| No. | Paper Title | Abstract | Accepted By | Issued Date |
| 1 | Research on of Frequency-Modulated Continuous Wave (FMCW) Radar Speedometer | A study by the IIHS found that for every 5 mph increase in speed, there’s a 4％ increase in the fatality rate of accidents. Speed affects reaction distance and impact force, with higher speeds leading to longer reaction distances and greater kinetic energy upon impact, resulting in more severe injuries and higher chances of fatalities. To deter speeding and prevent accidents, radar speedometers are deployed on roads. As radar technology advances, from single-frequency to frequency-modulated continuous wave (FMCW), this project aims to evaluate domestic inspection units’ technical capabilities in calibrating FMCW radar speedometers and draft regulations to ensure fair law enforcement and public trust in speed enforcement equipment. | Measurement Information (CMS/ITRI) | 20250227 |
| 2 | Principles and Standards of Wireless Charging Stations for Electric Vehicles | With the growing global emphasis on environmental protection and sustainable transport, electric vehicles (EV) have become a major trend in the future of mobility. However, the development of charging infrastructure still faces many challenges, including high installation costs, space limitations, and issues of user convenience. In this context, wireless charging stations have emerged as an innovative solution that is gradually entering the global market and demonstrating significant potential. Wireless charging technology not only enhances the convenience of EV charging and reduces wear and safety risks associated with physical plug-in connections but also redefines the vision of future charging methods. As the technology continues to mature and standards become more established, wireless charging is expected to play a crucial role in the advancement of smart transportation and green energy systems. | Measurement Information (CMS/ITRI) | 20251128 |
| 3 | COMPARATIVE STUDY OF EN 1793-5, ASTM C423, AND ASTM E1050 ON ACOUSTIC ABSORPTION PERFORMANCE EVALUATION | The sound absorption coefficient (α) is a critical parameter for evaluating the acoustic performance of materials. However, the absorption coefficient results are varied significantly depending on the testing methods and standards employed. Currently, widely adopted international standards for measuring sound absorption coefficients, different method with distinct measurement conditions, equipment configurations, and data processing method yields different result. This study aims to conduct a comparative analysis of sound absorption coefficients measured by three standard measurements—EN 1793-5, ASTM C423, and ASTM E1050—on two materials. By exploring the similarities and differences in results across these methods, the research aims to provide valuable insights for future practical applications. | 31st International Congress on Sound and Vibration | 20250709 |
| 4 | Comparative Study of EN 1793-5, ASTM C423, and ASTM E1050 on Acoustic Absorption Performance Evaluation | The sound absorption coefficient (α) is a critical parameter for evaluating the acoustic performance of materials. However, the measuring absorption coefficient measuring results are vary significantly depending on the testing methods and standards employed. Currently, widely adopted international standards for measuring sound absorption coefficients include ISO and ASTM, each with distinct measurement conditions, equipment configurations, and data processing methods. These discrepancies affect the accurate assessment of material performance, the materials selection, and the practical applications. This study aims to conduct a comparative analysis of sound absorption coefficients measured by three standard measurements—EN 1793-5, ASTM C423, and ASTM E1050—on two materials. By exploring the similarities and differences in results across these methods, the research aims to provide valuable insights for future practical applications. | The 32nd National Coference on Sound and Vibration | 20250627 |
| 5 | Report on Key Comparison APMP.AUV.A-K5 (final report) | This is the final report for key comparison APMP.AUV.A-K5 on the pressure calibration of laboratory standard microphones in the frequency range from 2 Hz to 10 kHz. Eight laboratories took part in the comparison. Two travelling standard microphones were circulated to the participants and results in calibration certificates were collected. The analysis was based on the results for microphone sensitivity level and sensitivity phase, which were linked to the key comparison reference value (KCRV) of CCAUV.A-K5 via three linking laboratories (NIM, KRISS, NMIJ/AIST). | Metrologia | 20250630 |
| 6 | UNCERNTAINTY EVALUATION OF PRIMARY DEW/FROST POINT GENERATOR BETWEEN -50 °C TO 10 °C AT CMS | Low dew/frost point measurements are essential for various industrial applications, including gas metrology, semiconductor manufacturing, and environmental monitoring. Accurate and traceable measurements in this range are necessary to ensure consistency and reliability in industrial processes. In response to the need for traceable calibration, the CMS low dew/frost point measurement system has been established to provide calibration capabilities in the range of 10°C to -50°C dew/frost point. This study presents an uncertainty evaluation of the CMS low dew/frost point measurement system, following the Guide to the Expression of Uncertainty in Measurement (GUM) methodology. The uncertainty budget includes contributions from the uncertainty of the saturation temperature, the uncertainty of the saturation pressure and test pressure, and the uncertainty related to the saturation efficiency of the generator, among other factors. The evaluation provides a comprehensive analysis of the measurement system’s reliability and its potential sources of uncertainty. The results indicate that the expanded uncertainty (?? = 2.0) ranges from 0.052 °C to 0.12 °C across the measurement range. To establish traceability in low dew/frost point measurements for domestic industries, this study develops measurement techniques and evaluates uncertainty. This work extends the existing traceability chain to include low dew/frost point measurements in national humidity metrology, helping to fill the gap in traceability for this measurement range. |
TEMPMEKO | 20251020 |
| 7 | Long short-term memory model for predicting the angle-dependent reflectance distributions for glossy and matte surfaces | This study introduces an innovative recurrent neural network called long short-term memory (LSTM) as a prediction model, which is used to predict angle-dependent reflectance distributions of colour samples with glossy and matte surfaces. A two-dimensional (2D) reflectance measurement system was developed to measure the angle-dependent reflectance in this study. Its structure mainly included a semicircular rotating mechanism, a high-resolution digital camera and a high-quality white light-emitting diode. A semicircular rotating mechanism was designed to rotate from 10° to 170° in the vertical direction. Two ColorGauge miniaturised colour charts with glossy and matte surfaces were selected as test chips. The test chips on ColorGauge miniaturised colour charts included fives colours of glossy white, glossy black, matte red, matte green and matte blue. The reflectance distributions of the test chips were measured by the 2D reflectance measurement system, and the measured reflectance data were used as training data in the LSTM model. In comparison with second- and third-order regressions, the mean CIE lightness difference (0.09) using the LSTM model was lower. Therefore, it was verified that the LSTM model performed well in predicting reflectance distributions. In addition, the LSTM model was also validated on the additional test samples (10 matte chromatic samples and five glossy achromatic samples). The maximum and minimum mean CIE lightness differences were 3.77 and 0.64 for matte chromatic samples, and 2.34 and 0.42 for glossy achromatic samples, respectively. The results of small prediction errors indicated that the LSTM model presents excellent prediction performance. |
Coloration Technology | 20250108 |
| 8 | Comparative Analysis of Measured Total and Diffuse Transmittance | The National Measurement Laboratory (NML) organized a pilot comparison in the Asia-Pacific region, focusing on high-transmittance haze samples. During the measurement of transmittance haze (TH), values of total transmittance (TT) and diffuse transmittance (DT) for the same samples were also obtained. This study primarily adopts Double Compensation Method for comparison, as this approach avoids errors caused by inconsistent integrating sphere configurations during the measurement process, thus providing data closer to theoretical values.
The results indicate that for samples with transmittance haze around 90％, the inter-laboratory variation was more significant. When evaluating differences between laboratories using En values, all DT and TT results showed En values less than 1, except for the TT result of the sample with approximately 40％ TH, which had an En value greater than 1. |
Measurement Information (CMS/ITRI) | 20250630 |
| 9 | A novel method for synthesis of graphene oxide thin-film utilizing vacuum UV exposure | In this study, we present a novel method for synthesizing graphene oxide (GO) by exposing single-layer graphene (SLG) thin films to intense vacuum ultraviolet (VUV) radiation at 130 nm in the presence of gaseous oxygen. This photochemical process introduces structural defects and oxygen-containing functional groups, significantly modifying the luminescent properties of the GO. A dual emissive property was observed in this GO; a prominent violet emission at 414 nm, attributed to the n?π? electronic transition of localized oxygen functional groups, and a secondary, weaker emission around 588 nm from delocalized defective states. Further Raman, XPS, and time-resolved fluorescence lifetime measurements provide valuable insights into the mechanisms underlying the luminescence of GO. These findings highlight the significant role of oxygen functionalization and defect introduction in enhancing optical properties, paving the way for advanced applications in optoelectronics. | Optical Materials | 20250301 |
| 10 | Development of a method for collecting aerosol nanoparticles using an electrostatic collector | As semiconductor process nodes shrink to the nanometer scale, process gases, reagents, and non-volatile micro-pollutants in the environment may adhere to the wafer surface, leading to wafer defects and a decrease in the yield of semiconductor devices. Therefore, the development of technologies to collect non-volatile micro-pollutants in the gas phase will improve the cleanliness of the semiconductor process environment and help control wafer surface defects. Methods for collecting gas-phase micro-pollutants include impingement, impaction, and electrostatic methods. Among them, the electrostatic collection method uses an electric field to adsorb charged aerosol particles onto the substrate, showing better collection efficiency for smaller-sized micro-pollutants. This method presents a potential solution for controlling micro-pollutants in today’s semiconductor process environments. The aim of this study is to develop an electrostatic precipitator (ESP) based on the electrostatic method and evaluate the collection efficiency for aerosol particles of different sizes. The experimental system consists of an atomizer, a neutralizer, a differential mobility analyzer (DMA), an electrostatic precipitator, and a condensation particle counter (CPC). The experimental process involves using the atomizer to convert liquid samples into aerosol particles. The neutralizer charges the particles, which are then sorted by particle size using the differential mobility analyzer by applying a voltage. Aerosols with specific particle sizes are collected by the electrostatic precipitator, and the exit of the electrostatic precipitator is connected to the condensation particle counter to measure the particle concentration in real-time. The particle collection efficiency is calculated using the formula: [1 - (actual number of nanoparticles collected by the electrostatic precipitator / actual number of nanoparticles collected without the electrostatic precipitator)] * 100％. The experimental results show that the developed electrostatic precipitator achieves extremely high collection efficiency for nanoparticles of different sizes. For aerosol particles with sizes of 5 nm, 10 nm, 25 nm, and 100 nm, the collection efficiency is 100％. For 200 nm nanoparticles, the collection efficiency is 99.9％, and for 500 nm particles, the collection efficiency is 91.3％. Particles collected by the electrostatic precipitator are transferred onto the wafer surface, and particle sizes are verified using atomic force microscopy (AFM). The results show that the particle sizes of the collected particles are consistent with expectations, confirming the performance of the electrostatic precipitator. The electrostatic collection technology developed in this study can effectively collect aerosol nanoparticles in the size range of 5 to 500 nm, demonstrating its potential application value in particle control and cleanliness enhancement in semiconductor processes. As semiconductor processes gradually move into the nanometer scale, the impact of aerosol nanoparticles on wafer surface defects becomes increasingly significant. Therefore, developing technologies that can efficiently collect nanoparticles of different sizes will be crucial for improving cleanliness, reducing defect rates, and minimizing ineffective processing time in semiconductor manufacturing. In the future, this technology is expected to be further optimized and applied on a large scale in semiconductor manufacturing, providing more precise particle monitoring solutions, thereby improving product yield and process performance. Additionally, with the growing demand for environmental protection, electrostatic collection technology can also serve as an energy-efficient and eco-friendly pollution control solution, contributing to the sustainable development of the semiconductor industry. |
Conference on Environmental Analysis | 20250507 |
| 11 | Development of a Primary Method for the Measurement of Gold Nanoparticle Number Concentration using Single-Particle ICP-MS | Nanomaterials are widely integrated into innovative industrial and consumer products due to their unique physicochemical properties. To ensure product quality and regulatory compliance, establishing metrological traceability to the International System of Units (SI) for nanoparticle concentration is crucial. This study establishes a primary measurement system based on single particle inductively coupled plasma mass spectrometry (spICP-MS) for calibrating the number concentration of gold nanoparticles (AuNPs) in liquid suspension. The system’s transport efficiency was determined using the dynamic mass flow (DMF) method, as adopted by the UK’s Laboratory of the Government Chemist (LGC), which is traceable to the SI units of mass and time. By employing spICP-MS as a particle counter, we developed a primary method for particle concentration. This system is capable of measuring AuNPs with diameters ranging from 15 nm to 100 nm and number concentrations from 5.00 × 10^3 particles/g to 2.00 × 10^12 particles/g. Following the ISO/IEC Guide 98-3:2008, the measurement uncertainty was evaluated, yielding a relative expanded uncertainty of 15 ％ at a 95％ confidence level. This work provides a critical metrological traceability service for Taiwan’s advanced semiconductor, cosmetic, and food industries, thereby supporting their global competitiveness. | The 11th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN 2025) | 20251126 |
| 12 | Investigation of the Effects of Storage Conditions on the Stability of Iron Oxide Nanoparticles Using Single-Particle ICP-MS (spICP-MS) |
Nanoparticle reference materials play an important role in the field of measurement. They are widely used for trace contamination monitoring, particle size calibration, and the assessment of chemical purity, and they also serve as a key basis for ensuring the traceability of measurement results. However, if nanoparticle reference materials are not stored properly, particle degradation and contamination may occur. In this study, iron oxide nanoparticles were selected as the target material, and their stability under different storage conditions was systematically investigated using single-particle inductively coupled plasma mass spectrometry (spICP-MS). The effects of storage temperature and container material on the stability of low-concentration iron oxide nanoparticle suspensions (3.5 μg kg?1) were evaluated. The results show that storage temperature and container selection influence both particle size and particle number concentration, leading to a shortened shelf life. These findings will be useful for establishing storage guidelines for nanoparticle reference materials and for improving the accuracy and reliability of nanoparticle analysis. |
Measurement Information (CMS/ITRI) | 20251128 |
| 13 | Calibration and Measurement Procedures for Single Particle Inductively Coupled Plasma Mass Spectrometry | This paper elucidates the calibration and measurement procedures of single particle inductively coupled plasma mass spectrometry (spICP-MS) for the quantification of nanoparticle number concentration and size. The rigorous determination of transport efficiency is pivotal for the accurate quantification of instrument signals. This study details two mainstream determination methods: the particle frequency method and the particle size method, both of which rely on nanoparticle reference materials with known characteristics for calibration. The particle frequency method incorporates parameters such as particle density; however, since the actual density often deviates from the bulk density, this discrepancy serves as a major source of measurement uncertainty. Conversely, the particle size method depends on the sensitivity ratio between ions and nanoparticles. Its accuracy rests on several assumptions, notably that the ionization efficiency within the plasma is identical for both dissolved and particulate analytes. Finally, this paper provides an overview of the spICP-MS measurement workflow by presenting relevant parameters and data calculation methods. | Measurement Information (CMS/ITRI) | 20251128 |
| 14 | Measurement Uncertainty Evaluation and Analysis of a Tipping-Bucket Rain Gauge Calibration System | Due to excessive land development by human activities, abnormal climate variations have become increasingly evident, resulting in a significantly higher frequency of heavy rainfall events in Taiwan. Consequently, rainfall monitoring data has become one of the essential sources of information for national disaster prevention. With the continuous advancement of technology, the demand for both the quantity and accuracy of rainfall monitoring information has also steadily increased. This study addresses the Central Weather Administration’s requirements for rainfall gauge calibration equipment. By referencing the design of rainfall gauge calibration systems used in various countries and considering the specific needs of the Central Weather Administration, a new calibration system and operational procedures were redesigned and established. Leveraging the expertise of the Metrology Technology Center of the Industrial Technology Research Institute, a measurement uncertainty evaluation and analysis was conducted for the newly developed calibration system. The objective is to enable rainfall gauge calibration to be performed with minimal manpower while ensuring that the measurement uncertainty of the calibration system meets the actual needs of the Central Weather Administration. This enhances the credibility of the calibration results and provides substantial benefits to rainfall gauge calibration operations. |
CSME2025 | 20251206 |
| 15 | CCM.FF-K2.2011 Final report the key comparison for water and hydrocarbon flows ranging from 5 kg/min to 60 kg/min | The purpose of the Key Comparison (KC) for “Water” and “Hydrocarbon” flow measurement is to support the Calibration and Measurement Capabilities (CMC) of the participating National Metrology Institutes and Designated Institutes as part of the CIPM MRA. The comparison should lead to ‘the key comparison reference value (KCRV) and the Degree of Equivalence (di, U(di)) found between participants and the KCRV’. The flow range of (5 – 60) kg/min is of big interest for legal metrology since fuel dispensers operate in this range and a good reference value is essential for society and governments. | Metrologia | 20250722 |
| 16 | CIPM Water Flow Key Comparison CCM.FF-K1.2022 Comparison of Primary Standards for Liquid Flow Flow Range (0.1 to 10) μL/min Final report | The CCM.FF-K1.2022 comparison was organized to determine the degree of equivalence of the national standards for liquid flow in the range from 0.1 μL/min to 10.0 μL/min. A Coriolis mass flow meter and a thermal flow meter were used as transfer standards. Six laboratories from three Regional Metrology Organizations (RMOs) participated between April 2023 and December 2023: ‧ EURAMET: METAS (Switzerland), CETIAT (France), IPQ (Portugal) ‧ SIM: NIST (United States of America) ‧ APMP: CMS (Taiwan, R.O.C.), NMIJ (Japan) METAS was the pilot laboratory and performed the repeatability and reproducibility tests of the transfer standards to quantify these contributions to the measurement uncertainty of the transfer standards and assess the stability of the devices. The reference value was determined at each flow separately following the procedure presented by M. G. Cox and the χ2 consistency check [1] was performed. The degree of equivalence with the KCRV was calculated for each flow and laboratory along with the normalized degree of equivalence or ???? values. |
Metrologia | 20250630 |
| 17 | Distributed Hydrogen Leak Detection Technology | Hydrogen energy is regarded as one of the most promising clean energy sources for achieving net-zero carbon emissions by 2050. Recent years, countries have been actively developing hydrogen-related infrastructure, including hydrogen production and storage facilities and hydrogen refueling stations. One of the key challenges in the safe deployment of hydrogen energy lies in the early detection of hydrogen leaks. This study presents an innovative detection system that integrates hydrogenochromic films with deep learning-based image recognition algorithms. The complete system has been successfully deployed and tested in a real-world setting with over 790 hours of continuous operation and achieved an accuracy of 99 ％. Furthermore, a wireless radio frequency-based complementary solution is under developing to address limitations in pipelines obstructed environments. | CLEANING TECHNOLOGY | 20251128 |
| 18 | Analysis of nano particles in chemical mechanical polishing slurries using differential mobility analyzer-condensation particle counter (DMA-CPC) |
Chemical mechanical planarization (CMP) is a polishing process to remove surface materials on wafers, which has been one of the most important processes in the recent semiconductor industry. Generally, slurries used in CMP for planarization are composed of silica based and ceria based abrasive nano particles, an oxidizer, and organic compounds in deionized water. The particle size distribution of slurries is a critical factor in the CMP process. Larger particles or agglomerates of smaller particles can cause scratching defects on the wafer. Recently, scanning mobility particle sizer (SMPS) has been widely used for measuring the slurry abrasive size. This technology involves the processes that particles in liquid are first transformed into aerosols through a nebulizer, then enter a differential mobility analyzer (DMA) to be charged by a charger and classified according to the electrical mobility, with only particles of specific mobility exiting through the output slit. These particles are then introduced into a condensation particle counter (CPC) to determine both size and number concentration However, the surfactants existing in slurry solutions would cause the non volatile residue shell coating on the particle surface and lead to inaccurate particle size distribution. In this study, we utilized an electrospray (ES) nebulizer to produce aerosols with smaller droplet size (several hundred nanometers) which could be able eliminate the effect of surfactants. Furthermore, we also used a pneumatic atomizer combined with the heating device to remove solvent component in slurries in order to measure the accurate particle size Moreover, two pretreatment methods (dilution and pH adjustment) were attempted to improve dispersion stability. |
Chemistry National Meeting | 20250308 |
| 19 | Development of Organic Impurity Collection Technology for Semiconductor Raw Materials | In semiconductor manufacturing processes, the purity of solvents such as isopropyl alcohol (IPA) significantly affects the process performance. Trace impurities or contaminants in the solvent may lead to defects or malfunctions in the devices, thereby impacting the overall product yield and reliability. Impurities that may be present in IPA primarily include moisture, residual organic compounds, metal ions, and particles. Understanding the composition of these impurities is crucial for improving the IPA-based process, as it aids in optimizing process control and enhancing product purity and stability. To address this, the present study develops an electrostatic particle collector for collecting organic impurities in IPA, which is combined with gas chromatography-mass spectrometry (GC-MS) to conduct experiments on organic component analysis. | Measurement Information (CMS/ITRI) | 20250227 |
| 20 | Development of Analytical Techniques for Organic Nanoparticles | Measurement of impurities in process chemicals is a critical issue in the semiconductor industry. As process nodes continue to shrink, there is increasing demand for analytical methods capable of detecting nanoparticle size, concentration, and chemical composition, with stringent requirements such as particle sizes below 20 nm and concentrations under 3 particles/cm3. This study aims to develop analytical techniques for characterizing the organic composition of nanoparticles. A gas chromatography-mass spectrometry (GC-MS) system is established to analyze organic compounds, while a differential mobility analyzer (DMA) is used to generate size-classified organic nanoparticles. These particles are collected using an electrostatic sampler and analyzed by GC-MS. To ensure accuracy, C12–C30 long-chain organic standards are used to optimize system parameters and achieve detection limits below 10 μg/kg (ppb). Based on the method proposed by Lee ＆ Park [1], organic aerosol nanoparticles of di(2-ethylhexyl) phthalate (DEHP) are generated using an atomizer and heated tube setup, then size-selected by DMA and collected on wafers. The collected particles are extracted with isopropanol and analyzed by GC-MS. The study also establishes a model to evaluate particle sizing uncertainty based on DMA theory, ensuring traceability and accuracy. This method provides a sensitive analytical approach for monitoring organic nanoparticle contaminants in semiconductor process control. | Conference on Environmental Analysis | 20250507 |
| 21 | Application of scanning mobility particle sizer (SMPS) for nano particle and non-volatile residue analysis on multicomponent organic chemicals | The semiconductor industry has continuously advanced by reducing device dimensions, adopting more intricate layouts, and incorporating a wide range of materials. Among the critical processes to ensure device quality and performance, impurity detection in ultrapure reagents and chemicals is particularly essential. Even trace levels of contaminants can alter electrical properties, potentially resulting in device failure. Nanoparticles and non-volatile residues (NVRs) serve as effective indicators for the rapid identification of impurities in ultrapure chemicals. NVRs typically comprise dissolved inorganic species (cations and anions), particulate matter, and high-boiling-point organic compounds. Recently, the scanning mobility particle sizer (SMPS) has been refined for characterizing the size distribution and concentration of nanoparticles and NVRs in chemical reagents or in emissions from storage containers. A standard SMPS system consists of a nebulizer, a differential mobility analyzer (DMA), and a condensation particle counter (CPC). In this technique, aerosols are generated from the sample via nebulization, followed by solvent evaporation, allowing for the quantification of aerosolized particle size and number. However, direct analysis of nanoparticles and NVRs in complex multicomponent organic chemicals, especially those containing solvents with boiling points exceeding 300°C, remains challenging. In this study, we developed a measurement approach that integrates the SMPS system with a solvent removal step, enabling successful detection of nanoparticles and NVRs in organic chemicals. Various experimental parameters were systematically adjusted to enhance measurement accuracy for both particle size and concentration. Under optimized conditions, the method demonstrated the capability to distinguish impurity levels across different batches of organic chemicals. This approach offers a practical and effective solution for impurity analysis and has potential applications in improving yield and reliability in semiconductor manufacturing. |
IEEE NANO | 20250716 |
| 22 | Evaluation of the Stability of Proficiency Testing Items for Calibration and Case Studies | Proficiency testing (PT) is an activity conducted through interlaboratory comparisons (ILCs), in which the performance of participants is evaluated against pre-established criteria. It is recognized as one of the important tools for demonstrating the measurement capabilities of laboratories. Since variations in PT items may pose risks to the evaluation of performance, PT schemes in the field of calibration, where identical items are circulated to multiple laboratories for measurement, require thorough assessment of item stability to ensure the validity of comparison results. This paper presents the statistical methods applied by the provider for assessing the stability of PT items in calibration schemes and demonstrates practical case studies verifying the indicators used to determine sufficient stability. | Measurement Information (CMS/ITRI) | 20251128 |