid laboratories to ensure that their measurement uncertainty evaluations are implemented in compliance with the ISO/IEC 17025:2017 requirements. | Measurement Information (CMS/ITRI) | 20241129 |
| 4 | Research on Technical Specifications for Type Certification of DC Electricity Meters | Governments around the world are developing action plans to address the complex and long-term challenge of reducing carbon dioxide emissions. Consequently, technologies related to electric vehicles, electric vehicle charging stations, energy storage systems, and renewable energy systems have become globally popular industries in recent years. Among these, the electricity meters used inside electric vehicle charging piles are the basis for users to pay for electricity, and their accuracy plays a crucial role in ensuring fair transactions. This article focuses on the type certification of DC electricity meters and lists the test items of a draft technical specification for type certification that has been discussed by industry, government, and academia. This provides a basis for the Bureau of Standards, Metrology, and Inspection of the Ministry of Economic Affairs to formulate national technical specifications for type certification of DC electricity meters in the future, ensuring consistency and accuracy in measurement. | Measurement Information (CMS/ITRI) | 20240628 |
| 5 | Introduction to the production and calibration of handheld surface temperature standards | Non-contact radiation thermometers are widely used in industrial production lines, medical institutions and daily lives, and the accuracy of their measurement results has a great impact. In order to ensure the accuracy of the non-contact radiation thermometer measurement results, this article introduces the handheld surface temperature standard developed by the CMS of ITRI. The surface temperature standards provide a stable source of radiant temperature and are traceable to the National Measurement Laboratory (NML). | Measurement Information (CMS/ITRI) | 20240328 |
| 6 | Evaluation of S-Parameter/Impedance Measurement System Frequency up to 110 GHz with waveguide connector at CMS |
In this year, we are evaluating our Scatteringparameter/Impedance measurement system and extending the measurement frequencies range up to 110 GHz at CMS (Center for Measurement Standards) in Taiwan. The evaluated method of vector network analyzer (VNA) is based on metrology guide EURAMET cg-12[1]. It is shown in this paper that the WR10 waveguide connector type evaluation result of the measurement uncertainties of VAN. We have designed CCD vision position platform to ensure that the coaxial and waveguide type connector could be paralleled. | CPEM | 20240709 |
| 7 | Final report, ongoing key comparison BIPM.QM-K1, ozone at ambient level, comparison with CMS/ITRI, March 2024 | As part of the ongoing key comparison BIPM.QM-K1, a comparison has been performed between the ozone standard of Chinese Taipei maintained by the Industrial Technology Research Institute/Center for Measurement Standards (CMS/ITRI) and the common reference standard of the key comparison, maintained by the Bureau International des Poids et Mesures (BIPM). The instruments have been compared over a nominal ozone amount fraction range of 0 nmol/mol to 500 nmol/mol. | Metrologia | 20240902 |
| 8 | Assessment of the difference between PM2.5 automatic monitoring and manual detection results based on air quality monitoring network data over the years and exploration of possible causes. | This study mainly analyzes the difference between the results of PM2.5 automatic monitoring and manual detection in air quality monitoring networks over the past five years, in order to explore the impact of different measurement principles or monitoring system design on measurement results. The results can help the public and related professionals better understand the inevitable differences caused by different methods, establish acceptable errors for applying different methods to air quality monitoring, and be used for equipment acceptance, performance evaluation, and scientific education. They can also improve quality control and maintenance operations for monitoring technologies, assist in analyzing the causes of pollution, and refine monitoring techniques. The analysis of PM2.5 automatic monitoring values includes 78 fixed-type air quality monitoring stations set up by the Ministry of Environment (MoE), while manual detection data comes from 31 testing sites. These sites conduct 24-hour sampling every three days, which must be carried out by environmental testing institutions with valid licenses. When these 31 testing sites perform manual sampling, they simultaneously use automatic equipment to conduct real-time monitoring. Therefore, the results of automatic monitoring can refer to NIEA published methods or perform performance assessments through manual testing (standard methods). If following NIEA published methods, linear regression analysis will be conducted between automatic monitoring and manual detection results on a seasonal basis. If referring to UK published methods, annual monitoring data will be evaluated. Current evaluation results show that most testing sites satisfy the performance requirements of NIEA published methods during high-pollution seasons. When they do not meet the requirements, improvements can be made through appropriate HEPA zero-point tests and adjustments of automatic monitoring instruments. According to recent maintenance operations, zero-point adjustments need to be strengthened in autumn and winter, especially in the region from Changhua to New Taipei City and coastal test sites. Based on UK published methods, uncertainty assessments are conducted on historical monitoring results to establish allowable errors for monitoring results. For absolute differences between manual detection results (hereinafter referred to as self-manual differences), a daily average allowable difference of 4 μg/m3 and a monthly average allowable difference of 2 μg/m3 can be set, while seasonal or annual differences are between (1.0 to 1.5) μg/m3. In addition, this study uses image analysis to study the correlation between monitoring concentrations and environmental temperature and humidity changes at more than 70 automatic monitoring stations throughout the year, combined with wind speed and direction data at each station, to evaluate regional consistency. This result is beneficial for grouping monitoring networks and supporting suitability assessments of test stations. Current analysis results show that when high pollution occurs in Dacun, Changhua, the relative humidity in the environment is always above 80％RH. On the contrary, in Kaohsiung Xiaogang, high pollution events mainly occur under conditions where the relative humidity is less than 80 ％RH. Since 80 ％RH is the deliquescence point of related nitrate compounds, it is worth further studying the effects of multiple parameters such as particle components, particle size, and environmental temperature and humidity. This study plans to use machine learning tools to evaluate key influencing factors and understand possible reaction mechanisms. |
2024 ICAST | 20240920 |
| 9 | International Comparison Results of National Ozone Standard System | The Ministry of Environment invited NIST experts to Taiwan in March 2024, and conducted an international comparison between the Quality Assurance Laboratory’s SRP 57 system and the NIST’s transfer standard (SRP 0 system). This article will explain the relevant results of the international comparison between SRP 57 system and the NIST’s transfer standard (SRP 0 system). | 36th CIENVE | 20241116 |
| 10 | Research on Traceability of DC Power Standards | In response to the development of DC power systems, the National Measurement Laboratory (NML) has referenced advanced countries’ methods for DC power traceability. NML has designed experimental methods and process evaluations that align with the DC power traceability chain, providing a basis for the future establishment of national DC power standards. | Measurement Information (CMS/ITRI) | 20241129 |
| 11 | Wind turbine tower dynamic behavior investigation | The vibration characteristics of a wind turbine may affect the stability, performance and lifespan of the system. This research utilized both theoretical and experimental approaches to predict and investigate three dynamic behavior of wind turbines. Three finite element models —wind turbine structure, tower only model, and tower with base model—were used to calculate the wind turbine’s natural frequencies. The actual measurements were used to validation the model correctness. It is expected to use the deformation mode under different external forces, base conditions for further identify the critical factors for the structural health conditioning of the wind turbine tower. | InterNoise | 20240829 |
| 12 | The influence of geometric parameters of microphone arrays and incident sound waves on sound source localization | The application of microphone arrays in sound source localization technology involves using multiple microphones to simultaneously collect sound signals. By analyzing the arrival times and phase differences of these sound waves, precise localization of the sound source can be achieved. This paper provides a brief introduction to the basic principles of microphone arrays and explores the impact of various parameters on the accuracy of sound source localization, including the size of the microphone array, microphone spacing, the number of microphones, and the frequency of the sound source. | Measurement Information (CMS/ITRI) | 20240301 |
| 13 | Comparison report of the ITS-90 realization at the freezing point of silver between NIM and CMS | Due to the highest temperature of previous comparison activities held by APMP only reached freezing point of aluminum (660.323 ℃), the approved CMC capability of high temperature for NML/CMS is limited to aluminum fixed point but cannot up to the freezing point of silver (961.78 ℃). On the contrary, because NIM can participate in the silver fixed-point comparison organized by CCT, and already had the approved Ag CMC with not-high uncertainty, NIM was invited by CMS while both participating in APMP activities to conduct a bilateral comparison of silver fixed-point. At that time, NIM requested that the protocol required for comparison be written by CMS, and the comparison artifacts were also prepared by CMS, and however, NIM itself had to be as the comparison pilot. In order to apply for CMC, CMS accepted their conditions and carried out bilateral comparison measurements. After several questions from the CCT reviewers and responses or revisions from the author, the comparison report of silver freezing point was finally approved by CCT. | Metrologia | 20240125 |
| 14 | The Study on the Application of a Self-calibrating Temperature Sensor for In-situ Thermometry Calibration in the Spindle | The machine tool industry is one of major machinery and equipment manufacturing exports in Taiwan. From 2019 to 2023, the average annual export value of my country’s machine tool industry reached NT＄87.3 billion [1]. During machine tool cutting processes, about 40 ％ to 70 ％ of machining error is caused by thermal deformation [2]. Therefore, how to instantly master the temperature accuracy related to thermal displacement compensation has become one of the keys to ensuring the required precision. Currently, there is a lack of in-situ calibration solutions for temperature sensors in machine tools, and it is difficult to control quality due to temperature drift during processing. Quality inspection requires shutting down, disassembling, and sending to a calibration laboratory, which can take up to 12 days in total. This research will use the technique of miniature fixed-point cells to develop the self-calibrating temperature sensor that can meet the needs of in-situ temperature calibration of machine tools, realize a new way to transfer temperature standard, and improve the cost and required time of calibration for manufacturers or users. | Journal of the Mechatronic Industry | 20241001 |
| 15 | dual-axis rotary table design and assemblely precision analysis | In this paper, analyzes and design the assembly quality of a dual-axis rotary table with a roller cam mechanism. First, a rigid body is used to perform the inverse synthesis of the roller cam profile, and then differential geometry is employed to analyze the pressure angle and radius of curvature of the cam. Vector projection method is utilized for force analysis of the roller cam, including normal force, tangential force between the cam and roller, radial force and axial force, etc. The size of rollers is selected based on the normal force and contact stress analysis of the cam is calculated. The required torque and power of the cam are determined from the tangential force. Two roller cams with different reduction ratios are constructed to build a dual-axis rotary table, and spatial geometry is used to input 14 assembly quality parameters including three base structure lock points, four B-axis, four C-axis and three claw design dimensions and their assembly errors, so as to complete the assembly quality analysis of the dual-axis rotary table. | CSME 2024 | 20241115 |
| 16 | Construction of outdoor intelligent smoke concentration judgment system | In order to strengthen emission control from stationary pollution sources, the Ministry of Environment, in addition to establishing continuous automatic monitoring facilities at large stationary pollution sources, also uses visual smoke detection to determine whether emissions from small factories exceed emission standards. The current visual judgment of smoke uses the Ringelmann smoke concentration chart as a reference standard, and inspectors make subjective judgments visually. Due to uncertain factors such as environmental variability and subjective judgment, which affect the stability and accuracy of judgment, a more scientific and standardized identification tool is urgently needed. To this end, this research develops an outdoor intelligent smoke concentration determination system in order to scientifically and instantly determine the emission status of factory chimneys. The system includes the construction of hardware equipment for real-time weather and shooting tools, meteorological background analysis, and convolutional neural network construction. Built-in intelligent smoke trap mode and opacity calculation module. The error between the indoor opacity correction system built in this study and the color measurement system of the National Weights and Measures Standards Laboratory is only 3.33％. In terms of opacity measurement, the system hardware equipment developed in this study is consistent with The error of the indoor opacity correction system is only 5.1％, and the accuracy of the smart smoke circle is as high as 96％, and the most important thing is that the error result of the opacity of black smoke is less than 15％, while the error of white smoke is opaque Although the error of light rate is on the high side, this study has found out the reason, which can be used as a reference for correcting the opacity of white smoke in the future. Finally, the real-time weather and shooting tool hardware, intelligent smoke trap technology, and black smoke opacity calculation module constructed by this research are expected to be provided to local governments as tools for technological law enforcement. |
Annual Report, NERA | 20240329 |
| 17 | EUV metrology and Measurement Uncertainties | To support the development of advanced EUV lithography for the semiconductor industry in Taiwan, an EUV calibration system for photodiodes’ spectral responsivity was established by the National Measurement Laboratory (NML). This EUV spectral responsivity calibration system is the first radiometric calibration system in the EUV region in Taiwan. This system utilizes the EUV radiation generated from synchrotron radiation light source provided by the National Synchrotron Radiation Research Center (NSRRC). Some calibration procedures have been tested and compared. And strategies to reduce measurement uncertainties were also studied. In this article, the EUV spectral calibration system will be introduced, including the calibration principles, metrological traceability, and uncertainty evaluation details. Through the establishment of metrology standard, local foundries could tune the exposure parameters of an EUV exposure machine with more certain knowledge, and thus could simplify the dose calibration processes and save energy consumption. | Instruments Today | 20240930 |
| 18 | High Transmittance Haze Pilot Comparison-ASTM D1003/ISO 14782/Double Compensation | National Measurement Laboratory (NML) conducted a pilot study on high transmittance haze (TH) measurement from 2017 to 2022, comparing TH samples in APMP. In this comparison, high TH is defined as samples with TH ＞ 40％. Haze samples within this range are not applicable to the existing common standards - ISO 14782 and ASTM D1003. This paper discusses the errors and correction methods of ASTM D1003 for high TH samples based on comparison data. Additionally, the ISO 14782 method yields data closer to theoretical values. The double compensation method, developed by the Measurement Center of the Industrial Technology Research Institute (ITRI), like ISO 14782, should produce data close to theoretical values. Experimental results show the greatest difference at a TH level of approximately 70％, with the double compensation method showing 0.89％ and ISO 14782 showing 0.80％, while the expanded uncertainty between laboratories ranges from 0.68％ to 0.70％, with En values less than 1. The comparison results indicate that the measurement errors with this method are within the uncertainty range. | Measurement Information (CMS/ITRI) | 20240301 |
| 19 | Current Progress of EUV Spectral Responsivity Calibration for EUV Lithography at CMS/ITRI | To support the development of advanced EUV lithography for the semiconductor industry in Taiwan, a calibration system for photodiodes’ spectral responsivity was established. The current system utilizes the synchrotron radiation light source and the method is traceable to PTB, Germany. The wavelength range is from 10 nm to 15 nm, including the most often used 13.5 nm. Several techniques were studied to compensate for light source fluctuation and to reduce the measurement uncertainty. The relative expanded uncertainty of the spectral responsivity calibration at 13.5 nm is 4.6 ％ (k=2). A wafer-type EUV radiant power meter designed to be used in EUV lithography chambers is being developed. Our goal is to develop simple and reliable methods for on-site EUV optical power measurement and dose estimation. | Journal of Physics: Conference Series | 20241025 |
| 20 | APMP Pilot Study on High Transmittance Haze | This article presents the results of the Asia Pacific Metrology Programme (APMP) pilot comparison on high transmittance haze (TH), specifically TH ＞40 ％. Various methods, including ASTM D1003, ISO 14782, the double beam method, and the double compensation method were employed. The results revealed that ASTM D1003 is still influenced by failure to compensate for sphere throughput, even in high TH artefacts. In contrast, the other methods exhibit good consistency, as expected. This article also analyses the total transmittance (TT) and diffuse transmittance (DT) obtained using the double compensation method, theoretically capable of determining accurate TT, DT, and TH, discussing the possibility of inconsistency in the reflectance between the sphere wall and the white plate affecting the agreement. |
Journal of Physics：Conference Series | 20241025 |
| 21 | Indoor Direct Comparison between High-Accuracy Pyrheliometer and Room Temperature Absolute Radiometer | This article proposes a practicable indoor method by directly comparing the pyrheliometer with the room temperature absolute radiometer (RTAR) to overcome the inconvenience of outdoor pyrheliometer calibration caused by the limitation of weather conditions. The RTAR serves as the primary standard for radiant power, irradiance, illuminance, and candela at the Center for Measurement Standards/ITRI. Given that the RTAR and pyrheliometer exhibit different sensitivity curves, the key to a successful comparison lies in designing an incident beam that enables both the RTAR and pyrheliometer to operate within their respective uniform sensitivity regions. While the indoor incident beam’s irradiance is considerably lower than solar radiation, the comparison results demonstrate a quite well measurement consistence between the RTAR and the pyrheliometer. As the indoor method is insusceptible to weather, the complex data acquisition procedures for the outdoor method can be simplified due to the stable incident beam indoors. Despite current documentary standards recommending outdoor calibration and comparison for pyrheliometer, the indoor method presented in this article can serve as a supplementary approach for assessing the accuracy of pyrheliometers during the intervals between two calibration or comparison events. |
Journal of Physics：Conference Series | 20241025 |
| 22 | Traceability of radiant flux standard | Radiant flux is the sum of the power of light beams emitted by a light source in all directions, and is an important parameter in various optoelectronic industries. Whether it is the LED industry, UV-C LED, VCSEL or Micro-LED industry, the mastery of key light radiation parameters is related to product development and process reliability. Among them, radiation flux (W) is an important parameter, so radiation flux standard traceability is an important cornerstone for application manufacturers. This article explains the traceability of radiant flux standards and the traceability method of detector response standards. | Measurement Information (CMS/ITRI) | 20241129 |
| 23 | Plastic particles on the move: Do we really understand their aerial adventures? | Due to the unique properties of plastics, such as high stability, low conductivity as well as density and durability, it is widely used. According to literatures, plastic waste naturally degrades into microplastics (size ? 5 mm) and nanoplastics (size ? 1 μm), known as plastic particles. The potential environmental and human health risks associated with plastic particles has been reported. Moreover, plastic particles are also carriers of biological and chemical contaminants which may be harmful once released into the environment. Plastic particles, due to their small size and low density, are easily spread through wind or water streams upon entering the environment. Once released, these particles exhibit high mobility in both water and soil. Various environmental factors influence their mobility and stability, potentially leading to the formation of homogeneous aggregates with particles of different materials or heterogeneous aggregates with substances of varying aqueous nature in the mobile phase.Recent findings indicate that plastic particles within the size range of 100-1000 nm can be transported across vast distances, spanning half of the Earth, through atmospheric pathways. Particles detach from surfaces and enter the air stream, like smoke particles redistributed through ventilation. Plastic particles in the atmosphere face gravity, adhesion, aerodynamic drag, and lift. Adhesion, notably strong for microspheres under 50 μm, surpasses gravity by over 100 times. Few experiments systematically explore the effects of particle size, substrate adhesion, air flow rate, and collection conditions on small plastic particles. In this work, we deposited plastic particles on silicon wafers to study the distribution of plastic particles under nitrogen gas stream. This exploration aimed to enhance our understanding of how wind influences the spatial disposition of plastic particles. Furthermore, we found silicon wafer is an excellent substrate to study the transportation of plastic particles. |
Chemistry National Meeting | 20240331 |
| 24 | Parameters optimization of single particle inductively coupled plasma mass spectrometry for microplastics analysis | After weathering in the environment, plastics undergo aging, leading to the generation of numerous microplastic and nanoplastic particles. These plastic particles have been found in seawater, freshwater, soil, and air. Due to their larger surface area, these particles increase the adsorption of pollutants. Therefore, it is necessary to develop analytical methods capable of analyzing and quantifying microplastics and nanoplastics to study their transportation, metabolism, and reactions in the environment. Single particle inductively coupled plasma mass spectrometry (spICP-MS) is an emerging measurement technique that can rapidly analyze nanoparticles and microparticles, providing information on number concentration, mass, and size distribution. The principle of spICP-MS involves diluting the particle suspension to an extremely low concentration before introducing it into the instrument, minimizing the likelihood of multiple particles simultaneously reaching the plasma. The plasma atomizes and ionizes the particles’ components, and the mass spectrometer uses the mass-to-charge ratio (m/z) to select target ions. The particle number is then calculated based on the ion pulse signal. This study employs spICP-MS to measure plastic micro- and nanoparticles. Since carbon is ubiquitous in the natural environment, the analytical process must overcome high background signals from carbon. This study optimizes system parameters, including plasma sampling depth and makeup gas, to reduce carbon background signals. Experimental results show that with a sampling depth of 5 mm and a makeup gas flow rate of 0.25 L/min, polystyrene spheres ranging from 0.6 μm to 5 μm can be successfully measured. |
Taiwan Society for Mass Spectrometry | 20240626 |
| 25 | Analysis of non-volatile residues in mixed-component organic solutions using differential mobility analyzer-condensation particle counter (DMA-CPC) | The semiconductor industry has consistently been reducing device sizes, incorporating intricate layouts, and utilizing diverse materials. This trend necessitates concurrent enhancements in the quality of ultrapure reagents. Increasing demands for detecting ultra-trace impurities in reagents have also raised expectations for more advanced performance of analytical instruments. Non-volatile residues (NVRs) can be used as an alternative for the fast identification of contamination in ultrapure reagents. NVRs consist of dissolved inorganic materials (cations and anions), particles, and high-boiling-point organics, other than the solvent itself. NVR detection provides an immediate indicator of contamination. In this study, NVRs in mixed-component organic solutions were analyzed using a differential mobility analyzer-condensation particle counter (DMA-CPC). The NVRs measurement through the DMA-CPC works by forming aerosols of the liquid through a nebulizer, evaporating the liquid in the aerosols, and measuring the size and number of particles in aerosols. Several studies have demonstrated the capability of DMA-CPC to characterize impurities in a solvent or those released from storage bottles. However, most of researches tended to focus on the analysis of individual low-boiling-point solvents, such as ultrapure water, methanol, and isopropyl alcohol. Due to the complexity of mixed-component organic solutions, which may include solvent components with higher boiling points (＞300°C), the direct analysis of NVRs within these solutions has recently proven challenging for the semiconductor field. Therefore, we developed a measurement method to effectively remove solvent components and successfully detect the NVRs for organic solutions. Several experimental parameters including flow rates of the nebulizer, temperatures of the heating device, flow rates of DMA, etc., were tuned and tested. With these optimized parameters and system configuration, we successfully differentiated the quality levels of impurities among various batches of organic solutions. This method has proven advantageous for the semiconductor industry to improve the product yields. |
Chemistry National Meeting | 20240330 |
| 26 | Development and performance evaluation of a collection system for particle impurities in semiconductor solvents | This study developed an electrostatic particle collector to gather particles within IPA for subsequent compositional analysis experiments. The principle of the electrostatic particle collector relies on electrostatic adsorption, where charged particles entering the collection chamber are attracted and collected on the substrate surface by applying high voltage to the substrate carrier. The experimental procedure involves generating standard nanoparticle aerosols using a nebulizer, sizing charged nanoparticles of specific dimensions through a Differential Mobility Analyzer (DMA), and then collecting particles on the wafer surface using the electrostatic particle collector. A Condensation Particle Counter (CPC) is connected downstream of the particle collector to confirm particle collection status. The experiment consists of two parts: firstly, investigating the effect of sample concentration on the efficiency of the electrostatic particle collector under fixed collection time by adding different concentrations of polystyrene sphere standard samples. Secondly, conducting small nanoparticle collection tests using IPA with added 10 nm gold standard particles and analyzing their composition using Inductively Coupled Plasma Mass Spectrometry (ICP-MS). Additionally, the study further employs Scanning Electron Microscopy (SEM) to confirm the morphology of standard nanoparticle collection on the wafer surface. |
Conference on Environmental Analysis | 20240502 |
| 27 | Development of method for collecting nanoparticles using impinger | In response to the rapid advancement in research and processing in the semiconductor industry, there is an urgent need for significant progress in existing defect detection and contamination monitoring technologies. As key defect scales are reduced to the nanometer level, airborne particles, gas molecules, and impurities in etching/cleaning solutions in the process environment, including particles and ions, can cause surface defects on wafers, thereby affecting the quality of semiconductor devices. Therefore, detecting impurities in the process environment, solutions, and solvents can effectively identify the sources of surface defects on wafers at the front end of the process and save costs in manufacturing defective components. This study aims to measure the size of nanoparticles and conduct component analysis by developing an impinger for collecting aerosol nanoparticles and evaluating its collection efficiency. The experimental setup includes an atomizer to atomize liquid samples, a neutralizer to charge aerosol particles, a Differential Mobility Analyzer (DMA) to size-select aerosols by applying voltage, an impinger filled with Ultrapure Water (UPW) to collect aerosol nanoparticles, and an Ion Chromatography (IC) to analyze the inorganic anion components of collected samples. The collection efficiency of the impinger is calculated by measuring the number concentration of nanoparticles of specific sizes using DMA coupled with a Condensation Particle Counter (CPC), calculating the number of nanoparticles collected over a specific time, and the corresponding anion concentration. The collected anion concentration in the solution is measured using Ion Chromatography, and the collection efficiency of the impinger is expressed as (actual concentration / ideal concentration) * 100％. In this study, an impinger was used to collect sodium chloride nanoparticles with diameters of 10 nm, 60 nm, and 100 nm. The chloride ion concentrations in the solutions of 10 nm, 60 nm, and 100 nm sodium chloride particles were 21.82 ± 1.00 ng ·kg-1, 41.26 ± 3.21 ng ·kg-1, and 200.93 ± 16.78 ng ·kg-1, respectively. The collection efficiencies were 21.8％, 4.1％, and 13.4％, respectively. The experimental results confirm the developed impinger’s capability to collect nanoparticles and analyze inorganic anion components in real-time. This technology will be applicable for real-time monitoring of impurities and contaminants in environmental or semiconductor industry settings. |
Conference on Environmental Analysis | 20240502 |
| 28 | Trace Pollutant Detection Technologies and Applications in Gases | This report will focus on trace pollutant detection technologies in gases, and explore their application in AMC (Airborne Molecular Contamination) detection within semiconductor fabs. First, we will analyze the potential causes of process defects due to acidic, alkaline, and organic gases. Next, we will introduce the principles behind new detection methods for ＜100 nm nanoparticles and ＜100 ppt gas impurities, and look ahead to potential future application scenarios. | Taiwan Cleaning Technology Association | 20240627 |
| 29 | Label-free SERS method with size-matched selectivity for analytes of varying sizes | Label-free Surface-enhanced Raman spectroscopy (SERS) methods have great potential for detecting analytes of various sizes and dimensions with high sensitivity and selectivity. To mitigate the impact of interfering substances, SERS-active substrates with size-matched selectivity were designed by coating Au nanoparticles (Au NPs) on ZrO2 multilayer nanofibers (Au NPs/fZrO2) and referencing with Au NPs embedded on ZrO2 nanobowl (Au NPs/pZrO2). The detection efficiency study covered four small pesticide molecules, two live SARS-CoV-2 virus variants (Alpha and Delta), and three interfering substances. The results demonstrate that the fibrous structure of Au NPs/fZrO2 could effectively wet the sample and detect larger target molecules, such as live SARS-CoV-2 virus, thus improving efficiency by reducing unwanted molecules in the SERS signal. This substrate also showed high discrimination between Alpha and Delta variants. Au NPs/fZrO2 demonstrated similar trace detection capabilities to Au NPs/pZrO2 for pesticide molecules and virus variants; however, it particularly exhibited stronger peak intensities and more unique SERS peaks assigned to the variants. Thus, differences in substrate morphology affect the generation of hotspots and the distance between analyte and hotspots. These findings hold promise for the development of SERS-based label-free analytical method for trace detection of a variety of virus particles. | Surfaces and Interfaces | 20240131 |
| 30 | Analysis of chemical mechanical polishing slurries using electrospray-differential mobility analyzer-condensation particle counter, dynamic light scattering and AF4 | Chemical mechanical planarization (CMP) is a polishing process to remove surface materials on wafers, which has been widely used in the recent semiconductor industry. Generally, slurries used in CMP for planarization are composed of silica-based and ceria-based abrasive particles, an oxidizer, and organic compounds in deionized water. The particle size distribution of slurries is a critical factor in the CMP process. Larger particles or agglomerates of smaller particles can cause scratching defects on the wafer. Dynamic light scattering (DLS) and scanning mobility particle sizer (SMPS) are commonly used for measuring the slurry abrasive size. For SMPS, particles in liquid are first transformed into aerosols through a nebulizer, then enter into a differential mobility analyzer (DMA) to be charged by a charger and classified according to the electrical mobility, with only particles of specific mobility exiting through the output slit. These particles are then introduced into a condensation particle counter (CPC) to determine both number and size distribution. Due to the fact that the surfactants existing in slurry solutions would cause the non-volatile residue shell coating on the particle surface and lead to inaccurate particle size distribution, we utilized an electrospray (ES) nebulizer because of its smaller droplet size (several hundred nanometers). In this study, two pretreatment methods (dilution and pH adjustment) were attempted to improve dispersion stability, and the effect of pretreatments on PSD were also examined. For comparison of different instruments, a DLS, ES-DMA-CPC and asymmetrical flow field-flow fractionation (AF4) were used to measure the particle size distribution (PSD) of some commercial silica-based CMP slurry abrasives. |
The Asian Aerosol Conference | 20241104 |
| 31 | Gas Metrology Application in Gas Sensor Performance Evaluation by CMS/ITRI. | PM2.5 and gas sensors have been widely deployed to monitoring air quality. In order to assure data accuracy of the sensors, CMS/ITRI applies gas metrology to the performance evaluation of PM2.5 and gas sensors. | APMP/TCQM GAWG Workshop | 20240723 |
| 32 | Verifying Uncertainty Analyses and International Equivalence of Low-Pressure Gas Flow Primary Standards in CMS | To verify the declared CMC uncertainty, measurement equivalence between primary standards in CMS/ITRI, and international equivalence of measurement values, CMS participated in CIPM CCM-WGFF and APMP RMO key comparisons, and also carried out intra-comparisons from 2017 to 2023. Primary standards in CMS include a bell prover, a pressure, volume, temperature, and time (PVTt) system with three collection tanks of different volume, a traditional piston prover (PP-1), and an advanced piston prover (PP-2). By uncertainty analyses, the declared CMC uncertainties of the bell prover, the PVTt system, PP-1 and PP-2 are 0.10 ％, 0.10 ％, 0.11 ％ and 0.09 ％, respectively. The bell prover participated in the key comparisons of CCM.FF-K6.2011 and APMP.M.FF-K6.2018, and PP-1 was the test facility in key comparison CCM.FF-K6.2017, which was piloted by CMS. Within the flow rate range between 25 L/min and 300 L/min of dry air, the measurement results of the bell prover and the PVTt-500L system were compared. Then, ︱En︱, a statistical quantity representing the degree of equivalence between two standards, between the bell prover and the PVTt-500L system was calculated to be less than 0.58. At lower flow rates of 0.01 L/min to 10 L/min of nitrogen, the measurement results of PVTt-35L/2L system and PP-1 were compared, and ︱En︱ was less than 0.59. In addition, from flow rates of 0.01 L/min to 10 L/min of nitrogen, the results of PP-1 and PP-2 were compared, and ︱En︱ was less than 0.52. Furthermore, linked to the comparison results of CCM.FF-K6.2017, degrees of equivalence to KCRV (︱En,KCRV︱) of PVTt-35L/2L system and PP-2 are less than 0.61 and 0.55, respectively. In conclusion, the research shows that all ︱En︱ values are smaller than 1, verifying the evaluation of declared CMC uncertainty, the equivalence between primary standards in CMS and the international equivalence of these standards. |
IMEKO 2024 XXIV World Congress | 20240828 |
| 33 | INVESTIGATION OF ELECTRONIC WATER METER PERFORMANCE TESTING AND DESIGN OF A NOVEL WATER METER LABORATORY | To meet the demands of smart cities and energy management, household utility meters have transitioned from mechanical to electronic forms. The new international standards for water meters, OIML R49 and ISO 4064, include requirements for the metrology and electronic performance testing of electronic water meters. The Bureau of Standards, Metrology and Inspection (BSMI) of Taiwan commissioned the Center for Measurement Standards/ Industrial Technology Research Institute (CMS/ITRI) to conduct research on the performance testing of electronic water meters based on these international standards. This research includes using CFD simulations to analyses the variations in flow profile caused by different flow disturbance generator and conducting practical tests to verify their impact on various types of water meters. Additionally, we also studies on the power supply effects of power surges and power bursts were carried out. Then, based on this experience, the real-flow test system was planned and constructed to comply with OIML R49 requirements. The test system were began construction in 2024 and will expected to conduct water meter type approval tests by 2027. | IMEKO 2024 XXIV World Congress | 20240827 |
| 34 | Technology of Spindle Condition Monitoring-spindle Bearing Preload Measurement |
This article is to develop a force sensor that can be used for spindle preload measurement, to directly measure the spindle bearing preload, and to provide spindle manufacturers, machine tool manufacturers, and end users of machine tools with an effective tool for judging preload abnormalities. By improving the outer ring gasket of the spindle bearing and adding a force sensing element, the goal of preload force measurement is achieved, and it is finally integrated into the commercial spindle. This article will introduce in detail the sensor structure, force measurement range, force measurement resolution verification, and sensor performance. |
Journal of the Mechatronic Industry | 20241014 |
| 35 | A Minimal System for Dissemination and Realization of the Kilogram via the XRCD Method at CMS/ITRI | The Center for Measurement Standards, Industrial Technology Research Institute in Taiwan (CMS/ITRI) has established a minimal system for realizing the new kilogram definition via the X-ray crystal density (XRCD) method. The minimal system comprises a 28Si-enriched sphere and a combined X-ray fluorescence (XRF)/X-ray photoelectron spectroscopy (XPS) surface-analysis system. This paper gives a detailed procedure for determining the mass of our 28Si-enriched sphere (Si28kg03a) and the associated uncertainty, as well as the mass comparison between the Si-sphere and our national platinum-iridium kilogram prototype No. 78 through a vacuum mass comparator and a set of sorption artefacts. The mass of the Si-sphere was determined to be 1000.078400(36) g with a relative standard uncertainty of 3.6 × 10^?8. | IEEE Transactions on Instrumentation and Measurement | 20240902 |
| 36 | Utilizing Preload Force Sensors for Spindle Condition Monitoring | During spindle assembly, a certain preload must be applied to the bearings to ensure the rigidity of the spindle. This preload exerts a force on the bearings, and the spacers between the bearings also bear the same force. This study modifies the structure of the spacers by attaching strain gauges at specific locations on the spacers to measure their deformation, thereby determining the preload applied to the bearings. This technology has successfully developed a preload force sensor for spindle bearings, with a verified measurement range of up to 10 kN and a measurement resolution of 10 N. |
CSME 2024 | 20241115 |
| 37 | Measuring Parametric and Volumetric Errors in a Four-Axis CMM Using a Hole Plate | Recently, a four-axis coordinate measuring machine (four-axis CMM), which consists of three linear axes and a single rotary axis, has been more widely used than a traditional three-axis CMM. The volumetric error influences the accuracy of the four-axis CMM. There are 27 parametric errors that contribute to the volumetric error. This study utilized a touch probe to measure the hole plate. This methodology can evaluate errors more accurately and reflect the operational conditions of the machines. The main procedures are as follows: (1) The hole plate was sequentially set up in three different planes. The touch probe was used to measure the hole plate using five different styluses. (2) The 27 parametric errors were analyzed using the coordinate deviations. The volumetric error was constructed using homogeneous transformation matrices. The volumetric error ranged from 0.35 to 1.55 μm without the single rotary axis and from 0.35 to 2.83 μm with the single rotary axis. (3) Three metrology instruments, namely a laser interferometer, an autocollimator, and a polygon-autocollimator, were used to validate the proposed methodology and verify the measured parametric errors. The absolute maximum differences compared to the laser interferometer for three parametric positioning errors and the autocollimator for six parametric rotational errors for the three linear axes were 0.56 μm and 0.54〃, respectively. Additionally, the absolute maximum difference of one parametric positioning error for the single rotary axis, compared with the polygon-autocollimator, was 0.75〃. The En-values were 0.27, 0.54, and 0.27, respectively. These results demonstrate the effectiveness and reliability of the proposed methodology for the industry’s four-axis CMMs. | International Journal of Precision Engineering and Manufacturing | 20240120 |